Micro Mechanical Valve Series VM1000

P.T. 3 port (A) 2 R port (3 port only) 32 12 10 1 (P) 3 (R) 49 (84) 52 22 13 32 16 2 x 5.5 mounting hole 2 x 1/4 * 0.5 MPa supply 25 30 F .O.F .* 24 N P .T. 6.5 mm O.T. 4.5 mm T.T. 11 mm 40 One way roller lever VM220-02-02A VM230-02-02A VM220-02-02SA VM230-02-02SA Symbol 2 port 17 Polyacetal or hard steel roller (62.3) (A) 2 34.9 25 10 12 T.T. O.T.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

(Retraction end adjuster) 27 23 6 2 7 2 x M3 x 0.5 thread depth 4 Operating port 2 x M5 x 0.8 3H9 ( ) depth 3 +0.025 0 HA GA NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 3 +0.025 0 A B 1 14 7 7 3.2 3.2 6.5 A B H (NN 1) x H G 12.5 12.5 5.7 5.7 A-A B-B (mm) Model F 25 25 26 32 46 50 N 4 4 6 6 6 6 G 7 14 8 8 31 H 25 28 31 29 30 NN 2 2 3 3 4 4 GA 13 14 29 39 37 61 HA 19 28 27 31 58 60 I 11

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

11 LC 21.5 23 LB 9 9 6 6 LH 5.5 5.5 LT 14 14 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion With air cushion type is not available for 21-/22-CJ2.

Electric Actuator with Integrated Guide

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

Compact Manifold Regulator

ARJ AR425 to 935 L 1.25 P=12.5 5.25 7.5 ARX AMR 35 25 ARM ARM 5.5 ARP L Dimension L=12.5 x n+10.5 IR-A 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 Symbol L IR 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 Symbol L IRV 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 Symbol L VEX 31 398 32 410.5 33 423 34

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

27 25 60 27 30 6 19 8 14 1/4 3/8 3/8 1/2 1/2 Refer to p.3.4-18 for further information on rod end nuts and accessories. 58 13 17 up to 600 20 17 52 12 11 27 47.3 61 M8 X 1.25 M18 X 1.5 159 40 90 17 11 30 25 70 7 19 0 32 35 18 58 17 up to 600 20 17 64 10 11 27 54.8 M18 X 1.5 170 40 15.5 68.5 M10 X 1.25 98 17 14 31 25 7 19 0 85 32 35 18 71 21 up to 750 21 25 78 14 13 32 65.8 M22 X 1.5 204

Plug-in Unit

B 23 () (+) Grey Red 11 () (+) White Red SOL. A Station 11 SOL. B 24 () (+) Black White 12 () (+) Yellow Red SOL. A Station 12 SOL. B 25 () (+) White None COM. 13 (+) () Orange Red Note) Negative COM. spec. Positive COM. spec. Note) When using the negative COM. specification for VQC1000/2000, use valves for negative COM.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

15 SMC 27 34 2 8 Cover diameter 1.4 Cross sectional area 0.2mm2 3.5 20.5 34 Manual override M3 x 0.5 External pilot port 22.7 Mounting holes (Only external pilot port type(R)) 25 10 (N3T, N7T) (M5T) 2-M2.5 x 0.45 Thread length 4 9 9.2 30 20 2.1 12.5 2.5 5 5.2 4.1 28 23.2 Mounting holes 4.5 G(PF)1/16 R port 29.5 10 1/8 NPTF P port Foot bracket PE port P 1 3 R 11 14.5 40.3 22.2 Die cast hole

Cylinder with Lock Series MNB

25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301

70astamb1

10 10 11 11 12 D-Z7/Z80 10 1 D-Y59/Y69 2 (Different sides, Same side) D-Y59/Y69/ D-Y7P/Y7PV 6.5 6.5 6 7 7 8 15 25 D-Y7P/Y7PV 1 D-Y7W/Y7WV 6.5 6.5 6 7 7 8 2 (Different sides, Same side) Solid state switch D-Y7W/Y7WV 20 25 1 5 5 5 5 6 D-Y7BAL 5 2 (Different sides, Same side) 20 30 1 D-Y7BAL Center trunnion is not included.

