High Vacuum Angle Valve, XL Series

Fluid 5 to 40C (41 to 104F) Operating temperature C 0.2M to 1 x 10 -6 {1.5k to 7.5 x 10 -9} Operating pressure Pa {Torr} 5 8 5 8 Conductance l/s 1.3 x 10 -8 {1 x 10 -7} at ordinary temperatures, excluding gas permeation 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Internal External Leakage Pa m3/s {Torr l/s} KF16 KF25 KF16 KF25 Flange type/size Principle materials

HRX-OM-R016

Fig. 9-4 Cooling capacity(HRS030--20-(BJMT)) 9.5 Heating capacity 9.5.1 HRS030-A-20-(BJMT) 1000 1000 Ambient Ambient temperatur temperatur 800 e e Heating capacityW 800 Heating capacityW 40 32 25 20 5 40 32 25 20 5 600 600 400 400 200 200 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz Fig. 9-5 Heating capacity(HRS030

MHZ2/MHZJ2

M4 x 0.7 M5 x 0.8 M5 x 0.8 3.6 3.6 6 6 8 8 10 10 5 5 8 8 10 10 12 12 3 2 4 2.5 5 3.3 6.5 3.5 MHZ2-10-X51 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.5 0 +2.5 0 MHZ2-16-X51 MHZ2-20-X51 MHZ2-25-X51 Refer to pages 4 through 7 for the standard type dimensions, which are the same except for those shown above. 32 Series MHZ2/MHZJ2 Model Selection Method Model Selection Selection procedure Confirm gripping

EXxx-OMY0006CN

IoT 5. 6. 8 7. PC 8. OS 9. /IDS/IPS 10.

Intrinsically Safe Valve

pressure center 2 (B) (A) 4 Symbol 3 6 10 15 20 30 100 Lead wire length Note 5 Note 1) 300 mm (EA) 5 1 (P) 3 (EB) 600 mm Maximum length for L-type 1000 mm 4-position dual 3 port valves (N.C.

IDG

IDG 10 M 03 X016 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Option Size Symbol Contents Size 3 3 10 20 30 50 5 5 Nil Standard R Flow direction (Right Left) 10 20 S With dew point indicator Standard equipment 30 50 Drain discharge symbol Standard dew point

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

Digital Flow Switches

PF2W504--1 PF2W520--1 PF2W540--1 PF2W511--1 PF2W504--2 PF2W520--2 PF2W540--2 PF2W511--2 4 0.5 4 0.5 16 2 16 2 40 5 40 5 100 10 100 10 19 Series PF2W For Water Digital Flow Switch to are terminal numbers.

VM

0.03 10 10 15 10 5 0.05 0.03 JIS Symbol How to Order 01 VR320 0 01 Port size Precautions Rc 1 8 NPT N01 1 8 Be sure to read before handling.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 ISO Class 5 10 10 1000 1000 20 L/min (ANR) ISO Class 4 ISO Class 4 100 100 70 L/min (ANR) 30 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Manual override (Non-locking) 41.5 [48] 29.1 22.5 13 [ ] for AC L plug connector (L) M plug connector (M) 33.5 5 33.5 2.5 5 2.5 10 5 10 5 48.9 [50.2] 58.5 44.9 4-M5 X 0.8 (Lead wire length) (P/R port) 4-M5 X 0.8 (P/R port) 300 41.5 [48] 52.6 [59.1] 300 29.1 (Lead wire length) 41.5 [48] [ ] for AC Other dimensions are the same as the grommet.

Secondary Batteries

, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.

CE

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4-4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 1130.2 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 5 sec 64 5 sec 59 5 sec 3) 15 mA when BCD is output.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

R1 P 13 13 5 5 10 10 5-M5 0.8 (Piping port) 10 10 28 5-M5 0.8 (Piping port) 28 [ ] for AC Other dimensions are the same as the grommet type. [ ] for AC Other dimensions are the same as the grommet type. 27 Series SYJ3000 Valve Drawings 3 Position Closed Center / Exhaust Center / Pressure Center (mm) 3 4 5 G H Grommet (G), (H) : SYJ3 40-M5 10 9 5 10 16.5 33.5 23.2 (Mounting holes) Manual

CE

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4-4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 1130.2 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 5 sec 64 5 sec 59 5 sec 3) 15 mA when BCD is output.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

For details, refer to the WEB catalog. 587 A 5 Port Solenoid Valve/Plug-in Unit 10-SQ2000 How to Order Valve 5 C6 1 1 SQ2 3 1 10 Directional Control Valves Air Grippers Modular F. R.

NCA1

Standard stroke 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Example: NCDA1B150-0200R+0300-XC11 will stroke 2" then an additional 3" for a total stroke of 5".

NCA1

CJP Standard Stroke CJ2 Standard stroke 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Bore size (in) 1.50 2, 2.50 3.25, 4 The extended stroke stop position is infinately adjustable within the adjustment range.

Vacuum

units al available, wilhod magnal lor auloswilch capabiltv a10 s16-s32 i/5 x 0.8 M5 x 0.8 5-30 5 7 20 32 2 7 8 28 16.5 31 N,l5 x 0.8 1/8 (PT) 5-50 6.6 8 26 40 o l o 20 33 1 9 M5 x 0.8 1i8 (Pn 5-CU 8 32 50 10 1 0 '10 20 22 43.5 zcDUKDs2 l1/8(PT) 1/8 (PT) 5-50 1 1 . 5 10.5 40 62 5 1 2 11 't2 29 22 35 R 40 1 9 , 5 7.6 Depth 12.5 15.5 85.5 1 2 T'6 46 21 9.5 Deplh at '13,5 5 1S.5 96 33 20 M5