SX

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

VM

H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 5-8-22 5 Series VHS Specific Product Precautions Be sure to read before handling. Air Supply Precautions on Design Warning Warning 1.

Free Mount Cylinder for Vacuum Series ZCUK

33 58 28 35 60 43 22 27 39 64 34 44 69 43 53 23 29 54 28 29 54 35 ZPT-B8 ZC(D)UKC25 ZC(D)UKQ25 29. 5 42. 5 38. 5 47. 5 51. 5 ZH 76. 5 54. 5 67. 5 63. 5 72. 5 DQ HQ HP 43 35 67 27 42 74 53 53 36 68 34 47 79 43 28 38 70 43 22 23 32 64 28 32 64 35 ZPT-B10 ZC(D)UKC32 ZC(D)UKQ32 ZU 32. 5 45. 5 41. 5 50. 5 54. 5 64. 5 77. 5 73. 5 82. 5 86. 5 ZL Rod end shape: Pad direct mounting ZY Tubing bore

Compact Cylinder with Lock Series CLQ

32 9 221 351 326 158 53 32 18 288 523 498 64 26 17 3 137 174 159 45 12 8 3 174 149 140 Magnet Thread Nut Rod end male thread With rubber bumper Foot style (Including mounting bolt) Rod side flange style (Including mounting bolt) Head side flange style (Including mounting bolt) Double clevis style (Including pin, snap ring, bolt and flat washer) 518 1064 1839 373 111 145 190 76 When auto

V

22.5 12.5 24 17.5 15 50 15.5 14.4 12.8 8.5 ZFB100-06 6 ZFB200-06 6 MM size 52 28 65 24.5 13.5 27 19.5 16 61 17.5 16.6 15.2 9.5 ZFB200-08 8 ZFB300-08 8 57 30 69.5 27 14.5 29.5 21 17 65 21.5 18 18.5 11 ZFB300-10 10 (N)ZFB101-05 53 24 17.5 316" 48 26 22.5 12.5 15 50 15.5 14.4 12.8 8.5 (N)ZFB101-07 54 24.2 17.7 14" APPLICATION T O E J E C T O R S Y S T E M Inch size (N)ZFB201-07 52 28 65 24.5

2/3 Port Valve

Symbol Solenoid Specifications OUT Apparent power VA Inrush Holding Power consumption W (Holding) Temp rise C (Rated voltage) 7.5 60 6 50 8 60 11 65 9.5 60 11.5 65 Model Power supply Frequency Hz 50 60(53) 18 60 51(44) 12 50 80 21 60 67 17 IN AC VXZ22 DC AC VXZ23 DC Note) O The return voltage is 20% or more of the rated voltage for AC and 2% or more for DC.

ZR

Vacuum Pressure 53 kPa (L: Large flow type) ZM Nozzle dia.

ZU

53 53 53 40 40 40 40 10 5 27 27 27 27 Suction flow rate Vacuum pressure 13 13 13 13 0 0 0 4 8 12 14 0 0.1 0.2 0.3 0.4 0.5 0.6 0 5 10 15 20 25 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow rate N (l/min(ANR)) Supply pressure (MPa) Supply pressure (MPa) Suction flow rate N (l/min(ANR)) How to Read Flow Characteristics Graph Flow characteristics are expressed in ejector vacuum pressure and suction

REA/REB

A D-X Me1 20Me1 = 1/3WeL1 = 1/3 x 15 x 0.2 = 1 [Nm] 4 = Me1 /Me1max = 1/10 = 0.1 W We Data L1 Examine Me1. n = 1 + 2 + 3 + 4 = 0.111 + 0.125 + 0.091 + 0.10 = 0.427 Can be used base on n = 0.427 1 10-2-53 53 Series REAH Model Selection 4 Caution on Design 2 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table

0.4

cable connector assembly (26P) AXT100-FC26-1: 1.5 m AXT100-FC26-2: 3 m AXT100-FC26-3: 5 m DIN rail clamp screw EXH R EXH R B B B B B B B B P X X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 one-touch fitting C6: 6 one-touch fitting C8: 8 one-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 one-touch fitting 2 L n Dimensions Formula L1 = 16n + 53

One-touch Fittings

P.53 KQ2W P.54 KQ2E Use to connect tubing through a panel, etc. Bulkhead connector P.54 KQ2E Use to connect a male thread and tubing through a panel, etc. P.53 KQ2T Male branch tee Male connector P.52 KQ2H Use to pipe a female thread in the same direction. Most general model. Use to branch a female thread at both 90 angles.