mb1

10 10 11 11 12 D-Z7/Z80 10 1 D-Y59/Y69 2 (Different sides, Same side) D-Y59/Y69/ D-Y7P/Y7PV 6.5 6.5 6 7 7 8 15 25 D-Y7P/Y7PV 1 D-Y7W/Y7WV 6.5 6.5 6 7 7 8 2 (Different sides, Same side) Solid state switch D-Y7W/Y7WV 20 25 1 6 D-Y7BAL 5 5 5 5 5 2 (Different sides, Same side) 20 30 1 D-Y7BAL Center trunnion is not included.

•

(vis M6' :Ma O MS ZP:V02 I \ lS(11 ) 15 (11 )' zpvoa ZP'I'IO 31(27) 33(26) zl>Y13 32(25) 33(25) 32(25) 33(25) i 33 (25) 33 (2S) (-) ;b>y, 16 32 ~27 ) 38(27) ZPY20 :ZPY25 38(30) 38(29) 38(30) 38(29) (30) 38(30) 38(28) 38(30) 1 38(29) (30) (30) ZP'i'32 lI>V40' 43(36) 47(34) 42 (35) 46(33) 44(371 46(35) 43(36) 47 (34) ZPY50 44(38) 49 (35) 46(38) 50(37) 44(38) 49(35) ~ ( In parentheses) are

CEx-OMQ0011

P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

1

End Bore size GA GB S ZZ Bore size ZZ Rc1/8 NPT1/8 20 10.5 11 7.5 54 (59.5) 77 (82.5) 20 62.5 (68) 25 10.5 11 7.5 52.5 (58) 78.5 (84) 25 61 (66.5) 32 10.5 10.5 7.5 53 (59) 79 (85) 32 61.5 (67.5) 40 10.5 10.5 7.5 57.5 (63.5) 89.5 (95.5) 40 66 (72) Bore size GA GB S ZZ Bore size ZZ 20 9 5 41 (46.5) 64 (69.5) 20 49.5 (55) 25 11 5 43.5 (49) 69.5 (75) 25 52 (57.5) 32 10.5 5 43.5 (49.5) 69.5 (

48

83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x

MHZ2/MHZJ2

Dimension table Unit: mm Model A B D2 E D1 -0.016 -0.043 12f8 15 7 11 52.8 MHZ2-10 -0.016 -0.043 16f8 20 10 15 58.7 MHZ2-16 -0.020 -0.053 20f8 22 12 19 70.5 MHZ2-20 -0.020 -0.053 25f8 25 15 24 82.9 MHZ2-25 Other dimensions and specifications correspond to the standard type.

MB1

73 186 230 256 280 306 356 406 456 86 41 23 12.5 25 37.5 50 125 106 119 75 144 100 169 81 194 246 272 296 322 372 422 472 94 51 25 12.5 25 37.5 50 125 150 114 127 75 152 100 177 89 202 227 272 298 322 348 398 448 498 548 102 51 25 12.5 25 37.5 50 125 150 114 127 75 152 100 177 89 202 227 272 298 322 348 398 448 498 548 102 56 29 12.5 25 37.5 50 125 150 126 175 139 75 200 164

Microspeed Cylinder

Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard stroke (mm) 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5MPa (217psi) 1.0MPa (145psi) 0.035MPa (5.1psi) 0.025MPa (3.6psi

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMH-16-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 11 Series XMH, XYH Specifications XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 XMH-16 Model Flange (valve) size 16, CF034 25 40, CF070 50 Valve type Manual type Fluid Inactive gas under vacuum Operating temperature C 5 to 150 Atmospheric pressure to 1 x 10-6 Operating pressure Pa Conductance l/s Note 1) 5 14 45 80 1.3 x 10-10{1 x 10

3 Port Air Operated Valve Series SYJA300 1

Refer to page 5-11-4.)