.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket), Calibration Certificate: A (Calibration Certificate)

Series: 25A-PF3W5, Rated Flow Range: 0.5 to 4 L/min, Flow Adjustment: w/Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: G [Instantaneous Flow: L/min (gal/min); Temperature: °C/°F], Bracket: w/Bracket

Series: 25A-PFM7, Flow Rate Range: 25 [0.5 to 25 (12.5) L/min], Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector, 2 m; Rubber Cover for Connector

Series: 25A-PFMB7, Flow Rate Range: 501 (5 to 500 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Out Specification: F (Out 1: PNP, Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber)

0.5

in 1 m increments from 1 m to 20 m.

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Fixed SI Unit, Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W MSQ MSZ (mm) CRQ2X MSQX Q2 L2 max Y Size (mm) L1 = X = Q2 = M Q1 = M 10 Y 3 M 4 X L1 max Q1 Size 7 to 8 L2 = Y = MRQ 10 15 Y 3.5 M 5 M4 7 to 14 X 3 8.5 to 9 15 20 Y 4 M 6 M5 8.5 to 18 X 3.5 10 20 30 Y 5 M 8 M6 10 to 20 X 4 13 30 40 Y 6 M10 M8 13 to 22 X 5 15 Symbol: A5 The long shaft can be further shortened by machining it into a stepped round shaft.

Precision Regulator

In addition, the product for the following specifications is also available: Prefix (10-): Clean series Prefix (25A-): Secondary battery compatible Prefix (80-): Ozone resistant (Fluororubber specification) IRM: Manifold specifications (For IR1000 and IR2000 series only.

SFOD-OMT0012

For clean type (11-) or secondary battery (25A-) type actuator Search without entering 11or 25A-, and select the actuator for which the part number after 11or 25Amatches. e.g.) For 11-LEFSH16A-100BR, enter "LEFS16A-100" and select LEFS16A-100.

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

(D NCDRB10W10.15.20.30 Dimensions Oside eorts: NcRBlowo-os Top ports: I{CFBIOWO-OSE Tt t F f l I l . ' ,-t L 1 5 1 I Oim. for NCFETOWIO l) : Dim tor NCnBtowl5 l Flans ("F') ,dl P4 ct F > 1 '. 111 '.I!.

NCRBIBwserbs

(D NCDRB10W10.15.20.30 Dimensions Oside eorts: NcRBlowo-os Top ports: I{CFBIOWO-OSE Tt t F f l l . ' ,-t L 1 5 1 I I Oim. for NCFETOWIO l) : Dim tor NCnBtowl5 l Flans ("F') ,dl P4 ct F > 1 '. 111 '.I!.

7.4

x C2, C4, N1, N3 <1(P), 5(EA), 3(EB) port> C2: 2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting 16.7 With plug connector/light, built-in silencer S0736S-mM(O)-m External Pilot 2-Position Single Grommet (G): S0716R-mG-m-m 2-Position Double/3-Position Closed Center Grommet (G): S07 6R-mG-m-m 2 3 (Lead wire length) (Lead wire length) 300 300

Model Selection 1

amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

ZQ-OM01401

) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.

VQZ100/200/300

VQZ100/200/300 Body Ported How to Order Valve VQZ200/300 VQZ 2 1 2 5 M C6 Series 2 3 VQZ200 Body width15mm VQZ300 Body width18mm Bracket F None With bracket SY SYJ Configuration VK Port size {2(A)port} (A) 2 N.C.

Flow range (lpm): 2-200; Port sizes: 1/4 (Rc, NPT, G) or ø8 one-touch fitting; Rated Pressure range (MPa): 0 to 0.75; Output options: NPN/PNP, 1-5V, 4-20mA; Accuracy: ±3% F. S.; Repeatability: ±1% F. S.

Flow range (lpm): 5-500, 10-1000, 20-2000; Port sizes (Rc, NPT, G): 1/2 or 3/4 (flow range dependent); Rated pressure range: (MPa): 0 to 0.8; Output options: NPN/PNP, 1-5V, 4-20mA; Accuracy: ±3% F. S.; Repeatability: ±1% F. S.

Flow range (lpm): 2-200; Port sizes: 1/4 (Rc, NPT, G) or ø8 one-touch fitting; Rated Pressure range (MPa): 0 to 0.75; Output options: NPN/PNP, 1-5V, 4-20mA; Accuracy: ±3% F. S.; Repeatability: ±1% F. S.

Flow range (lpm): 5-500, 10-1000, 20-2000; Port sizes (Rc, NPT, G): 1/2 or 3/4 (flow range dependent); Rated pressure range: (MPa): 0 to 0.8; Output options: NPN/PNP, 1-5V, 4-20mA; Accuracy: ±3% F. S.; Repeatability: ±1% F. S.