0.5

level: 1 Air flow level: 1 10 10 10 10 Air flow level: 10 5 Air flow level: 10 5 Air flow level: 10 Air flow level: 10 5 5 Air flow level: 10 Air flow level: 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400

MHY2/MHW2

2.7 X 10-6 Calculation of weight m2 = d X e X f X Specific gravity = 0.002(kg) Iz2 = {0.002 X (52 + 102)/12} X 10-6 Moment of inertia around Z2 axis = 0.02 X 10-6 (kgm 2) IB = 0.02 X 10-6 + 0.002 X 472 X 10-6 Iz2 = {m2(d 2 + e2)/12} x 10-6 Moment of inertia around Z axis IB = IZ2 + m2r22 x 10-6 = 4.4 X 10-6 (kgm2) I = 9.0 X 10-6 + 4.4 X 10-6 Total moment of inertia I = IA + IB = 13.4 X

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

PA3000/5000/PAX1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Single AXT66114A Lead wire length 300mm 600mm 1000mm 2000mm 3000mm VQZ1000 VQZ1000-GS-5 VK AXT66113A Latching VQZ2000 VQZ2000-GS-5 6 10 20 30 DC (-COM) VQZ3000 VQZ3000-GS-5 VZ AXT66113AN Latching Note ) Above part number consists of 10 units. Each unit has one gasket and two screws. Orders are accepted in 10 units.

3

MM M 4.5 (2 locations) M4 x 0.7 (4 locations) (Special cap bolt) FX FZ Arm 5.5 FV (mm) Rod Flange M MM Model Rod state 10 mm Clamp stroke 20 mm 30 mm 10 mm Clamp stroke 20 mm 30 mm Head Flange DModel (mm) Retracted Extended Retracted Extended 23 40.5 26 43.5 33 60.5 36 63.5 17 34.5 17 34.5 43 80.5 46 83.5 27 54.5 27 54.5 37 74.5 37 74.5 MKF12-Z FV FX FZ 25 30 45 45 55 55 MKG12-Z MKG16-Z -

MXW

6H9 +0.030 depth 5.5 0 (mm) Model G F E Z NN N L K J HH H GG MXW16-125 99 157 110 345 1 5 64 43 141 45 31.5 MXW16-150 124 176 136 395 1 5 89 68 166 50 24 MXW16-175 151.5 202 163 445 2 6 114 93 191 45 45 39 MXW16-200 174 226 186 495 2 6 139 118 216 50 50 24 8-7-15 16 Series MXW Dimensions: MXW20 Stroke 100, 125 mm Operating port 2-Rc 1/8 Width across hexagon socket hole 4 144 20 10 Width

VZ100/300/500

DXT201-19-1A Note With screw (For VZ52) Refer to pages 4-6-34 to 4-6-45 for manifold use.

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Refer to pages 7 to 10.

Modular Type Lubricators Series AL

D 12.5 20 26.5 35 35 45 47.5 E 30 38 38 45 G 35 60 80 110 110 110 110 J 12.5 20 26.5 35 35 45 47.5 M 30 41 50 50 70 70 N 27 40 54 54 66 66 Q 22 23 26 25 35 35 R 5.4 6.5 8.5 8.5 11 11 S 8.4 8 10.5 10.5 13 13 T 40 53 70 70 90 90 U 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 Model Semi-standard specifications With barb fitting Metal bowl Metal bowl with drain cock

Modular Type Air Filter Series AF

45 45 45 0.18 Weight (kg) 0.06 0.22 0.49 0.99 1.05 0.45 Accessory part no.

Rotary Actuator

6 0 0.030 30 80 Rc1/4 92 72 70 20 35 3 50 M12 1.75 depth 13 5 199 (243) 1.5 5 29.5 33 186 (230) 142 22.5 23.5 12 8 13 9 6 0 0.030 40 100 Rc3/8 112 85 85 25 40 4 60 M12 1.75 depth 14 5 259 (325) 1.5 5 39.5 33 245 (311) 172 28 25 12.5 8 14 10 8 0 0.036 45 Note 1) In addition to Rc, G, NPT and NPTF are also available.

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

Series KV2 Fittings

Series KV2 Table of Contents KV2 One-Touch Body Page # Specifications How to Order Male Connector Straight SAE Flare Female Connector Straight Union Plug-in Reducer Plug-in 90 Elbow Plug-In Y 90 Male Elbow 90 Female Elbow Union 90 Elbow 45 Male Elbow 45 Female Elbow Male Run Tee Male Branch Tee Female Branch Tee Union Tee Male Branch Y Union Y Male Double Y Union Double Y Universal Female

F

21 17.2/10 10 14 KQS10-U02 8 17 28.5 22 21 39/26.6 10 38 KQS10-U03 8 17 26.5 20 21 39/26.6 10 12 KQS10-U04 8 21 27 19 21 39/26.6 12 14 KQS12-U02 8 19 35 25.5 22 46/44.5 12 38 KQS12-U03 9 19 28 19 22 60/44.5 12 12 KQS12-U04 9 21 27 19 22 60/44.5 P R O D U C T S E L E C T O R 45 M A L E E L B O W : KQK (KQ2K) Use to tubing toward 45 from the thread part.

Compact 5-Port Solenoid Valve

Block Connector Connecting Base For the JJ5SY1-10, JJ5SY3-10, JJ5SY5-10 No.

Modular Type Filter Regulator Series AW

Applicable model AW40-06 AW40 AW30 AW20 AW10 Accessory Bracket assembly Note 1) AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AW20P-270AS AR20P-260S G36-10