HRX-OM-X010

Alarm Code.01 to 21,24,25,28,29,32: Eliminate the error cause. Press the [RESET] key on the operation display panel or power cycle the main breaker to enable error recovery to take effect. *Alarm code 02 and 16 are alarms only for HRZ008-L/L1-F. *Alarm code 28 is an alarm only for HRZ010-W*S-F.

VCS

Series 2 3 4 Class 2 Class 3 Class 4 OUT port size Symbol 01 02 Port size 1/8 (6A) Stations 2 3 4 5 n Uside D side 1/4 (8A) Material All IN ports are 3/8.

90

Common PS port q Stations Note 1) Symbol w System (Port combination) Note 2) Stations Symbol Standard Port System 01 02 1 station Common PV port 2 stations Vacuum pump system Common PV: 8, Common PS: 6 Note 3) P P 10 10 stations Metric size Note 1) In case of an ejector, for an adequate performance, the number of stations when operated simultaneously depends on the nozzle diameter.

ZQ-OM01301

50 43 41 79 76 4 0.1 17 15 12 23 0.2 28 25 21 39 0.3 42 33 37 29 31 25 54 44 47 40 50 38 42 40 68 61 Standard supply pressureNote 1) 0.5 65 60 57 53 48 46 81 80 6 0.1 19 18 15 24 0.2 31 29 26 39 0.3 46 35 43 33 38 30 55 47 53 44 58 51 52 48 69 64 Standard supply pressureNote 1) 0.5 72 65 66 62 59 56 83 81 Note 1) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 12.

Pressure Relief 3 Port Valve with Locking Holes

Dimensions Standard specifications Model P1 P2 A B C D E F G H J Single Double VHS20-D 1/8, 1/4 1/8 48.5 51.7 23 40 37 28 42 17.5 40 21 VHS30-D 1/4, 3/8 1/4 55 58.2 32 53 49 38 53 20 53 26.5 VHS40-D 1/4, 3/8, 1/2 3/8 69.7 73.9 41.3 70 63 52 71 29 70 35.5 VHS40-06-D 3/4 1/2 71.7 75.9 43.3 75 63 52 71 29 70 35.5 VHS50-D 3/4, 1 1/2 86.5 90.7 44.5 90 80 72 90 33 90 45 Options specifications With

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Example: In case of 6 stations of air suction filter ZFA (single) ZFA100-01 6 pcs. (Brackets for 6 stations) ZZFA1-06 1 pc.

2/3 Port Valve for Various

G 53 55 56 C ) (? ! D !"# ! ! Coil insulation type # 9% ,* /) 3 ? $% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !

PSxx-OMU0002CN

N01 C4H C6H N7H C4L C6L N7L M5X0.8 R1/8 NPT1/8 4 mm 6 mm 1/4 inch 5/32 inch 4 mm 6 mm 1/4 inch 5/32 inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 24 g 34 g 36 g 27 g 28 g 29 g 30 g 30 g 36 g +39 g 0.15mm 2(AWG26) 1.0 mm (5 ) 3.5 -77No.PS-OMU0002CN-D M5 42.6 7 M50.8 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16

Soft Start-up Valve

VAC 100 VN SY100-82-2-01 200 VAC 200 VN SY100-82-2-02 110 VAC (115 VAC) 110 VN SY100-82-2-03 220 VAC (230 VAC) 220 VN SY100-82-2-04 When making connections, please note that using other than the supported size (3.5 to 7) heavy-duty cord will not satisfy IP65 (enclosure) standards.

