V100

S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type VQZ VZ VS For AC (50/60Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] VFN Light/Surge voltage suppressor Electrical entry Nil R U Z For DC, AC Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor 24 V, 12 V, 6 V, 5 V, 3 VDC/100

10

(Smooth Cylinder) MBlQ Note 6) MBK-Z (Non-rotating rod type) MBB Note 6) (With end lock) MBY-Z Note 2) (Low friction type) Double acting CJ1 Single rod Double rod Single rod Single rod Single rod CJP Air Rubber Air Rubber Air Note 9) 408 412 416 Best Pneumatics No.w-3 424 CJ2 32 to 100 Symbol JCM V V V V V V V Standard v v v v v v v Long st CM2 V V V V V V V D CM3 V V V V V v v MBl-lJ K

MY1

function Wiring (Output) Type DC AC 0.5 (Nil) 3 (L) 5 (Z) Z76 Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Reed switch IC circuit 5 V Yes Yes Grommet Relay, PLC 12 V 100 V 24 V Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V Solid state switch Relay, PLC 12 V Grommet 24 V IC circuit 5 V, 12 V

CA2

Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Yes Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Lead wire length (m) Load voltage Auto switch model Indicator light Pre-wire connector Wiring (Output) Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) None (N) AC DC Perpendicular In-line 3-wire (NPN equivalent) IC circuit A76H 5 V Reed switch Solid state switch Grommet A72H A73H A72 A73 A73C 200 V 100 V Yes Relay, PLC 12 V 2-wire Connector 24 V Diagnostic

Aluminum High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 A XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

Table of Contents

Refer to page 13-2-10 for details. (1) Valve unit (4) Adsorption confirmation switch unit K1 A V ZX1 5 Z B D M L Unit for replacement 15 C 0X B ZSP1 D Piping specifications Applicable nozzle diameter Manifold All ports are equipped with plugs.

Rotary Actuator/Vane Type

CRJ X Y1 X Y1 h L1 b CRA1 Z Z b (h9) h (h9) L1 4 0 0.030 4 0 0.030 20 2 x Q2 B port A port 2 x Q3 CRQ2 B port A port 2 x Q3 A A MSQ F A parallel key is used instead of single flat for size 40.

Table of Contents

Type Electrical entry Applicable load Load voltage Lead wire length (m) Indicator light Auto switch model Lead wire type Applicable size Wiring (Output) 5 (Z) DC AC 0.5 (Nil) 3 (L) None (N) 90 Parallel cord 5 V,12 V 5 V,12 V,24 V 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V IC circuit Reed switch No Heavy-duty cord 90A 97 Parallel cord 2-wire 93A 100 V For 10 and 15 T99 Relay, 24 V Grommet

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Type Electrical entry Applicable load Load voltage Lead wire length (m) Indicator light Auto switch model Lead wire type Applicable size Wiring (Output) 5 (Z) DC AC 0.5 (Nil) 3 (L) None (N) 90 Parallel cord 5 V,12 V 5 V,12 V,24 V 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V IC circuit Reed switch No Heavy-duty cord 90A 97 Parallel cord 2-wire 93A 100 V For 10 and 15 T99 Relay, 24 V Grommet

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Type Electrical entry Applicable load Load voltage Lead wire length (m) Indicator light Auto switch model Lead wire type Applicable size Wiring (Output) 5 (Z) DC AC 0.5 (Nil) 3 (L) None (N) 90 Parallel cord 5 V,12 V 5 V,12 V,24 V 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V IC circuit Reed switch No Heavy-duty cord 90A 97 Parallel cord 2-wire 93A 100 V For 10 and 15 T99 Relay, 24 V Grommet

NCQ8

NCDQ8A(B)Z-(C)(M) (in) NCDQ8A(B)Z-100T(M) (025st to 100st) (in) D-A9, D-A9V D-M9(V), D-F9W(V) D-A9, D-A9V D-M9(V), D-F9W(V) D-F9BAL D-F9BAL Bore size Bore size A B HS A B HS A B HS A B HS A B HS A B HS 056 075 106 150 200 250 056 075 106 150 200 250 0.24 0.14 0.33 0.31 0.2 0.35 0.04 0.08 0.12 0.12 0.2 0.28 0.71 0.81 0.96 1.18 1.45 1.6 0.39 0.3 0.49 0.47 0.35 0.51 0.2 0.24 0.28 0.28 0.35 0.43

