CXS

) M4 x 0.7 (Hexagon nut) E V (Opposite side: Same) 4-M5 x 0.8 with depth 4.5 (Piping port) (Opposite side: Same) (L) (Z) 5 QQ C Q R 8 (I) (L) (Z) U N (G) NN (mm) V A B C D E F G H I J L M N NN P Q QQ R X Y U Model 2-3.4 through 2-6.5 counterbore with depth 3.3 4-M3 x 0.5 with depth 4.5 2-M4 x 0.7 with depth 7 2-M3 x 0.5 with depth 5 M3 x 0.5 x 10 46 17 44 15 7.5 2-M4 x 0.7 35 20 4 8 20 6

Hydraulic

(mm) With rod boot Bore size (mm) Stroke range (mm) l e CD J B BB C F GA GB M NA NB P R S T LH LT LX LW X1 Y1 SS Z f Q B-rod C-rod B-rod C-rod 32 M10 x 1.25 52 58 62 38 16 32 15 11 37 31 3/8 39 141 11 11 40 8 40 30 32 13 203 205 21.5 15 25 to 1400 40 M10 x 1.25 52 52 65 69 45 12 32 15 11 36 30 3/8 42 141 11 11 43 8 46 33 32 13 203 205 12 15 25 to 1400 1/3.5 stroke 50 M10 x 1.25 55 52 76

Table of Contents

06 10 14 B 3 4 1B 1 8 N.C. auto-drain N.O. auto-drain Drain guide Accessory 02 03 B 1 4 B 3 8 04 B 1 2 1 B 1 2 20 2B 1 4 B IN-OUT reversal direction T Element service indicator Option AMD800 to AMD1000 Self-standing type AMD801/901 Piping support type 20 01 AMD 8 20 00 AMD 8 Port size Body size Port size Body size 8 8 20 2B flange 30 3B flange 20 2B flange 30 3B flange 9 9 10 40 4B flange

CRB2/CRBU2/CRB1

20 CDRB1BW 504 0.030 4 0.030 0 0 W 25 CDRB1BW 635 0.030 5 0.030 P 0 0 PORT 36 CDRB1BW 805 0.030 5 0.030 0 0 40 CDRB1BW1007 0.036 7 0.036 0 0 4-T S F CDRB1BW-SE, CDRB1BW-DE L E K Key length B port B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

CL

F D GA 80 H 8 BQ GK GQ GL GR 5 BZ BP GC GB GD 3.5 B1 AL B B2 BN BC 13 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 Up to 400 55 8 8 41 4 6 38 4 26 40 73.5 15.5 63.5 8 13 20 8 6 Up to 450 64.5 8 9 45 7 9 45 7 32 4 47 83.5 19.5 74.5 10 22 17 90 13 CNS 25 8 6 Up to 450 64.5 8 9 45 7 9 45 7 32 4 47 83.5 19.5 74.5 12 22 17 90 13 32 10 8 Up to 500 70 11 8 50 7 11 52 8 41 4 54 90.5 21 80 14 24 22 100.5 16 40

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Cylinder ports (1) N1 N3 N7 N9 N11 M5 01 02 Symbol NM External pilot port 3/8 1/8 5/32 1/4 5/16 Mix Applicable tube O.D.(Inch) M5 1/8 1/4 M5x0.8 VQZ1000 V V V V V Cylinder port VQZ2000 V V V V V VQZ3000 V V V V V Note 1) Mixing One-touch fittings and thread types is impossible.

