One branch of manifold valves/input unit can be connected to 32 outputs/32 inputs. Up to 4 branches can be connected (total 128 outputs/128 inputs). No.
(Becomes close to the trapezoidal acceleration as the setting value reaches 0) Acceleration and deceleration ratio 10 10 10 10 to 100 EQFS251 to 50 EQFS321 to 70 EQFS401 to 70 Torque when held *2 50 70 70 Sets the torque when stopped after the positioning operation. (Unit: %) H 140 80 80 Sets the position loop P constant.
35) 10 (10) 16.5 19.2 18.4 21.6 20.5 23.2 22.4 25.6 05 20 10 A A 30 (25) 10 (10) 1 15 10 For D-F9, D-M9 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotating angle.
35) 10 (10) 16.5 19.2 18.4 21.6 20.5 23.2 22.4 25.6 05 20 10 A A 30 (25) 10 (10) 1 15 10 For D-F9, D-M9 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotating angle.
Port size lll5 10-32 Nom. (M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.
Port size lll5 10-32 Nom. (M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.
36 79 35 14 22 10 1/4 24 29.5 68.5 32.5 55 50 62.5 25.5 68.5 67 60.5 55 102 62.5 71 XSA3-3P(N) 40 40 88 40 16.5 24.5 3/8 29 32 77.5 35 64 52.5 71.5 28 77.5 69.5 69.5 57.5 104.5 71.5 73.5 6 XSA Series Special Option/Replacement Parts Special Option Special Electrical Entry Direction 2 1 S 5 G 1 XSA 2 Enter standard product number.
Load Rotary actuator Flexible coupling Bearing Fig. (9) Flexible coupling 28 - Piping and operating direction Fig. (10) shows piping ports of the rotary actuator. Table (9) shows the port size. Table (9) Port size Size Port size 30 M5 50 Rc1/8 63 Rc1/8 B Port 80 Rc1/4 100 Rc3/8 A Port Fig. (10) Port location A fixed throttle is installed inside the actuator port.
(mm) Note) Type 04 06 08 10 12 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Made to Order (For details, refer to page 659.) Control type Note) For applicable tubing O.D. selection, refer to the Model.
Construction Seal method: Sealant For R, NPT thread Seal method: Gasket seal For M5, 10-32UNF Meter-out Meter-in Meter-out Seal method: Face seal For G thread Meter-out Component Parts No.
C4 C6 M5 L4 L6 B4 B6 4 One-touch fitting 6 One-touch fitting The "" symbol indicates mounting. Put the "" symbol at the beginning of part numbers for solenoid valves, etc., which are to be mounted. M5 x 0.5 4 elbow fitting assembly (upward) Valve stations are numbered from station 1 on the D side.
Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, Y TYPE ADAPTOR, ZP SERIES, VACUUM SERIES, ZP VACUUM PAD, 22, ZP NO SIZE RATING, .08800
Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, Y TYPE ADAPTOR, ZP SERIES, VACUUM SERIES, ZP VACUUM PAD, 22, ZP NO SIZE RATING, .04400
Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, Vacuum Pad, with Buffer, VACUUM PAD, ZP, ZP2, ZP3, 46 lb
Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, Vacuum Pad, with Buffer, VACUUM PAD, ZP, ZP2, ZP3, 46 lb
Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters VACUUM PAD, ZP, ZP2, ZP3. VACUUM PAD WITH BUFFER. 24.70000 lb. M30.
Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters VACUUM PAD, ZP, ZP2, ZP3. VACUUM PAD W/O BUFFER. 25.50000 lb. M30.
Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, Vacuum Pad, without Buffer, VACUUM PAD, ZP, ZP2, ZP3, 15 lb
Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, VACUUM PAD (FLAT) W/O BUFFER, VACUUM SERIES, ZP VACUUM PAD, TL, ZP PAD SIZE 2-8, .02420
Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, VAC PAD (BELLOWS) W/O BUFFER, VACUUM SERIES, ZP VACUUM PAD, TL, ZP PAD SIZE 2-8,