Pressure Relief 3 Port Valve with Locking Holes

Dimensions Padlock mounting position (Port size) (Port size) Standard specifications Model P1 P2 A B C D E F G H VHS20 1/8, 1/4 1/8 71.5 23 40 37 28 42 17.5 40 VHS30 1/4, 3/8 1/4 87 32 53 49 38 53 20 53 VHS40 1/4, 3/8, 1/2 3/8 111 42.3 70 63 52 71 29 70 1 0 - Revision history Rev. A Safety Instructions (Piping) corrected.

VQ7-6/7-8

) 50(63) 32(42) 5 3 1 23(30) 38(53) 32(42) 1 23(30) 2-3/8, 1/2, 3/4 30(42) 30(42) X(PE) port 1/8 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 3/8, 1/2, 3/4 R1, R2 port P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-25 26 Series VQ7-8 Construction DIN Terminal Type Metal seal Rubber seal type VQ7-8-FG-SVQ7-8-FG-S-R !

VQ7-6/7-8

In cases where back pressure effects actuator operation due to simultaneous operation of manifold valves, etc., this effect can be eliminated by installing a plate between the manifold block and the valve from which back pressure is to be prevented. 1 1 2 4 5 3 5 3 10 Series VQ7-6 Optional Manifold Parts Silencer box Pilot EXH silencer VV71---SB AN110-01 This can be provided as a unit on

Auto Switch Guide

Weight Auto Switch Internal Circuit D-Y7G (g) D-Y7G D-Y7H Auto switch model DC (+) Brown 0.5 10 10 Lead wire length (m) Main circuit of switch Main circuit of switch 3 53 53 OUT Black 5 87 87 DC () Blue Dimensions Mounting screw M2.5 x 4l Slotted set screw D-Y7H DC (+) Brown Indicator light 3.4 2.5 SMC 6.2 5 NC OUT Black 29 DC () Blue D-Y7G Most sensitive position 12.5 8-30-32 33 2-color

CL

ML1C 25 Bore size (mm) Auto switch model D20 20 25 32 40 32 20 D-B5/B64 D-G5/K5 BA-01 BA-02 BA-32 BA-04 25 20 -X 10 D-C7/C80 D-H7 BMA2-020 BMA2-025 BMA2-032 BMA2-040 20Mounting screws set made of stainless steel The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Auto Switch Guide

Weight Auto Switch Internal Circuit D-Y7G (g) D-Y7G D-Y7H Auto switch model DC (+) Brown 0.5 10 10 Lead wire length (m) Main circuit of switch Main circuit of switch 3 53 53 OUT Black 5 87 87 DC () Blue Dimensions Mounting screw M2.5 x 4l Slotted set screw D-Y7H DC (+) Brown Indicator light 3.4 2.5 SMC 6.2 5 NC OUT Black 29 DC () Blue D-Y7G Most sensitive position 12.5 8-30-32 33 2-color

Auto Switch Guide

Weight Auto Switch Internal Circuit D-Y7G (g) D-Y7G D-Y7H Auto switch model DC (+) Brown 0.5 10 10 Lead wire length (m) Main circuit of switch Main circuit of switch 3 53 53 OUT Black 5 87 87 DC () Blue Dimensions Mounting screw M2.5 x 4l Slotted set screw D-Y7H DC (+) Brown Indicator light 3.4 2.5 SMC 6.2 5 NC OUT Black 29 DC () Blue D-Y7G Most sensitive position 12.5 8-30-32 33 2-color

Applicable Auto Switch Model

10 47 D-E7lA D-E8lA 2 wire 3 wire D-J7 11 50 11 55 3 wire 2 wire 13 57 9 49 D-Z7 D-Z8 Solid state switch D-F7 4 wire 3 wire 13 56 10 55 2 wire 1 D-J79C 13 52 9 50 3 wire color 10 53 D-Yl 2 wire 2 11 54 3 wire color 11 54 2 wire 14 53 D-M5 Solid state switch 3 wire 16 60 D-Y7BA 54 1 2 wire 6 31 color 3 wire 7 37 D-F9l 2 2 wire 7 32 color 3 wire 7 34 D-F9BA 37 5.3-75

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators B LH 15 LT W 2 x LC (Knock pin position) Y X M W X Y 4 x LD LX Z LS + Stroke LZ ZZ + Stroke (mm) 7 7 6 6 LD 3 3 3 3 LT 4 4 4 4 LC 51 (60) 53 (61) 53 (61) 53 (61) LS Z 30 25 22 20 LH 135 (144) 125.5 (133.5) 123.5 (131.5) 118 (126) ZZ B 54 44 36 32 LX 4 3.5 3.5 3 M 16.5 16 15 15 X 8.5 8 7 7 Y 71 58 49 44 LZ 10 10 10 10 W Bore size 54.5 45 38.5

Compact 5-Port Solenoid Valve

Positive Negative common common 53 Plug-in Connector Connecting Base JSY1000/3000/5000 Series EX120 EX260 EX250 EX600 EX245 Chart Valve Lead Wire D-sub Flat Ribbon Terminal Block T Connection Step 2. The diagram below shows the terminal block wiring. All stations are provided with double wiring regardless of the mounted valves.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

