Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

1/4-28 0.62 1/8 NPTF 0.09 088 (7/8") 0.50 0.34 0.95 5/8-18 0.75 0.93 0.38 0.251 1/4-28 0.50 0.624 0.250 0.62 1/8 NPTF 0.09 106 (1 1/16") 0.62 0.34 1.17 5/8-18 0.12 0.88 0.251 0.25 1.12 0.38 0.624 0.312 5/16-24 0.50 0.62 1/8 NPTF 0.09 125 (1 1/4") 0.88 0.41 1.62 3/4-16 0.251 0.25 1.06 0.50 0.749 0.38 1.32 0.75 0.437 7/16-20 0.78 1/8 NPTF 0.09 150 (1 1/2") 0.88 0.63 1.50 3/4-16 1.25 0.25

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

REA/REB

8 @2 !7 @6 #1 #0 @8 !0 @9 !1 #2 i !6 @3 @1 @5 @4 @0 REAS10 Parts list Parts list No. Description No.

Dual Rod Cylinder Series CXSJ/CXS

8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 r !9 !8 @2 !6 @9 !7 o i @4 @5 !8 r !9 @2 !6 @9 !7 o i Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Component Parts: Standard Piping No. Description No.

Plug-in Unit

PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

Air Cylinder

4 3/8 3/8 1/2 1/2 84 90 98 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 23 28.5 28.5 116 126 100 14 Long stroke 2 x Cushion valve 2 x P When the stroke is 1001 mm or longer, a tie-rod reinforcement ring is attached.

5 Port Air Operated Valve

VFA 4 (A), 2 (B) port 1/4, 3/8 4 (A), 2 (B) port 1/8 Manifold base model 1 (P) port 1/8 5 (R), 3 (R) port 1/2 VFRA 5 (R), 3 (R) port 1/4 5/3 (R) port 1/8 VPA4 1 (P) port 3/8 SYJA VZA 5 (EA), 3 (EB) port M5 x 0.8 1 (P) port 1/8 5 (R), 3 (R) port 3/8 VTA EXH port type VGA Common EXH Individual EXH Common EXH Common EXH Common EXH Applicable valve model VFA130 VFA520 VFA330 VPA Applicable stations

HRX-OM-S004

) . 7-9 Chapter 8 Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRS100/150-A-20. 8-1 8.1.2 HRS100/150-A-40. 8-2 8.1.3 HRS100/150-A-46. 8-3 8.1.4 HRS100/150-W-20. 8-4 8.1.5 HRS100/150-W-40. 8-5 8.1.6 HRS100/150-W-46. 8-6 8.1.7 Refrigerant with GWP reference . 8-7 8.1.8 Communication specification . 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/

CY1

9 #8 !0 !2 !6 @4 @1 @8 @3 @5 @6 e y r u q o !1 #2 i @9 w $1 #1 #0 @7 CY1L10 to 40 @2 #9 @0 $0 t !4 !5 !9 #5 $2 #8 !2 !0 !6 !7 @4 @1 !8 @8 $1 #6 #7 F Enlarged view F 10,15 $1 @3 @5 @6 e y r q #2 !3 !1 o i u w #1 @7 #0 10 Parts list Parts list No. Description Slide block No.

LX

to cross section C-C. 27.5 T-slo B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Kit no.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

Speed Controller with One-touch Fitting

Applicable tubing material Metal parts material Metric size Inch size Seal method Port size Body size 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 16 12 10 8 6 4 3.2 2 2 Gasket seal M5 x 0.8 1 2 10-32UNF 2 1/8 2 2 2 1/4 R Sealant 1 1/4 NPT 3 3/8 2 1/2 4 2 Brass/Steel wire Nylon (T, TIA Series) 1/8 2 2 1/4 Stainless steel Soft nylon (TS, TISA Series) G 1/4 3 3/8 Face seal Polyurethane (T, TIUB Series)

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 Universal type 01 02 03 04 Applicable tubing O.D.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

8 8 8 7 5.5 5.5 5 50 45 45 41 1/4 1/8 1/8 14 12 10 16 13 13 10 8 M14 x 1.5 M32 x 2 134 3.2 23 The bracket is shipped together.

Compact Rotary Actuator Series CRQ2

8, G 1/8, NPT 1/8, NPTF 1/8 Port size Output (Nm) 0.3 0.75 1.8 3.1 5.3 MSU Output under the operating pressure at 0.5 MPa.

Micro Mechanical Valve Series VM1000

N F.O.F. 2 x 1 8 3 x 1 4 P.T.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

HRX-OM-Y098

. 7-8 7.4.1 Replacing Particle Filters . 7-8 7.4.2 Replacing the DI filter . 7-8 7.4.3 Consumables . 7-11 Chapter 8 Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRL100/200/300-A-20 . 8-1 8.1.2 Refrigerant with GWP reference. 8-2 8.1.3 Communication specifications . 8-2 8.2 Dimensions . 8-3 8.2.1 HRL100-A-20 . 8-3 8.2.2 HRL200-A-20 . 8-4 8.2.3 HRL300-A-20 . 8-5 8.3 Flow Diagram . 8-6 8.3.1

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

-3-A10 VS7-3-B04 VS7-3-B06 3/8 1/4 Piping specifications Symbol A02 A03 A04 A06 A10 B02 B03 B04 B06 Size 2 Size 3 Size 1 Horizontal 3/8 Side-ported 1/4 0.37 3/8 1/4 Side-ported 3/8 Bottom 3/8 Side-ported 1/2 3/8 Side-ported 3/4 0.68 1/2 Horizontal Side-ported 1 1.29 3/4 Bottom-ported 1/4 3/8 Bottom-ported 3/8 0.68 1/2 Bottom Bottom-ported 1/2 1.29 3/4 Bottom-ported 3/4 3/4 1/2 Thread