Multistage Ejector Series ZL112/212 1

MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

99

70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100

Multistage Ejector (N)ZL Series

50 75 40 40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

MDHR3-10 1122MDHR3-15 1122H L H When auto switch D-M9V is used When auto switch D-M9 is used When auto switch D-M9V is used Max. protrusion of auto switch from edge of body: L, H Max. protrusion of auto switch from edge of body: H (mm) (mm) D-M9 D-M9V D-M9V Auto switch model Auto switch model L H 1.3 The auto switch will not protrude in the case of D-M9. 2.3 H 939 Rotary Actuated Air

EX510-GPR1.eng

For single power supply use COM D COM D is receiving data: Lights up 2 COM D is having no data to receive: Goes off 1: Refer to "Operation Manual" for the extension diagnosis information. 2: It is lit when input unit is connected and communicating normally.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA

Process Pump

D-DN

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

, D-F9WV D-F9P B, D-F9W D-A9V D-F9N D-F9V Number of auto switches 2 pcs. 15 Note) 20 Note) 10 10 5 10 Note) 15 Note) 20 Note) 5 5 1 pc.

Slide Tables MX Series

D 1.Body tapped H H l Guide block D l Max.tightening torque ftlb (Nm) Locating pin hole D x H (mm) Max.screw-in depth l (mm) Bolt used Model Use a bolt that is less 0.5mm than max.(l)screw-in depth to avoid contacting the guide with mounting bolt.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

60 24 Weight (kg) 50 Hz Apparent power (VA) Inrush 60 Hz AC 50 Hz Holding 60 Hz Power consumption (W) DC Note 1) Based on JIS B 8375-1981.

CM2x-OM0230Q

P11~16 2 CDM2 P14, 3 2./ (mm) 1) (BM2-A)(BJ5-1/) () 2) (BM2-AS/)(BJ4-1/) D-M9A(V) BBA4D-C7/C8/H7 D-H7BA BBA4 BJ2-006BJ2-010BJ2-016 BM2-020(A)BM2-025(A)BM2-032(A) BM2-040(A) BMA2-020(A)BMA2-025(A)BMA2-032(A) BMA2-040(A)BMA2-050(A)BMA2-063(A) BBA4 M3x0.5x14L 1 D-C7C8 D-H7 BHN3-025ABHN3-032ABHN3-040A 11 - <> D-M9NM9PM9BM9NM9PVM9BV D-M9NWM9PWM9BWM9NWM9PWVM9BWV D-M9NAM9PAM9BAM9NAM9PAVM9BAV

EX510-GMJ1.eng

For single power supply use COM C COM C is receiving data: Lights up COM C is having no data to receive: Goes off 24 VDC 24 VDC COM D COM D is receiving data: Lights up COM D is having no data to receive: Goes off : It is lit when input unit is connected and communicating normally. 24 VDC 19 18 Display/ Switch Setting (continued) Switch setting Make sure that switch setting is performed

3 Port Air Operated Valve

(Convertible) Standard 0.2 to 1.0 Operating pressure range (MPa) For vacuum 100 kPa to 0.2 Pilot pressure (MPa) 0.2 to 1.0 (Equivalent to the operating pressure or more) Ambient and fluid temperature (C) 10 to 50 (No freezing) Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance (m/s2) Note) 300/50 Note) Impact resistance: No malfunction to axis and right

³ Noise Level, dBA 50 50 55 Motor Speed, RPM, @60Hz 1740 1740 1750 Motor Power, HP (kW) at 60 Hz 0.5 (0.4) 0.5 (0.4) 1.1 (0.85) Oil Capacity, L 1.15 1 2.4 Connection Flanges NW16 NW16 NW25 Inlet Hose Connection on -01 Models 5/8" to 3/4" 5/8" to 3

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)175UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)