2/3 Port Valve

VX021 001 01 CBTZ Applicable voltage for electrical option Power supply Voltage code Surge suppressor Light Rated voltage Coil combination code 01 02 03 04 07 08 05 06 02 200V AC 50/60Hz 01 100V AC 50/60Hz 08 48V AC 50/60Hz (See the table below.) 13 24V AC 50/60Hz AC 03 110V AC 50/60Hz 23 440V AC 50/60Hz 04 220V AC 50/60Hz 51 6V DC Solenoid No. 05 24V DC 53 48V DC Applicable valve model

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Same surface) 70 + 50 (n 2) n = 2, 4, 6, 8 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 85 + 50 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 With 1 pc. 70 75 80 85 90 10 With 2 pcs.

Rotary Actuator/Vane Type

[mm] [mm] Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 8 1 to 14 1 to 8 15 4 to 18 1.5 to 9 1.5 to 18 1.5 to 9 20 4.5 to 20 1.5 to 10 1.5 to 20 1.5 to 10 30 5 to 22 2 to 13 2 to 22 2 to 13 40 18 to 30 4.5 to 15 18 to 30 4.5 to 15 Size CRB2 CRBU2 X Y X Y 10 3 to 10 (19) 1 to 12 (3) 1 to 3 (12) 1 to 19 (10) 15 4 to 11.5 1.5 to 15.5 1.5 to 6.5 1.5 to 20.5 20 4.5 to 13 1.5 to 17 1.5 to 7.5 1.5 to

70astamb1

Without Air Cushion Port Cushion valve Double clevis style (D) CDH10 Bore size (mm) Z ZZ 32 40 50, 63 80, 100 170.5 160 164 190 238 175 205 Double Clevis Style 261 U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 Up to 500 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5 10 10 14

mb1

Without Air Cushion Port Cushion valve Double clevis style (D) CDH10 Bore size (mm) Z ZZ 32 40 50, 63 80, 100 170.5 160 164 190 238 175 205 Double Clevis Style 261 U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 Up to 500 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5 10 10 14

Booster Regulator/Air Tank

4 x 13 50 50 Drain port 1/4 100 200 100 400 674 200 696 (mm) A 481 520 444 477 B 394 429.8 394 429.8 C 3/8 1/2 3/8 1/2 D Note) 469 493 Booster regulator model The length may be longer than the specification if the plugs mounted on the tank are not fit to the end.

HRX-OM-Q026

AL47 13 Pump breaker trip AL48 Pump inverter error AL49 Air exhaust fan stoppage 14 12: Water-cooled type model does not generate this alarm. 13: Power supply "-20" specification model does not generate this alarm.

SZ3000

Double wiring specification specification 12 13 12 13 12 stations 12 stations 13 stations 13 stations Specified wiring Note 2) Specified wiring (up to 25 solenoids possible) ... ... ... ...

Plate Cylinder with Lock Series MLU

0.5 2 56.5 66 Operating range Minimum strokes for auto switch mounting (mm) (mm) D-A7H, D-A80H D-A79W D-F7, D-J79 D-F7W, D-J79W D-F7BAL, D-F7NTL D-F7F Bore size 25 Auto switch model D-A7 D-A80 D-A73C D-A80C 32 40 50 Number of auto switches D-P5DWL D-F7V D-J79C D-F7WV D-F7BAVL D-A7, A80 D-A7H, A80H D-A73C, A80C 13 13 13 13 Different side(s) 20 Same side 75 D-A79W 13 14 13 14 2 pcs. 1 pc

Modular F.R.L. Unit

88 12 224 3 264 43 105 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277 43 105 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316 3.3 280 46 105 196 20 11 50 70 98 44.5 84 13 11 6.4 117.5 319 3.3 Note 1) For AC20B only, the position of the pressure gauge is above the piping center.

Thermo-chiller/Rack Mount Type

The 50 Hz and the 60 Hz inverter pumps have the same capacity. (There is no pump capacity difference between the 50 Hz and the 60 Hz.)

SQ1000/2000

(A)(B) (A)(B) 4 2 4 2 When ordering with manifolds 5 13 5 13 For adding stations (R1) (P)(R2) (R1) (P)(R2) When only valves are required.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

54 35 108 92 100 M8 70 150 134 135 65 75 35 13 16 9 130 9 30 109 75, 100 125, 150 200, 250 300 32 M6 x 1 depth 13 60 118 35 102 106 150 M8 80 134 140 73 16 85 40 16 9 135 129 9 35 40 M8 x 1.25 depth 16 75 50 150 134 134 M8 95 186 170 175 93 105 50 19 19 12 170 9 45 152 50 M10 x 1.5 depth 21 90 56 160 152 140 115 210 200 103 190 115 55 21 12 194 25 11 50 182 M10 Long Stroke Bracket Mounting

HRX-OM-S004

/60Hz 5 A 13 / 14 16 / 19 Rated power consumption 50/60Hz5 kW (kVA) 3.4 / 4.4 4.6 / 6.0 (4.4 / 5.0) (5.6 / 6.6) Sound level (Front 1m / Height 1m)5 dB(A) 70 Water-proof specification IPX4 Alarm cord list label 2pc.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Operating pressure (MPa) Flow Characteristics/Weight Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Weight (kg) Port size Pilot port size (Nominal size) Function Valve model C [dm3/(sbar)] 14 14 14 14 13 13 14 (13) 14 (13) 13 13 C [dm3/(sbar)] b Cv b 0.28 0.30 0.26 0.30 0.25 0.29 0.32 (0.3) 0.32 (0.3) 0.28 0.28 Cv 3.4 3.8 3.4 3.7 3.0 3.4 3.6 (3.2) 3.6 (3.2) 3.1 3.3 VFRA4111-03

Prevents Micro-Bubbles

VX2 VX How to Order Manifold Base Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 LLC 2 A 02 11 S VXA Tubing size for P port and R side connection Body class Tubing size for P port and L side connection VN Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 14 (2, 4 port) 112 93 12 Y 25 (14 port) PE port 5 3 37 25 22 14 1 25 25 9 1/8 12 port 3/8-2 port 3, 5 port 1/4, 3/8 1 port 14 port 1/8 1/4, 3/8-2 port 2, 4 port EVS7-6-FG-D-M0 EVS7-6-F G-D-M0 H J I 186 196 89 89 13 (4 port) 50 50 13 (2 port) 13 (4 port) 50 50 13 (2 port) B A B A 50 62 50 62 38 14 38 12 14 12 Manual

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350

Air Cylinder Series MB

W 32 40 50 63 80 100 22 30 35 35 40 40 27 125 to 1000 50 223 97 15 17 120 1/2 38 M27 X 2.0 13 M12 X 1.75 6 20 19 27 60 32 110 136 54 46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 16 16 16 16 16 16 4 4 5 5 5 5 M6 X 1 M6 X 1 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6 6 7 7 10 10 M10 X 1.25 M14 X 1.5 M18

OMU0023

Controller version (the time in the bracket indicates the schedule for switching) Function Ver 2.0 Ver2.1 to Ver2.4 Ver2.5 (August 2014) (Sept. 2015) (June 2020) Corresponding card motor 6 types LAT3M-50 LAT3M-50 LAT3F-50 LAT3F-50 Alarm history count 4 points 4 points 20 points Communication speed 19200bps 2,400bps 2,400bps 9,600bps 9,600bps 19,200bps 19,200bps 38,400bps 38,400bps 57,600bps