Fieldbus System

thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 11.5 101.2 15.7 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 72 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8, C8, C10, C12 [4(A), 2(B) port] 1/4: 1/4" female thread (Rc

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

Environment

LEFS16/Ball Screw Drive Horizontal Vertical 16 6 LEF LEF Lead B 14 LEJ Lead B 12 Work load: W [kg] Work load: W [kg] 4 10 Lead A LEL 8 Lead A 6 LEM 2 4 2 LEY 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 800 600 700 LES Speed: V [mm/s] Speed: V [mm/s] LEPY LEPS LEFS25/Ball Screw Drive Horizontal Vertical LER 20 Lead B 30 LEH Lead B 25 15 LEY -X5 Work load: W [kg] Work load: W [kg] Lead

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

42 05 01 Type VK334 Applicable blanking plate assembly VK3000-7-1A Valve stations Solenoid direction 01 1 station Solenoid on same side of A and B port A port: Rc 1/8 B port: Rc 1/8 Nil P port: Rc 1/8 Thread type R port: Rc 1/8 20 Type S42 Solenoid on same side of A and B port 20 stations Type VK334 Nil F N T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port:

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(mm) Bore size A B C D F GA GB H MM NA NB NDh8 NN S Z 10 15 12 14 4 8 8 5 28 M4 x 0.7 12.5 9.5 8 0 0.022 M8 x 1.0 46 74 16 15 18.3 20 5 8 8 5 28 M5 x 0.8 12.5 9.5 10 0 0.022 M10 x 1.0 47 75 Single foot (L) CJ2YL Bore size Stroke Head cover port location Z Mounting nut Rod end nut Piping port 2 x M5 x 0.8 GB NN F GA Cover surface MM C D 0 0.3 LY LB B LH 0 0.3 B LX LT Piping port M5 x 0.8

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 42 29 11 7.5 8 8.5 9 M4 x 0.7 10 12 13 15 M4 x 0.7 4.3 4.3 5.6 5.6 M5 x 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 8 8 10 10 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 5 5 6 6 13 15 18 21 18 26 30 36 42 13 15 18 21 18 22 24 30 12 16 20 25 10, 20, 30, 40, 50, 75, 100 125, 150

ZR

PS port (Pilot valve supply pressure port) Release flow adjustment needle Rc 1/8 V port Vacuum pad connection port) Valve unit ZP 1 2 1 Rc 1/8 PV port (Air supply pressure port) ZCU AMJ 1 Bracket B Bracket B Misc.

Table of Contents

(mm) Model Clean series M B Black 8 10 5 6.5 12 8 2.5 6 4 4 Tubing I.D.

MY1

3.6 4.9 6.4 8 11.7 14.8 F 1.8 3 4 5 6 8.5 G 6.5 6.5 8 9.5 11 14 D 21 26 38 50 64 80 Applicable cylinder MY1H10 MY1H16 MY1H20 MY1H25 MY1H32 MY1H40 Model MY-S10A MY-S16A MY-S20A B B B MY-S25A MY-S32A B B MY-S40A B Side support A MY-S16A SMY1H16, #5 (#1 + #5 + #7) For 20 to 40 MY-S Bore size A SMY1H Bore size , #6 (#1 + #6 + #8) Side support B MY-S16B SMY1H16, #6 (#1 + #6 + #7

CL

F D GA 80 H 8 BQ GK GQ GL GR 5 BZ BP GC GB GD 3.5 B1 AL B B2 BN BC 13 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 Up to 400 55 8 8 41 4 6 4 38 26 40 73.5 15.5 63.5 8 13 20 8 6 Up to 450 64.5 8 9 45 7 9 7 45 4 32 47 83.5 19.5 74.5 10 22 17 90 13 CNS 25 8 6 Up to 450 64.5 8 9 45 7 9 7 45 4 32 47 83.5 19.5 74.5 12 22 17 90 13 32 10 8 Up to 500 70 11 8 50 7 11 8 52 4 41 54 90.5 21 80 14 24 22 100.5 16 40

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

CQS

CX CZ L L1 CD hole H10 Rod d9 B 17 17 19.5 22.5 CL 34.5 35.5 42 47.5 A 45.5 46.5 61 67.5 B 22 22 29.5 32.5 CL 39.5 40.5 52 57.5 14 15.5 18.5 22.5 6 6 9 10 12 14 20 24 5 5 8 10 4 4 5 5 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 12 16 20 25 5, 10 B + Stroke CL + Stroke A + Stroke Double clevis bracket material: Carbon steel For details about the rod end nut and accessory