Soft Start-up Valve

VAC 100 VN SY100-82-2-01 200 VAC 200 VN SY100-82-2-02 110 VAC (115 VAC) 110 VN SY100-82-2-03 220 VAC (230 VAC) 220 VN SY100-82-2-04 When making connections, please note that using other than the supported size (3.5 to 7) heavy-duty cord will not satisfy IP65 (enclosure) standards.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

VQ4000

Direct exhaust with silencer box: Exhaust from both sides (F/L kits only) Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust Enclosure IP65 (Except F kit) (2) (2) 01 1 station Stations Note 1) When two or more symbols are specified, indicate them alphabetically. Example) -CDK Note 2) Combination of [C ] and [S ] is not possible.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VS7 38 22 Dimensions 13 Silencer P/N Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP(For VQZ1000/VQZ2000) VVQZ2000-CP(For VQZ3000) Used to block an unused cylinder port when using a 4 way valve as a 3 way valve. 1.12-23 VQZ1000/2000/3000 Body Ported Manifold Option Double check block (Externally placed downstream): For VQZ1000 only VQ1000FPGll

PSxx-OMU0005CN

N01 C4L C6L M50.8 R1/8 NPT1/8 4 mm 5/32 inch 6 mm () PBTCB156PPSO HNBR C3604 SUS304NBR POMSUS304NBRC3604 24 g 34 g 36 g 30 g 30 g +39 g 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0005CN-C M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4LC6L 4 A B C4L 17.5 8.2 C6L 18.3 10.4 -79No.PS-OMU0005CN-C A B -80No.PS-OMU0005CN-C 0.5~7 + 0.5~7 -81No.PS-OMU0005CN-C 2 (n ) <> <> 31n +3.5

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Series ARG Accessory Port size Model ARG20 1/8, 1/4 ARG30 1/4, 3/8 ARG40 1/4, 3/8, 1/2 Bracket Pages 20 to 23 Set nut for changing the mounting angle of pressure gauges Regulator with Built-in Pressure Gauge with Back Flow Mechanism Series ARGK ARG20K 1/8, 1/4 ARG30K 1/4, 3/8 ARG40K 1/4, 3/8, 1/2 Pages 24 to 28 19 Regulator with Built-in Pressure Gauge Series ARG20/30/40 How to Order ARG 20 01

3 Port Air Operated Valve

VZA VTA VPA342 VPA542 VGA VPA VPA 21.5 28 VPA3 15 22 1563 3 Port/Air Operated Valve Base Mounted/Single Unit VPA300/500/700 Series How to Order VPA 3 4 4 1 01 A Series 3 5 7 VPA300 series Type of actuation A B N.C. (Normally closed) N.O.

Hydraulic

H B C F A E G J K L D Tolerance Size 40 double clevis type 50 double clevis type 63 double clevis type 80 double clevis type 100 double clevis type 125 double clevis type 160 double clevis type +0.027 0 +0.027 0 40 M8 x 20 21 60 45 19 12 R 15 9 12 18 32 47 44 L K counter bore depth 2 J counter bore 50 M10 x 22 23 73 50 23 12 R 18 11 14 21 35 53 53 A B +0.027 0 63 M10 x 25 27 80 55 23 15 R

NARM Series

Option: Pressure gauge G15-10-01 How to Order NARM2000-4A2-N01G G15 P10 01 Symbol Units Nil MPa P PSI Common IN Individual IN IN M5 x 0.8 .39 (10) Max. pressure indication 10 150PSI (1.0MPa) .59 (15) IN OUT OUT *Pressure gauge for 30psig (0.2MPa) is not available.

Digital Pressure Switch

port Weight Body 24 g 34 g 36 g 27 g 28 g 29 g 30 g 30 g 36 g Lead wire with connector +39g Cable specifications Conductor area 0.15 mm2 (AWG26) Insulator Outside diameter 1.0 mm Color Brown, Blue, Black, White, Gray (5 core) Sheath Finished outside diameter 3.5 -77No.PS-OMU0003-D Dimensions M5 type 01/N01 type Piping specifications Port size A 01 R1/8 Width across flats 10 N01 NPT1/8 Width

Digital Pressure Switch

connector +39 g Cable specifications Conductor area 0.15 mm2 (AWG26) Insulator Outside diameter 1.0 mm Color Brown, Blue, Black, White, Gray (5 core) Sheath Finished outside diameter 3.5 -78No.PS-OMU0006-D Dimensions M5 type 01/N01 type Piping specifications Port size A 01 R1/8 Width across flats 10 N01 NPT1/8 Width across flats 12 C4L/C6L type Piping specifications A B C4L 17.5 8.2 C6L