Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 6mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: -, Functional Option: -, Auto Switch: -, Lead Wire: -, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 16mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: -, Functional Option: -, Auto Switch: -, Lead Wire: -, Number: -

Specification: Copper, Fluorine & Silicon-free + Low Particle Generation, Vacuum Suction Type, Bearing Type: Ball Bushing Bearing, Bore Size: 25mm, Port Type: NPT: 25 & 32mm Bore, Stroke: 20mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Specification: Copper, Fluorine & Silicon-free + Low Particle Generation, Vacuum Suction Type, Bearing Type: Slide Bearing, Bore Size: 32mm, Port Type: NPT: 25 & 32mm Bore, Stroke: 20mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Specification: Copper, Fluorine & Silicon-free + Low Particle Generation, Vacuum Suction Type, Bearing Type: Slide Bearing, Bore Size: 6mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 20mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Prevents Micro-Bubbles

68 22 55 18 8 42 57 5.5 48 96 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 Rc 3/4 NPT 3/4 LVA5 58 75 84 26 68 27.5 8 56 71 6.5 62 129 Rc 1 NPT 1 LVA6 58 75 84 32 77 27.5 8 56 71 6.5 71 117 138 17-5-22 20 Series LVA Manifolds Manifold Specifications LLA5A LLA4A LLA3A Model LLA2A Manifold type Stacking type VC P (IN), A (OUT) type Common IN/Individual OUT Valve stations 2 to 5 stations VDW 3/4 1/2 3/8 1

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

150 to 1000 150 to 700 150 to 700 10 8 8 8 26.5 22 20 20 12.5 11 10 10 24 22 22 18 46.5 37.5 33.5 22 17 17 13 21 19.5 19.5 15.5 55.5 49.5 45.5 40 7 6.8 6.8 6.8 30 28 28 25 227 199 186 186 55 40 40 40 75 55 55 55 51 42.5 34.5 14 12 10 M10 x 1.25 M14 x 1.5 7 56.2 Bore size Y X NN 264 232 219 215 P 181 159 146 146 S 10 8 8 8 Z ZZ Stroke range 1/8 1/8 1/8 1/4 23 20 20 20 27 25 25 21 40 32 25

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Bore size 6 to 20 Type M5 x 0.8 Rc NPT G Symbol 21 22 Relief type Vacuum suction type CXSL CXSL Nil TN TF 25, 32 Cylinder stroke (mm) Model Lubrication Action Cushion Rubber Air Bore size (mm) Standard stroke (mm) Auto switch mounting Port size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief

Auto Switch Guide

/A34C Tie-rod RZQ 10-20-19 D-A44C DIN terminal MI W S D-A90/A93/A96 D-A90V/A93V/A96V 10-20-20 CEP1 D-90/97 Grommet Direct D-90A/93A CE1 D-Z73/Z76/Z80 10-20-21 CE2 10-20-22 D-E73A/E76A/E80A ML2B Grommet Band D-B59W 10-20-23 2-color indication Grommet Rail D-A79W 10-20-24 C J G5-S Grommet Tie-rod D-A59W 10-20-25 CV This auto switch can be mounted by tie-rod with using mounting bracket.

New

14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 47.5 50 50 50 52.5 52.5 52.5 38 47.5 46 47 52 50.5 51.5 23 25.5 25.5 25.5 28 28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 4, 10, 20 bytes Output 4, 12, 20, 36 bytes Input 14 bytes Output 22 bytes Terminating resistor Not included Memory EEPROM LED indicator PWR, RUN, ALM, ERR PWR, ALM, MS, NS PWR, ALM, SF, BF PWR, ALM, MS, NS PWR, ALM, COM Cable length [m] Actuator cable: 20 or less Cooling system Natural air cooling Operating

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

20 stations (Max.)

IDU/IDF

C IDU BP 22 C Applicable dryer Applicable dryer Dryer IDU3D IDU4D Dryer IDU6D IDU8D IDU11C IDU15C Dryer IDU22C1 IDU37C1 IDU55C IDU75C Symbol 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 Dryer IDU3D IDU4D Dryer IDU6D IDU8D IDU11C IDU15C Dryer IDU22C1 IDU37C1 IDU55C IDU75C Symbol 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 IDF FL 22 C IDF BP 22 C Applicable dryer Applicable dryer Dryer IDF1D IDF2D

MQQ

18 16 60 20 FV CE1 20 64 20 25 65 22 34 CE2 28 72 22 40 FT FX L B + Stroke FZ ML2B A + Stroke 4-FD C J G5-S Rear flange style: MQQLG 10, 16, 20 25, 28 Bore size (mm) Stroke range (mm) A L 2-FD 4-FD CV 10 10 to 40 75 8 16 10 to 60 88.5 10 MVGQ 20 10 to 60 97 10 FV FV M 25 10 to 50, 75, 100 104.5 12 CC 28 10 to 50, 75, 100 124 12 L FT FX B + Stroke FZ FX (Dimensions except A and L are same

MQQ

10 to 60 54 34 6.6 8 39 48 FZ CEP1 20 10 to 60 57.5 37.5 6.6 8 42 52 A + Stroke 2-FD 25 10 to 50, 75, 100 64 42 5.5 8 48 56 CE1 28 10 to 50, 75, 100 70.5 48.5 5.5 8 54 62 25, 28 CE2 Bore size (mm) FZ L M FV 10 55 18 ML2B 16 60 20 FX FT L B + Stroke 20 64 20 C J G5-S FZ 25 65 22 34 A + Stroke 4-FD 28 72 22 40 CV MVGQ CC Head side flange style: MQQTG 10, 16, 20 25, 28 RB 2-FD 4-FD J Bore

KK/KK13

19 M16 x 1 49 8 -08E 51.5 18.5 6.2 42.2 18.9 16.8 22 24 M20 x 1 49.9 10 -10E 52.4 21 22 7.7 67.1 19.1 19.1 16.8 17 M14 x 1 58.2 6 KK4S-06E 61.9 17 4.7 54.4 13.4 10.4 19 20 19 M16 x 1 60.1 8 -08E 63.8 18.5 6.2 57.8 21.8 18.3 25.4 1/4 22 24 M20 x 1 61.7 10 -10E 65.4 21 22 7.7 84.0 29.4 27.0 62.7 -12E 66.4 102.9 32.0 30.5 23 27 M22 x 1 12 22 24 9.2 70.1 KK6S-12E 75.4 113.6 48.8 42.7 31.2 1/

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

VQZ235 Rubber 12.6 (0.7) 15 or less 20 or less 53 VQZ200 VQZ225 Metal 10.0 (0.55) 14 or less 18 or less N.O. VQZ245 Rubber 12.6 (0.7) 15 or less 20 or less VQZ315 Metal 16.2 (0.9) 17 or less 22 or less N.C. VQZ335 Rubber 21.6 (1.2) 25 or less 33 or less VQZ300 77 VQZ325 Metal 15.3 (0.85) 17 or less 22 or less N.O.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

•

> S1rot<.e 251 160 20 17 34 M36 x 1.5 34.5 I 314 106 120 246 ~ The minimum stroke wnh roo t'22. 8 Air Cylinder Series CS2 Dimensions ~-.