Mini Free Mount Cylinder

For Axial Mounting With Auto Switch (Built-in Magnet) For Lateral Mounting A B 27 29 31 33 38 43 48 53 27 29 31 33 38 43 48 53 27 29 31 33 38 43 48 53 C D Cylinder model Mounting bolt size CDUJB6-4 -6 -8 -10 -15 -20 -25 -30 CDUJB8-4 -6 -8 -10 -15 -20 -25 -30 CDUJB10-4 -6 -8 -10 -15 -20 -25 -30 Cylinder model Mounting bolt size CDUJB6-4 -6 -8 -10 -15 -20 -25 -30 CDUJB8-4 -6 -8 -10 -15 -20

Electric Slide Tables

Page 53 Power supply plug (Accessory) AWG20 (0.5 mm2) Note) When conformity to UL is required, the electric actuator and controller should be used with a UL1310 Class 2 power supply. Touch Operator Interface (Provided by customer) GP4501T/GP3500T Manufactured by Digital Electronics Corp. Cockpit parts can be downloaded free via the Pro-face website.

Sine Cylinder Series REC

28 49.5 24.5 55 30 51.5 26.5 25 55.5 30.5 59.5 34 56 31 50 25 53 28 49.5 24.5 55 30 51.5 26.5 32 59 36 63 40 59.5 36.5 53.5 30.5 56.5 33.5 53 30 58.5 35.5 55 32 40 69.5 38.5 73.5 42.5 70 39 64 33 67 36 63.5 32.5 69 38 65.5 34.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Base Mounted Metal Seal/Rubber Seal Series VQ

1 1 VQ0 VQ4 PCW type VQ5 120 80 4 46.2 (5.5) (35) VQZ VQD Mounting hole for 4-M5 10.6 ~ = (5.2) (L3) (L4) 35 52 73.5 n 2 1 3 4 5 6 7 8 Stations D side U side R (EXH) port 2-C10 DIN rail clamp screw 49 31.6 24.5 9.5 16 23 (7.5) (12) C6: One-touch fitting for 6 C4: One-touch fitting for 4 2n-C4, C6, C8 P = 16 41 P (SUP) port 2-C10 C8: One-touch fitting for 8 Dimensions Formula L1 = 16n + 53

Basic type / Direct mount type Series CY3B/CY3R

30 32 TC 10.5 14 17 20 22.5 28 33 42 48 Q 60 68 84 95 105 116 134 159 171 QW 10 14 18 17 20 26 34 48 60 MM M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 N PW 19 26 32 38 43 54 64 82 94 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 M 3.5 4 5 5 6 7 8 10 10 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121 Z 66 76 94 107 117 130 148 176 188 L 34 38 53

Dual Rod Cylinder Series CXSJ/CXS

15.5 43 5.5 53 15.5 45 7.5 Note 1) 6: D-A90, A96, A93, F9BAL 10: D-A90, A96, A93 Only outward electrical entry (D dimension) is available.

10

) 49.5 (57.5) 53 R 42 (47.5) 53.5 (61.5) 57.5 (65.5) 61 Q 108 110.5 113 113 R 36 (41.5) 47 (55) 51.5 (59.5) 55 1 2 52.5 55 57.5 57.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 47.5 50 52.5 52.5 36 (41.5) 47 (55) 51.5 (59.5) 55 3 ( ): Denotes the Normally Open (N.O.) dimensions.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

PB45] 0 Notch depth Command notch filter setting frequency Depth Setting Setting Setting Setting Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55

LEC-OM07605CN

PB45] 0 [dB] [Hz] [Hz] [Hz] -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 0 1 2 3 4 5 6 7 8 9 A B C D E F 00 01 02 03 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 30 31 32 33 34 35 36 37 38 39 3A 3B 3C 3D 3E 3F 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D 5E 5F 17.6 16.5 15.6 14.8 14.1 13.4 12.8 12.2 11.7