CV/MVGQ

Relay, PLC 100 V Reed switch Solid state switch PLC Yes 100 V, 200 V Relay, PLC 12 V 24 V 2-wire Terminal conduit PLC 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire Terminal conduit 5 V, 12 V Relay, PLC Yes 12 V 3-wire (NPN)

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ S Standard cable Cable color Connector D terminal no.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

12 V K39 Grommet Solid state auto switch 3-wire (NPN) 5 V, 12 V M9NW V V V v v IC circuit 3-wire (PNP) M9PW V V V v v 2-wire 12 V M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V M9NA*1 v v V v v IC circuit 3-wire (PNP) M9PA*1 v v V v v 2-wire 12 V M9BA*1 v v V v v With diagnostic output (2-color indicator) 4-wire (NPN) 5 V, 12

NCM

12 V Grommet 3-wire (PNP) Solid state switch 12 V 2-wire Connector Relay, PLC 24 V 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 3-wire (PNP) Grommet 12 V 2-wire Water resistant (2-color indication) 5 V, 12 V IC circuit 4-wire (NPN) With diagnostic output (2-color indication) IC circuit 3-wire (NPN equivalent) A96 5 V Yes None Yes None Yes None Yes

Table of Contents

Model 90 5 V,12 V 5 V,12 V, 24 V Parallel cord Reed switch Solid state switch Solid state switch Reed switch IC circuit CRB2FW10 P211070-2 Yes Yes Yes No No 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V 90A Heavy-duty cord CRB2FW15 P211090-2 97 Parallel cord CRB2FW20 P211060-2 2-wire 93A 100 V CRB2FW30 P211080-2 For 10 and 15 T99 Relay, 24 V 12 V Grommet T99V PLC Heavy-duty cord S99

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color S Standard cable Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1-B 270 LE-CA-3-B 520 LE-CA-5-B 870 LE-CA-8-B 1370 LE-CA-A-B 1710 LE-CA-B-B 2560 LE-CA-C-B 3400 U V W Red White Black Connector A2 terminal no. B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Model 90 5 V,12 V 5 V,12 V, 24 V Parallel cord Reed switch Solid state switch Solid state switch Reed switch IC circuit CRB2FW10 P211070-2 Yes Yes Yes No No 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V 90A Heavy-duty cord CRB2FW15 P211090-2 97 Parallel cord CRB2FW20 P211060-2 2-wire 93A 100 V CRB2FW30 P211080-2 For 10 and 15 T99 Relay, 24 V 12 V Grommet T99V PLC Heavy-duty cord S99

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Model 90 5 V,12 V 5 V,12 V, 24 V Parallel cord Reed switch Solid state switch Solid state switch Reed switch IC circuit CRB2FW10 P211070-2 Yes Yes Yes No No 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V 90A Heavy-duty cord CRB2FW15 P211090-2 97 Parallel cord CRB2FW20 P211060-2 2-wire 93A 100 V CRB2FW30 P211080-2 For 10 and 15 T99 Relay, 24 V 12 V Grommet T99V PLC Heavy-duty cord S99

Cylinder with Lock

wire (NPN) Grommet Solid state auto switch G39 2-wire 12 V K39 Diagnostic indication (2-color indicator) 5 V, 12 V 3-wire (NPN) 5 V, 12 V M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v Relay, PLC Yes 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 v v V v v IC circuit 3-wire (PNP) M9PAV1 M9PA1 v v V v v 2-wire 12 V M9BAV1 M9BA1 v v V v v

Table of Contents

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

AC Servo Motor Driver (CC-Link Type ）

(b) One driver occupies 1 or 2 stations.

V100

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

AC Servo Motor Driver

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

Vacuum Unit

ue DC() Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less FUNC Blue DC() Voltage output type: 1 to 5 V Output impedance: Approx. 1 k Pilot valve for supply Pilot valve for supply + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k B C A B C A Coil + + Max. 80 mA Residual voltage: 2 V

Magnetically Coupled Rodless Cylinder

auto switch 2-wire 12 V M9NWV M9PWV M9BWV M9NW M9PW M9BW 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Relay, Diagnostic indication Yes Grommet 24 V PLC (2-color indication) 2-wire 12 V M9NAV M9PAV M9BAV M9NA M9PA M9BA 3-wire (NPN) 3-wire (PNP) 5 V,12 V IC circuit Water resistant (2-color indication) 2-wire 12 V 3-wire auto switch A96V A96 # # (NPN equivalent) 5 V IC circuit Yes Reed

CA2

Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Yes Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2

5 Port Solenoid Valve

PROFINET EtherNet/IP Nil + COM v v v v v v N COM v v v v v v B B B B B Stations 1 2 3 4 5 n D side U side * Stations are counted from station 1 on the D-side. * Leave the box blank for without SI Unit (SD0m, SD60). w Cylinder port size o Input block type (Enter only for S kit compliant with EX250.) u I/O Unit stations (Enter only for EX600-compliant S kit.) 03 3/8 04 1/2 B Bottom ported

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

J79W F7BA 200 V 100 V Relay, PLC Yes 2-wire 12 V Connector 24 V Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Yes Relay, PLC 24 V Water resistant (2-color indication) 12 V 2-wire Grommet With diagnostic output