(Band & Screw included) Auto switch models 25 32 40 Bore size (mm) 20 Bore size (mm) D-C7, D-C8 D-H7 D-B5, D-B6 D-G5, D-K5 D-A3, D-A4 Axial foot CHM-L032 CHM-L040 CHM-L020 CHM-L025 Flange CHM-F032 CHM-F040 CHM-F020 CHM-F025 20 BMA2-020 BA-01 BD1-01M When ordering the axial foot type, order 2 pcs. for each cylinder. 25 BMA2-025 BA-02 BD1-02M 32 BMA2-032 BA-32 BD1-02 40 BMA2-040 BA-04 BD1-

Speed Controller with Uni One-touch Fitting AS Series

Note) Inch size Metric size KE 23 01 1 8" 3.2 4 6 8 10 12 Control type 5 32" 04 06 08 10 12 03 05 07 09 11 13 3 16" AS-FG Meter-out Meter-in 0 1 1 4" 5 16" AS-FP 3 8" 1 2" With One-touch fitting AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 630. Use 1/8" tube.

JXCx-OMT0028CN

11 70 h 2)-700.00mm GW [OUT Data]Address.6 Address.9 Address.7 Address.6 01h 00h 15bit 8bit 7bit 0bit (H) 00 01 11 70 h (H) Address.9 Address.8 70h 11h 15bit 8bit 7bit 0bit (L) 00 01 11 70 h (L) 0.01mm 2 -700.00mm -7016 FFFEEE90h PLC FF FE EE 90 h Address.7 Address.6 FEh FFh 15bit 8bit 7bit 0bit (H) FF FE EE 90 h (H) Address.9 Address.8 90h EEh 15bit 8bit 7bit 0bit (L) FF FE EE 90

Air Pilot Operated Series NVSA

NPTF Botrom (5} 53 sPA 0114 li" NPTF Bottom (5) 54 SPA 01]5 {' NPTF Side {b) 55 DIFECTIONAL AIR VALVE DIMENSIONS PARTS LIST SERIES NVSA 4E14 NVSA 4114 DETAIL REF. DESCRIP'ION }IATERIAL PART I{O. Body Alum. O-C. SDrino . Reluh AXT 333-3 3 Spring S6at AXT 333 4 End CaD w/(4) Screws Alum. D.C. E C 0 1 1 1 1 5 End Cag Alum. D.C. Scr6ws End Cap (4) 7 Spool & Sleeve Ass'y. 440F. S.S.

Prevents Micro-Bubbles

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 VN Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

VCL

OUT(2) 1 Thread type Rc NPT G Nil N F IN(1) Voltage 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Port size Class 3 Port size 1/8 (6A) 1/4 (8A) Class 2 Class 4 Symbol 01 02 03 04 06 3/8 (10A) 1/2 (15A) Class B in AC has a rectifying circuit built-in. Class H is AC only. No rectifying circuit.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

(incl. band & screws) 25 32 40 Bore size (mm) 20 Auto switch models Bore size (mm) Axial foot CHN-L032 CHN-L040 CHN-L020 CHN-L025 D-C7, D-C8 D-H7 D-B5, D-B6 D-G5, D-K5 D-A3, D-A4 Flange CHN-F032 CHN-F040 CHN-F020 CHN-F025 When ordering the axial foot type, order 2 pieces for each cylinder. 20 BMA2-020 BA-01 BD1-01M 25 BHN3-025 BHN2-025 BD1-02M 32 BHN3-032 BGS1-032 BHN1-032 40 BHN3-040 BH2

SL5200

This detection method conforms to the SEMI standard F1. [Outboard leakage] Leakage rate from inside to outside of the products occurring when an internal pressure is more than the external pressure. This can be detected by pressurizing helium inside the products and detecting helium leaking outside from the products. This detection method conforms to the SEMI standard F1.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

For 20A/20B 25 5 1.5 4 x 2.6 Depth 7 or less Atmospheric vent port 30 20 30 20 Lead wire with connector M5 x 0.8 Thread depth 3.5 01 4 x 2.6 Depth 7 or less Atmospheric vent port 15.2 R1/8 7.2 N01 NPT1/8 A Piping specification Port size A 01 R1/8 Width across flats 10 N01 NPT1/8 Width across flats 12 20 ZSE20(F)/ISE20 Series Dimensions With bracket ZSE20(F) ISE20 Option 2 30 A1 25 20 Bracket

High Power Cylinder:

GA H2 NN NN GB H1 MM I ND D NB NE C Effective Thread E E NF N JC 10 10 N JD A K F NA S+Stroke F H B WH ZZ+Stroke (mm) Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 Bore (mm) 20 25 32 40 Eff. thread length 15.5 19.5 19.5 21 H1 5 6 6 8 H 44 48 51 54.5 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 C 40.5 45.5 51.5 61.5 B 32 36 44 53