Compact Type A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38
13.5 7 173 162.5 144 14.5 8 185.5 175 154.5 15.5 9 198 187.5 165 16.5 10 210.5 200 175.5 17.5 L1 L2 L3 L4 L1 L2 L3 L4 15 Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60PD (26 pins) B1 2 Scale: 37% 2n1-M5 x 0.8 (A, B ports) [With external pilot] 4-One-touch fitting (P, R ports) Applicable tube O.D.: 8 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 16.2 17 34 34 36.7 B 2 B 2 B 2 2 B 2 B 2
Refer to "Installation and Removal of Tubing" on page 15.)
RS H A Auto Switch Internal Circuit D-B53 RZQ MI W S CEP1 Weight Reed switch LED OUT () Blue OUT (+) Brown Resistor (g) CE1 D-B53 D-B54 D-B64 Auto switch model Zener diode CE2 22 22 22 0.5 Lead wire length (m) 78 78 78 3 ML2B 126 126 5 D-B54 C J G5-S Dimensions Zener diode CV Choke coil Resistor OUT () Blue OUT (+) Reed switch LED MVGQ Surge absorber CC Indicator light DB64 without indicator
133 14 8 173 162.5 143.5 15 9 185.5 175 154 16 10 198 187.5 164.5 17 L1 L2 L3 L4 L1 L2 L3 L4 24 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Non-plug-in Stations SS5Z3-60 D Scale: 37% [With external pilot] 2-One-touch fitting (P, R ports ) Applicable tube O.D.: 8 13.3 (Pitch) P = 10.5 21.3 21.3 16.2 17.8 Approx. 300 16.2 17 36.7 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2
E AKM3000-A 1/8, 1/4 53 34 14 48 13 AC25-B AC30-B, AC30A-B AKM4000-A 1/4, 3/8 70 42 18 54 15 AC40-B, AC40A-B1 IN OUT B 1 Cannot be mounted on the AC40l-06-B.
Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
(Tightening torque: 0.15 Nm) 15) For products with a switch, mount the switch assembly. (Be careful not to drop the O-ring. Tightening torque: 0.08 to 0.10 Nm) Clip How to remove the junction box B The side with Connector recess square hole faces the body. Fig.1 Fig.2 Fig. 3 Protrusion of junction box B Fig. 2 Clip in.
Optional specifications ( 2) With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model B 176 179 216 218 B 114 156 159 196 198 B 150 153 190 192 B 151 154 191 193 AC20C AC25C AC30C AC40C AC40C-06 14-2-21 22 F.R.L.
(relates to position of the unit within the manifold). : Refer to the "Unit address order" of (A) Master unit setting (page 22) or (A) Slave unit setting (page 38) Unit No. for IO mapping position. -49No.EX-OMV0017 (b).
VQZ235 Rubber 12.6 (0.7) 15 or less 20 or less 53 VQZ200 VQZ225 Metal 10.0 (0.55) 14 or less 18 or less N.O. VQZ245 Rubber 12.6 (0.7) 15 or less 20 or less VQZ315 Metal 16.2 (0.9) 17 or less 22 or less N.C. VQZ335 Rubber 21.6 (1.2) 25 or less 33 or less VQZ300 77 VQZ325 Metal 15.3 (0.85) 17 or less 22 or less N.O.
Method of Mounting Two Auto Switches at the Stroke End of a Cylinder for Strokes Less Than 20 mm Auto switch model Applicable strokes 15 mm stroke 20 mm stroke 15 6 3 A 6 A 20 0.5 D-M9m(V) D-M9mW(V) D-M9mA(V) 0.5 3 6 B 6 B The correct mounting position of the D-M9 is 3 mm from the end face of the switch holder (dimensions A and B).
B M3 x 0.5 (Piping port) 1.5 1.5 33 36 Manual override B P R R (35) 7 7 36 (2) 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 10 9 36 7.1 2 x M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2 x 3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2 x 1.8 2 x M3 x
14.5 15.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 15 40.5 20.5 Auto switch A B A B A B A B C D MXP10 MXP6 Watchmakers screwdriver MXP12 (Grip diameter 5 to 6 mm) MXP16 Other than the models listed in How to Order, the following auto switches are applicable.
A B Easy manual unlocking Locked Unlocked Locking direction can be selected. Extension lock B A W Retraction lock W A B Various mounting brackets to accommodate wide range of applications.
F Plug 1/8 (VHS3000, 4000 only) 3-port valve for residual pressure release C P U S B IN OUT E EXH D JIS symbol Specifications A Model Port size Effective area (mm) IN to OUT OUT to EXH 10 14 16 31 22 38 57 Port size IN/OUT port size EXH port size 1/8 1/4 1/4 3/8 1/4 3/8 1/2 11 16 14 29 15 29 51 Model A B C D E F VHS2000 1/8, 1/4 1/8 40 53 70 56 74 80 36 45 48 28 48 54 22 28 36 25 30 30 VHS2000
Bore size 6 to 20 Type M5 x 0.8 Rc NPT G Symbol 21 22 Relief type Vacuum suction type CXSL CXSL Nil TN TF 25, 32 Cylinder stroke (mm) Model Lubrication Action Cushion Rubber Air Bore size (mm) Standard stroke (mm) Auto switch mounting Port size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief
Dimension table Unit: mm Model A B D2 E D1 -0.016 -0.043 12f8 15 7 11 52.8 MHZ2-10 -0.016 -0.043 16f8 20 10 15 58.7 MHZ2-16 -0.020 -0.053 20f8 22 12 19 70.5 MHZ2-20 -0.020 -0.053 25f8 25 15 24 82.9 MHZ2-25 Other dimensions and specifications correspond to the standard type.