3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

B B 2 2 2 A A A 45 65.5 4 4 4 B 25 2 A Dimensions Equation L1=22n+24 n: Station 17.5 37.5 (1.5) 7.5 4 L n 13 1 2 14 16 3 4 5 6 7 8 9 11 15 10 12 46 68 310 332 376 90 112 134 156 178 200 222 266 354 L1 L2 L3 244 288 75 87.5 337.5 362.5 400 112.5 137.5 162.5 175 200 225 250 287.5 375 262.5 312.5 85.5 98 410.5 How to Order 348 373 123 148 173 185.5 210.5 235.5 260.5 298 385.5 273 323

Compressed Air Preparation Filter

1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Specific Product Precautions Semi-standard specifications PC/PA bowl1 Stainless steel bowl2 Metal bowl1 Metal bowl with level gauge1 Element service indicator With barb fitting With drain guide With drain cock With drain guide With drain cock With drain guide Model B B B B B B W AFF20-D/AM20-D/AMD20-D 146.1 142.1 148.6 50.6 AFF30

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A B A B A B C D Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

125 138 162.5 173 12 135.5 148.5 175 185.5 13 146 159 187.5 198 14 156.5 169.5 200 210.5 15 167 180 200 210.5 3 41 54 75 85.5 4 51.5 64.5 87.5 98 5 62 75 100 110.5 6 72.5 85.5 112.5 123 7 83 96 125 135.5 8 93.5 106.5 137.5 148 L1 L2 L3 L4 37 Series VQZ Body Ported Type Dimensions: VQZ200 Dimensions: VQZ200 (mm) VV3QZ22C00T Stations (5.5) (35) Scale: 35% (11) 24.5 Mounting holes 26 Grommet

Rotary Actuator/Vane Type

A and B.

Rotary Table

Round plate (Including column) Position of rotational axis: Through the center axis (B) Number of teetha 1. Find the moment of inertia I for the rotation of shaft (B). B r 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teethb 5.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY-S25 MY-S32 MY-S40 Applicable cylinder A 105 130 145 B 119 148 167 C 35 45 55 D 50 64 80 E 8 11.7 14.8 F 5 6 8.5 G 9.5 11 14 H 5.5 6.6 9 J M6 x 1 M8 x 1.25 M10 x 1.5 A B A B A B MY1H25 MY1H32 MY1H40 MY1 HT Side supports consist of a set of right and left supports.

ZP

ZPT2004U ZPT10UT 2 2 2.6 1.2 10 1.2 0.3 11 4 2.6 4.6 1 ZPT04U-B-A8 ZPT3507U ZPT13UT 4 3.5 4.8 1.8 13 1.6 0.8 0.5 14 7 4.3 7.8 1.5 ZPT06U-B-A8 ZPT4010U ZPT16UT 6 4 7 2 16 0.8 17 10 5 11 2.5 2.5 ZPT10CT 10 11 0.8 ZPT08U-B-A8 8 9 1 ZPT13CT 13 14 Dimensions by Stroke 1 16 17 F: M3 x 0.5 F: M5 x 0.8 E G H J G H D Model J ZPT 6-B-A8 46 18 15 44 ZPT10-B-A8 79 23 77 84 3 6 5 8 ZPT15-B-A8 28 43 82

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Description Material D125 140 160 180 200 Rod cover Head cover Cylinder tube Piston Piston rod Retaining plate Bushing Valve guide Tie-rod Tie-rod nut Spring washer Retaining plate bolt Spring washer Cushion ring A Cushion ring B Cushion valve Spacer A Spacer B Air releasing B Air releasing A Check ball Auto switch Set screw Lube (1) (For lube-type 2, refer to page 6-9-5.)

CLQ

to 50 80 116.5 53.5 11 11 99 116 134 43 20 53.5 77 53.5 116.5 75, 100 53 125 10 to 50 100 135 63 11 11 117 136 154 50 22 53.5 94 L1 Rod end nut 63 135 75, 100 Rear flange type: CLQG/CDLQG FV M Rear flange type (mm) 4-FD Without auto switch With auto switch Bore size (mm) FZ FX A + Stroke L FT B + Stroke G Stroke range FD FT FV FX FZ G L L1 M A A B B 36 91 10 to 50 63 101 46 9 9 80 92 108

MVGQ

9 to @2 20Solenoid valve with adapter assembly SYJ3 3-M VZ5 4 -M VF3 4 -M VZ3 4 -M A B A B A B A B @3 Data Note 1) Seal kit includes !9 to @2. Order the seal kit, based on each bore size.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

3

D-A7/A80 D-A7H/A80H D-A73C/A80C D-A79W D-P3DW 13 11 11.5 10.5 11 12 D17 7 14.5 6 15.5 5.5 14 6 14 15.5 -X 397 MK Series Auto Switch Proper Mounting Position (Detection at Stroke End) and its Mounting Height D-F79F/F7NT D-A7/A80 D-A73C/A80C D-A7H/A80H D-A79W D-M9A D-M9AV D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BA/F7BAV B A U 20, 25 20, 25 U B A 32

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

210.5 15 167 180 200 210.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104 117 137.5 148 3 41 54 75 85.5 4 51.5 64.5 87.5 98 L1 L2 L3 L4 2.10-34 VQZ100/200/300 Base Mounted Dimensions: VQZ200 VV3QZ25C Port size Station (35) 38 (11) Grommet

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

CL

50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Note 4) Values for the low wattage (0.5 W) specifications. 2 position double (Double solenoid) (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Metal seal Rubber seal 3 position closed center 4 position dual 3 port valve (B) 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 4 2 5 3 1 1 (P) 5 (R1) 3 (R2) N.O.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

ball Snap ring B Housing Piston rod A Piston rod B Rod cover Head cover Plate Piston A Piston B Bumper A Magnet Bumper bolt Hexagon nut Bumper B Hexagon socket head cap screw Hexagon socket head set screw Snap ring Bumper holder (2) Nickel plated (1) Hard anodized Chromated Chromated Nickel plated Hard chrome plated Nickel plated Nickel plated Nickel plated Note 2) Aluminum alloy for CXSL6