Vacuum System Peripherals:

PSE531-M5 Pressure Sensor: Series PSE530 Model 0 to 101 kPa Rated pressure range 500 kPa Proof pressure Air, Non corrosive gas Applicable fluid 12 to 24 VDC (Ripple 10% or less) Power supply voltage 15 mA or less Current consumption Analog output (1 to 5 V, Output impedance: Approx. 1 k) Output specifications For details, refer to Best Pneumatics Vol. 16. 13-14-11 11 Vacuum System Peripherals

VZ100/300/500

VZ 3 5 2R X20 ( ) VZ 3 5 X1 ( ) Entry is the same as standard products. Entry is the same as standard products.

CXWM/CXWL

5.

IDX-OM-W014

6-3 6-4 . 6-4 6-5 . 6-4 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 M 10-1 . 10-1 10-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 2 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Note) Metric size KE Inch size 01 03 05 07 09 11 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 04 06 08 10 12 4 6 8 10 12 AS-FG AS-FG With One-touch fitting AS-FP Stainless steel specifications (SUS303) AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 702.

IDX-OM-W017

. 6-3 6-4 . 6-4 6-5 . 6-5 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 C 8-1 . 8-1 8-2 . 8-1 8-3 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 (ADH4000-04) . 10-2 10-4 . 10-2 10-5 . 10-2 11 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 T 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-3 13 V 13-1 . 13-1 13-2 . 13-2

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 12 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

-0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 5 8 31 23f8 5 M8 x 1.25 17 15 M22 x 1.5 1/8 81 9.5 4.5 6.5 138 10 41 25 6 8 34 25f8 5.5 M10 x 1.25 17 15 M24 x 1.5 1/8 81 11 3.5 5.5 143 10 46 32 8 9 40 31f8 7.5 M14 x 1.5 18 15 M30 x 1.5 1/8 87 13 3 4 159 10 53 40 10 11 48 34f8 7.5 M16 x 1.5 22 21 M33 x 2 1/4 108 16 5 0 183 16 54 7 Hydraulic Cylinder: 7MPa Series CHN Rear flange type:

Series 11-MXJ Air Slide Table

Reed Auto Switch: D-A93 (mm) Stroke B A Stroke C Auto switch operating range Stroke Model 5 10 15 20 5 10 15 20 5 10 15 20 11-MXJ4 11-MXJ6 11-MXJ8 14 14 0.5 0.5 9 4 4 3 14 14 18 0.5 0.5 0.5 9 4 10 5 25 14 14 25 0.5 0.5 0.5 0.5 9 4 Solid State Auto Switch (Lead Wire, In-line Entry): D-M9 (mm) Stroke B A Stroke C Stroke Auto switch operating range Model 5 10 15 20 5 10 15 20 5 10 15 20

Solid State Auto Switches

Weight (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model 0.5 m (Nil) 11 3 m (L) Lead wire length 54 5 m (Z) 88 Dimensions (mm) D-Y7W D-Y7WV M2.5 x 4 L Slotted set screw M2.5 x 4 L Slotted set screw Indicator light Indicator light 2.5 3.4 2.5 SMC SMC 6.2 5 6.2 5 29 27.3 3.4 Most sensitive position 12.5 8.5 Most sensitive position 12.5 1592 2-Color Indication Type Solid State Auto Switch

Series KV2 Fittings

(g) Bag/Box Quantity MC D2 D3 D4 L1 L2 Q 5/32 1/4 1/4** 3/8 3/8** 3/8** 3/8** 1/2 1/2** 5/8 5/32 1/4 1/4 3/8 3/8 3/8 3/8 1/2 1/2 5/8 5/32 1/4 3/8 3/8 5/32 1/4 1/2 1/2 3/8 5/8 KV2T03-00 KV2T07-00 KV2T07-11 KV2T11-00 KV2T11-03 KV2T11-07 KV2T11-13 KV2T13-00 KV2T13-11 KV2T15-00 10.4 13.2 17.9 17.9 17.9 17.9 21.7 21.7 21.7 26.5 10.6 13.3 18.1 18.1 18.1 18.1 22.1 22.1 22.1 27.0 10.4 13.2 17.9 17.9

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.

IDX-OM-W011

6-3 6-4 . 6-4 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 10-4 . 10-2 11 M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14

Modular F.R.L. Unit

Note 5) Separate interfaces are required for modular unit. Note 6) When N is specified in the end of part number of auto drain, applicable tube O.D should be 3/8". 11 F.R.L.

Booster Regulator/Air Tank

Rc 3/8 EXH: Rc 1/4 60 OUT (328) Tank OUT port Rc 1/2 278 180 170 4 x 11 32 32 Drain port Rc 1/4 120 180 312 460 Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) Tank OUT port Rc 1/2 (367) (367) OUT OUT 278 180 180 170 4 x 11 4 x 11 32 32 120 180 180 120 Drain port Rc 1/4 312

Possible to transfer a workpiece at low-speed.

8.6 5 Key dimensions Q S W b L1 US TA TB TC TD TF (H9) TG (H9) TL UW G M N L Size Rotation angle 90 104 4 0 0.03 0 0.1 0 0.1 20 8 9.6 29 11.5 20 59 24.5 1 13.5 27 4 4 2.5 74 15 11 180 130 90 122 4 0 0.03 0 0.1 0 0.1 30 10 11.4 33 13.5 20 65 27 2 19 36 4 4 2.5 83 18 13 180 153 90 139 5 0 0.03 0 0.1 0 0.1 40 11 14 37 17 25 73 32.5 2 20 39.5 5 5 3.5 93 20 15 180 177 The AU dimension is not

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS23l1FG-01-01(S)A 1/8" 13.3 24 17.5 36 30.6 29.2 27.5 26.1 13.3 10 (9) AS23l1FG-01-03(S)A 5/32" 8.2 13.9 25.1 10 (10) AS23l1FG-01-07(S)A 1/4" 11.2 10.2 16.4 29.1 20.2 38.7 11 (10) AS23l1FG-01-09(S)A 5/16" 13.2 30.1 21.5 40 14.2 12 (11) AS23l1FG-02-03(S)A 5/32" 7.2 9.6 12 1/8

HRX-OM-W032

Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check Monitor Menu . 5-9 5.5.1 Check monitor menu . 5-9