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When 1 digit = 1 kPa, the pressure is given with an increment Digit (Min. setting unit) of 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.

HHH is 6 displayed. (1) Reset applied pressure (1) Check that the pressure is not to a level within the set pressure range.

When 1 digit = 1 kPa, the pressure is given with an increment Digit (Min. setting unit) of 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.

23 6 38 50 ZSP 48 (54) ISl ZSM DIN rail L PFl 7.5 10 25 5 IFl 4.5 35 27 Material: Aluminum Part number of DIN rail Part number ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L 105 140 175 210 245 280 315 3.1-14

HHH is 6 displayed. (1) Reset applied pressure (1) Check that the pressure is not to a level within the set pressure range.

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

Insulation oil A H Polyacetal Note 1) Note 1) Non-leak (10 6 Pam 3/s) Brake oil Water (up to 60C) B P A H Stainless steel Note 1) If using for other fluids, please contact SMC.

1 @4 Steel for spring Phosphate coated Wave washer Piston A Stainless steel !2 @5 Nickel plated Carbon steel Conical spring washer Chromate treated Rod cover Aluminum alloy !3 Bumper Urethane rubber !4 Clip Stainless steel spring wire !5 Rubber magnet Synthetic rubber Replacement Parts MHL2-40 Main parts Seal kit @6@7@8@9#0 <10> !1!3!6@6 <16 to 25> eo!0!4!6@6#0 <32, 40> ei!4!

(mm) Mounting screw P L1 H2 D W1 L2 H1 W2 W3 Model (Nominal x Length) 6 4 TM-04 TM-06 TM-08 TM-10 TM-12 6 3.25 72.5 4.5 5.5 6 6.5 6.5 10 5 7.5 7.5 8 12 12 8 10 11 12 12 17 21 23 25 25 2.2 2.8 2.8 3.2 3.2 2 x 6 4.5 91.5 9.5 5.5 77.5 6 12.5 7.5 77.5 6 15 9 93 6.5 2.6 x 8 2.6 x 8 3 x 8 3 x 8 12 10 8 16.3 8.8 14.3 7.5 12 9.8 How to Use Caution 1.

light/surge voltage suppressor VQ DIN terminal (D) VKF VQZ VZ VS VFN Max. 10 (Surge voltage suppressor) Manual override (Non-locking) Applicable cable O.D. 6 to 8 Rc 1/8 (External pilot port) Rc 1/8 (Pilot exhaust) Switching plate (Light) (Mounting hole) Rc 1/2, 3/4, 1 (P port) Rc 1/2, 3/4, 1 (A port) Rc 1/2, 3/4, 1 (R port) 4-9-5

Doc.No.IZ-OMK0015D PRODUCT NAME IONIZER MODEL/Series IZS31 series 1 Doc.No.IZ-OMK0015D Contents Safety Instructions . 3 1. Installation Method . 9 1-1. Installation of Ionizer Body . 9 1-2. Installation of Feedback Sensor/Auto Balance Sensor [High-precision type] .11 1-3. Installation of Auto balance sensor [Body-mounting type] . 12 1-4. Cable Connection . 13 2.

0 0 2 4 6 8 10 0 1 2 3 4 5 Work load (W) kg Work load (W) kg Work load (W) kg 300 30 150 L2 200 20 M2 100 L2 mm L2 mm L2 mm W 100 10 50 L2 M2 0 10 30 20 0 1 2 3 4 5 0 2 4 6 8 10 Work load (W) kg Work load (W)kg Work load (W) kg 30 300 150 a=500 a=500 a=500 Horizontal/Lateral a=1000 a=1000 a=1000 20 200 100 a=2000 a=2000 L3 mm L3 mm L3 mm a=2000 L3 100 10 50 W M3 a 0 1 2 3 4 5 0 10 30 20

"# ## $%# 72 +1 ! ' !' @; 9 ( ( & & & & & +&+ 2 * ( ? $ %&' () $* $ %&' () $* # " 7( ! ! ! " >9 47 ! ! ! ! + ',! 34 %() +(# ' 5 & $%#6 / (7 ( , ./$ 0 1 0 1 VV061 ! ''()% ,)# % # ## ., & /, '# & , . '0 23/ 414 e u q t r y !0 V100 S070 i VQD o 23/ 4#40 56"4!4 ! VKF w /, 1 !() '!2 VK VT VS & "# # & # ''()% * 8 7 23/ 9 : : 7 23/ : 7 9;9 8 : (; !

PAX PB Model %# & 0 & VXA3114 VXA3124 VXA3134 VXA3224 VXA3234 VXA3244 , 1 , / , 1 , / , 1 , / , / . 1 , / . 1 , / . 1 ,!* )!).)!)./ Material 17-3-101 6 The VX series will be revised shortly. Series VXA31/32 Common (C.O.)

Atmospheric pressure dew point 17C Pressure dew point 10C Where nearly pure air free from smell as well as moisture, dust and oil is specified 1, 4, 1 0.004 mg/m3 (ANR) Mist Separator Super Mist Separator Odor Removal Filter Mist Separator Series AM Super Mist Separator Series AME Odor Removal Filter Series AMF 0.01 m No oil odor to 1, 6, 1 Micro Mist Separator with Prefilter Membrane Air

Different side 110 35 Same side 110 55 D-A44 Different side 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) Same side "n" pcs. 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) 1 pc. 110 15 Cylinder Unit Auto Switches/Proper Mounting Position and Height for Stroke End Detection D-F5/J5/D-F5NTL D-F5BAL/F5F D-F5W/J59W D-A3 D-G3/K3 G(PF) 1/2 (compatible cable O.D

Doc. no.CK1*-OM0066P PRODUCT NAME Clamp Cylinder MODEL / Series / Product Number Contents Safety Instructions P2 1. Specifications P4 1-1. Specifications 2. Installation and Handling P4 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Cushion 2-7. Directional control 2-8. Auto switch 3. Maintenance P17 3-1. Checks 3-2.

C80CN 15 Adjustable Mounting Height Type Series RSG Models Mounting Flange 40 50 Bore size (mm) Internal magnet Screw-in Rc (PT) 1/8 Type of piping 8/6 6/4 Integrated One-touch fitting Action Double acting, Single acting, Double acting/spring loaded Round bar type Non-rotating type Rod end configuration Roller type Lever type with integrated shock absorber Round bar type Lever

Tighten them with the cross recessed round head tapping screw 13 . 6. Mount the tube gasket 9 to the right cover 2 to mount to the body 1 . Tighten them with the hexagon socket head cap screw with washers 12 . 17 15 3 10 14 26 11 5 12 19 9 12 14 1 11 26 4 2 6 15 Cushion seal 4 Direction of the shaft(key) 38 - 7.