Free Mount Cylinder

Load voltage Auto switch model Lead wire length (m) Indicator light Wiring (output) Special function Electrical entry AC DC Pre-wired connector 0.5 (Nil) 3 (L) 5 (Z) Applicable load Type Perpendicular In-line 3-wire (NPN equivalent) 5 V A96V A96 IC circuit Yes Yes Reed switch Solid state switch Grommet 100 V 24 V 12 V 5 V, 12 V A93 A90 M9N M9P M9B F9NW F9PW F9BW A93V A90V M9NV M9PV M9BV

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Position (Detection at stroke end) and Its Mounting Height CJ2Y-Z CM2Y-Z CG1Y-Z MBY-Z CA2Y-Z CS2Y CQSY CQ2Y-Z CJ2X-Z CM2X-Z CQSX CQ2X CUX (mm) Auto Switch Proper Mounting Position Auto switch model Band mounting D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-H7m D-H7C D-H7NF D-H7mW D-H7BA D-C7m D-C80 D-C73C D-C80C D-A9m D-A9mV A B A B A B A B Bore size 10 (5) 6 (5) 6 (1) 2 (1) 2 2.5 2.5 1.5

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

6 V Grommet Double 5 V Single 3 V P.43 10-SY320 0.65 Body ported Base mounted Body ported Base mounted 10-SY520 2.4 10-SY720 3.3 10-SY920 8.6 P.58 10-SY340 1.1 10-SY540 2.8 10-SY740 A B 4.5 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors PE 10-SY940 10 Valve option P, EA, EB port size Manual override A, B port size Oil resistant

MB

Lead wire length(m) Load voltage Auto switch model Indicator light Wiring (Output) Applicable load Pre-wire connector Special function Type Electrical entry Tie-rod mounting Band mounting 0.5 (Nil) 3 (L) 5 (Z) AC DC 3-wire (Equiv. to NPN) Z76 5 V IC circuit Grommet A33 A34 A44 Z73 A54 100 V Relay PLC Reed switch Solid state switch 100 V, 200 V Yes 12 V PLC Terminal conduit 24 V 2-wire

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Lead wire length (m) Auto switch model Load voltage Indicator light Type Electrical entry Wiring (Output) Pre-wire connector Applicable load Special function Applicable bore size (mm) 0.5 (Nil) 3 (L) 5 (Z) None (N) AC DC 80, 100 20 to 63 3-wire (NPN equivalent) IC circuit 5 V C76 Reed switch Solid state switch Grommet B54 C73 C73C 100 V, 200 V 100 V Yes Yes 12 V Relay, PLC 2-wire 24 V

CXS

Hexagon nut) E V (Opposite side: Same) 4-M5 x 0.8 with depth 4.5 (Piping port) (Opposite side: Same) (L) (Z) 5 QQ C Q R 8 (I) (L) (Z) U N (G) NN (mm) V A B C D E F G H I J L M N NN P Q QQ R X Y U Model 2-3.4 through 2-6.5 counterbore with depth 3.3 4-M3 x 0.5 with depth 4.5 2-M4 x 0.7 with depth 7 2-M3 x 0.5 with depth 5 M3 x 0.5 x 10 46 17 44 15 7.5 2-M4 x 0.7 35 20 4 8 20 6 33.6 8.5 7 30

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Lead wire length (m) Load voltage Auto switch model Indicator light Pre-wire connector Wiring (Output) Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) None (N) AC DC Perpendicular In-line 3-wire (NPN equivalent) IC circuit A76H 5 V Reed switch Solid state switch Grommet A72H A73H A72 A73 A73C 200 V 100 V Yes Relay, PLC 12 V 2-wire Connector 24 V Diagnostic