MNB

8 1/4 1/4 3/8 3/8 1/2 6.5 8 9 8.5 10.5 10.5 13 16.5 20 23 33 37.5 6.5 9 10.5 12 14 15 88.5 34 39.5 47 55.5 61.5 69.5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 83 96.5 91 111.2 104.5 123.5 119.5 157 150 177 170 9-6-28

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

MNB

8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !

HRX-OM-X071

Alarm contents, causes, and troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check . 8-3 8.2.2 Monthly check . 8-4 8.2.3 Inspection every 3 months . 8-5 8.2.4 Inspection every 6 months . 8-8 8.3 Stop for a Long Time

HRX-OM-W038

Instructions for Use . 1-5 1.5.2 Personal Protective Equipment . 1-6 1.6 Emergency Measures. 1-7 1.7 Waste disposal . 1-8 1.7.1 Disposal of refrigerant and compressor oil. 1-8 1.7.2 Disposal of product . 1-8 1.8 Material Safety Data Sheet (MSDS) . 1-8 Chapter 2 Name and Function of Parts . 2-1 2.1 Part number of product . 2-1 2.2 Name and Function of Parts . 2-2 2.3 Function of Parts . 2

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Control 0 1 Meter-out Meter-in 15-9-89 16 Construction AS2200

CJ2

1 !2 !3 !4 !5 !6 !7 !8 !

HRX-OM-M090

Instructions for Use . 1-5 1.5.2 Personal Protective Equipment . 1-6 1.6 Emergency Measures. 1-7 1.7 Waste disposal . 1-8 1.7.1 Disposal of refrigerant and compressor oil. 1-8 1.7.2 Disposal of product . 1-8 1.8 Material Safety Data Sheet (MSDS) . 1-8 Chapter 2 Name and Function of Parts . 2-1 2.1 Part number of product . 2-1 2.2 Name and Function of Parts . 2-2 2.3 Function of Parts . 2

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1.0 0.68 1.0 0.43 0.52 0.36 0.49 0.37 0.35 0.27 0.13 0.21 0.25 0.20 0.26 0.17 0.25 0.74 0.81 0.92 0.80 0.96 1.0 1.0 0.32 0.28 0.24 0.23 0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 Type 10-SS3YJ5-40-M5 Type 10-SS3YJ5-40-01 Base mounted for internal pilot C4 1/8 1/8 M5 x 0.8 1/8 Type 10-SS3YJ5-41-M5 10-SYJ54M Type 10-SS3YJ5-41-01 Type 10-SS3YJ5-41-C4 Type

Slide Unit Series CX2/CXWM/CXWL

depth 7 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) 2 x Rc 1/8 Cylinder port 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) RB1411-X552 shock absorber 2 x 2 x 6.9 through 2 x 2 x 11 counterbore depth 6.5 (8H7 hole pitch) End lock mechanism 8H7 depth 6 +0.015 0 2 positions for set screws for fixing shock absorbers (M5) 4 x M8 x 1.25 thread depth 15 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) 8H7 depth 12

Slide Unit Series CX2/CXWM/CXWL

depth 7 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) 2 x Rc 1/8 Cylinder port 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) RB1411-X552 shock absorber 2 x 2 x 6.9 through 2 x 2 x 11 counterbore depth 6.5 (8H7 hole pitch) End lock mechanism 8H7 depth 6 +0.015 0 2 positions for set screws for fixing shock absorbers (M5) 4 x M8 x 1.25 thread depth 15 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) 8H7 depth 12

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

VZ100/300/500

sbar)] Body ported For internal pilot VV3Z3-20-1 VZ32 1 8 0.47 0.43 0.13 0.74 0.32 0.19 M5 x 0.8 1 8 M5 x 0.8 0.71 0.98 0.71 1.00 0.68 1.00 0.52 0.36 0.49 0.37 0.35 0.27 0.21 0.25 0.2 0.26 0.17 0.25 0.81 0.92 0.80 0.96 1.00 1.00 0.28 0.24 0.23 0.25 0.25 0.30 0.20 0.22 0.19 0.24 0.24 0.26 VV3Z3-40-2 1 8 1 8 Base mounted For internal pilot 1 8 M5 x 0.8 VZ34 1 8 1 8 VV3Z3-40-1 1 8 1 8 C4 C6

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

SB 8 8 9.5 11 11 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 YB 8 8 10 12 12 WB 2 2 2 2.5 3 VB 4 4 5 6 6 UB 10 10 12 16 16 TB 8 8 10 10 12 SC 7 7 8 8 8 SA 4.2 4.2 5.1 6.6 6.6 O 4.5 4.5 5 5.5 6 Q 11 12 14 17 20 R 44 52 63 78 98 VA WA 4H9 4H9 5H9 6H9 6H9 YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 ZA Model +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.030

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

7ND9071en

(s) 6 0.3 18 1/4 6 mm or 1/4" 1.6* 1.6* 6 mm or 1/4" 1.0* 1.0* 9 0.6 37 1/4 6 mm or 1/4" 2.0 2.0 11 1.1 67 3/8 10 mm or 3/8" [6 mm or 1/4" (x)] 4.1 4.1 13 2.3 140 3/8 10 mm or 3/8" 17 4.3 262 1/2 10 mm or 3/8" 3.6 3.6 20 5.4 330 1/2 10 mm or 3/8" 5.0 5.0 25 10.5 610 1/2 10 mm or 3/8" 9.5 9.5 32 21 1282 3/4 10 mm or 3/8" 18.0 18.0 40 43 2624 3/4 10 mm or 3/8" 35.0 35.0 50 84 5126 1 10 mm

Modular Type Air Filters Series AF

Modular Type Air Filters Series AF Air Filter Series AF Filtration (m) Model Options Port size AF10 M5 x 0.8 AF20 1/8, 1/4 AF30 1/4, 3/8 Bracket AF40 1/4, 3/8, 1/2 5 Float type auto drain AF40-06 3/4 AF50 3/4, 1 AF60 1 Page 328 through to 336 Mist Separator Series AFM AFM20 1/8, 1/4 AFM30 1/4, 3/8 Bracket 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Page 338 through to 344 Micro

KK/KK13

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

4 3 8 , 1 2 Port size 1 8 1 4 , 1 4 3 8 , Normally Open (N.O.)