HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

164.5 170 180 230 251 15 15 15 20 22 22 8 3 , , 8 3 4 1 2 1 Bracket dimensions E D C B A Model Port size 4 3 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

Compact 5-Port Solenoid Valve

2 B 2 B 2 B 2 B 56.6 P 1 1 P 30.5 29.1 A 4 A 4 A 4 A 4 A 4 8.7 11.1 12.5 22.7 18 (Pitch) P=16 (10) (14.3) (For DIN rail mounting) (23.3) One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.

Smooth Cylinder/Low Speed Cylinder

A B A B A B A B A B A B A B A B A B A B Bore size 40 50 63 80 100 6 4 3.5 1.5 6 3 1 0 0.5 6.5 2 4 11.5 10 3 0 0 4.5 0 2 9.5 8 3.5 1.5 5.5 3 1 0 0.5 6.5 2 4 11.5 10 3.5 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 3 5.5 4 2.5 3 9 4.5 6.5 14 12.5 1.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 9 7 6 6.5 4.5 8 10 17.5 16 4.5 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 8 10.5 9 7.5 8 14 9.5 11.5 19 17.5 6.5 6.5 7

1

Specifications CJ1 Stroke adjustment symbol Stroke adjustment symbol Series CJ2 Series Stroke adjustment range (mm) Series Stroke adjustment range (mm) CJP 0 to 15 CJ2 CQ2 CQS 0 to 10 CM2 CG1 MB MB1 CA2 CS1 Bore size (mm) 10 16 HA 37 37 S 49 50 ZZ 114 115 CJ2 0 to 25 A 0 to 25 A MGG MGC S + Stroke ZZ + 2 x Stroke HA + Stroke 0 to 50 B CM2 B 0 to 50 0 to 10 A MGP 0 to 25 B Note) Specifications

Air Suction Filter With One-touch Fittings Series ZFB 1

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Recommended air flow Tubing size Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Unrestricted 360 piping tube mounting. The connector for the IN side is a universal joint type that enables a tube to be connected in any direction within 360.

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

XL

(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

C95

Position D-F5, D-F5W D-J5, D-J59W D-F59F, D-F5BAL D-Z7, D-Y59, D-Y7BAL D-Z80, D-Y69, D-Y7W(V) D-Y7P(V) D-A5 D-A6 D-A59W D-F5NTL D-A3, D-G39 D-A44, D-K39 D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 0 10.5 1.5 14 9.5 22 4.5 17 2 14.5 0 10.5 1 13.5 40 0 21.5 1.5 25 9.5 33 4.5 28 2 25.5 0 21.5 1 24.5 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5

Swivels

A B Wrench Flats Dia.

SL5200

160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 10 in. (0.25 m) Option: 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 0.20 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Bottom mount 0.19 in3 (3.1 cm3) 0.99 lbs (0.45 kg) 3) Delivery pressure Gas Source pressure Proof pressure (Inlet)

ZX

Refer to page 13-2-10 for details. (1) Valve unit (4) Adsorption confirmation switch unit K1 A V ZX1 5 Z B D M L Unit for replacement 15 C 0X B ZSP1 D Piping specifications Applicable nozzle diameter Manifold All ports are equipped with plugs.

IIIIIIIIII

PART NUMBER ORIFICE SIZE 1/16 X 10-32 1/8 X 10-32 .003 B-062-003 B-125-003 .004 B-062-004 B-125-004 SPECIFICATIONS .005 B-062-005 B-125-005 ACCURACY: See "Precision Orifices" MATERIAL: FDA Approved Polysulfone/Polycarbonate MAX.

VHS20/30/40/50

VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

/40-06/50 2-10 I 10 I G H F E X H .

ISO Standard Hydraulic Cylinder

D-A59W D-Z7/Z80 D-M9/M9W D-M9A Bore size (mm) Bore size (mm) D-Z7/Z80 D-A5/A6 A B A B A B A B A B A B Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs 40 50 63 80 100 40 50 63 80 100 11.5 8.5 8 5 13 10 5 2 27 28.5 27 34 35.5 28.5 29 27 13 8 9.5 4.5 14.5 9.5 6.5 1.5 33 33.5 33 38.5 39.5 34.5 33 33 4.5 0 8.5 3.5 47.5 38.5 14.5 9.5 11 6 16 11 8 3 38.5 38 38.5 43.5 45 38.5 28 37 8.5 3.5 12.5 7.5 54

Booster Regulator/Air Tank

Mist Separator, Exhaust Cleaner For VBA40A-04 For VBA42A-04 For VBA43A-04 Model For VBA10A-02 For VBA11A-02 For VBA20A-03 For VBA22A-03 Description Mist separator Exhaust cleaner AM250C-02 AMC310-03 AM450C-04, 06 AMC510-06 AM550C-06, 10 AMC610-10 Note) Refer to page 1022 for air tanks, page 223 for mist separators and Best Pneumatics No.7 for exhaust cleaners.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

47 4.6 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (108.5) 10 A B A B A A A A A A 2.PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 VQD 13 2-M4 clamp screw Triangle mark indicator position EXH outlet 9 Release for switching connector direction D side

70pvpump

Local Area: (800) 258-9200-www.stevenengineering.com Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Diaphragm B Diaphragm A Drive chamber A Drive chamber B Control unit 1.

Applicable Auto Switch Model

11 11 11 10 10 9 9 8 8 10 10 Surge absober 10 11 11 11 9 10 10 10 9 9 8 8 10 10 Note) Average value at normal temperature including hysteresis.