Dual Speed Controller with One-touch Fitting Series ASD

2 !4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !

H/DL/L/LL

(mm) Connection threads R Model M Effective area (mm 2) Weight (g) A L1 L2 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DT04-01 15 5.7 33 DT04-02 17 19 4 10 10 23.5 19.6 40 2-applicable tubing DT06-01 35 17 19.6 10 23.5 DT06-02 16 6 19 44 14 14 12 DT06-03 22 70 26.5 24.5 21.6 22.6 24.5 25.8 24.5 29.4 29.6 30.3 29.4 120 Reference dimensions after R thread installation.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-

HEC-OM-S008

32 35 30 30 03 32 3C 0D Answer 25.0 deg.C 31 Temperature setting (without writing FRAM) 2 01 32 02 31 32 35 30 30 03 32 3C 0D 06 32 OD Set at 25.0 deg.C 32 Reading internal sensor 2 01 32 05 32 36 39 0D 01 32 02 32 32 35 30 32 03 32 3F 0D Answer 25.02 deg.C 33 Reading external sensor 2 01 32 05 33 36 3A 0D 01 32 02 33 33 30 30 32 03 32 3C 0D Answer 30.02 deg.C 34 Reading alarm status 2 01

F

KQL11-37S 17.46 17.9 17 25.5 35.5 36.5 21 7 59 1/2 1/4 KQL13-35S 17.46 21.7 17 28 31.5 36.5 22 9 28 1/2 3/8 KQL13-36S 17.46 21.7 17 28 33.5 38.5 22 9.6 36 1/2 1/2 KQL13-37S 22.23 21.7 17 28 37.5 40 22 9.6 62 P R O D U C T S E L E C T O R H E X A G O N S O C K E T H E A D M A L E C O N N E C T O R : K Q S ( K Q 2 S ) Applicable Thread Model H D L A M Effective Weight Tube OD R(PT) (Hex) 0rifice

AS-FG/ASD-FG

Type Applicable tube outside diameter Metric size Inch size 2 3 Elbow Universal 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 3.2 4 6 8 10 12 23 04 06 08 10 12 Control method 0 1 Meter-out Meter-in With One-touch fittings Use a 1/8" tube.

VM

fitting 1(P): Male thread 2(A): One-touch fitting 1(P): One-touch fitting 2(A): Male thread 1(P): Male thread 2(A): Male thread 2(A) 2(A) 2(A) 2(A) Applicable tubing O.D.

reduces flow setting time

L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS12l1FSl-M5E-01 1/8" 7.2 9.4 17.2 21.7 16.9 39.0 36.5 35 33.5 13.3 13.6 15.1 5.5 9.6 7 AS12l1FSl-U10/32E-01 AS12l1FSl-M5E-03 5/32" 8.2 AS12l1FSl-U10/32E-03 AS12l1FSl-M5E-07 1/4" 11.2 18.6 23.1 16.5 8 AS12l1FSl-U10/32E-07 M5 x 0.8 10/32UNF 8 Note 1) Reference dimensions Note 2) Reference dimensions of threads after

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Note 2) C and b values are for controlled flow with the needle fully open and free flow with the needle fully closed. 687 A AS-FSG Series Stainless steel Universal Elbow 1 How to Order Applicable tubing O.D. Note 1) Metric size 02 2 23 3.2 Note 2) 04 4 06 6 Inch size 01 1/8" 03 5/32" 07 1/4" Note 1) For selecting applicable tubing O.D., refer to the Model on page 687.

Flow Control Equipment

Controller / 1 4 / 3 8 / 1 2 With One-touch Fittings/Universal / 1 8 20 to 32 20 to 40 40 to 63 63 to 100 AS23l 1FE-01 AS23l 1FE-02 AS33l 1FE-03 AS43l 1FE-04 / 1 4 / 3 8 / 1 2 Port size on piping side Standard/In-line (Metal Body) M3 M5 / 1 8 / 3 4 1 2 1 1 / 1 4 / 1 4 / 1 2 / 3 8 / 1 2 AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 20 to 32 20 to 40 32 to 63

44

KFG2L0425-01 KFG2L0425-02 KFG2L0403-01 KFG2L0403-02 KFG2L0604-01 KFG2L0604-02 KFG2L0806-01 KFG2L0806-02 KFG2L0806-03 KFG2L1075-02 KFG2L1075-03 KFG2L1075-04 KFG2L1008-02 KFG2L1008-03 KFG2L1008-04 KFG2L1209-02 KFG2L1209-03 KFG2L1209-04 KFG2L1210-02 KFG2L1210-03 KFG2L1210-04 KFG2L1613-03 KFG2L1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2

0.55

(A) 2 (A) 2 12 12 Standard 1 (P) 3 (R) 1 (P) 3 (R) i (A) 2 (A) 2 2(A) 3(R) o For vacuum 12 12 3 (R) 1 (P) 1 (P) 3 (R) X 1(P) For vacuum u y t r e w q i 2(A) 3(R) o X Component Parts No.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04

Compressed Air Preparation Filter

AD27-2-A AD37m-2-A AD47m-2-A With level gauge AD37m-8-A AD47m-8-A Normally open (N.O.) AD38m-2-A AD48m-2-A With level gauge AD38m-8-A AD48m-8-A Automatic (Auto drain) The bowl assembly for sizes 20 to 40 comes with a bowl seal. The bowl assembly for sizes 50 and 60 comes with a flange and a bowl seal.

Intrinsically Safe Valve

type 53-SY7000 Nil F N T Rc Thread piping A, B port size 2-position single only 53-SY9000 G NPT Symbol Port size Applicable series Type of actuation NPTF 01 02 02 03 53-SY5000 1/8 2-position single (A) 4 2 (B) 53-SY7000 1/4 1 1/4 53-SY9000 1 (P) (EA) 5 3 (EB) 3/8 One-touch fitting (Metric size) Note) 2-position double F2: With side bracket 2 (B) (A) 4 Symbol Port size Applicable series 2

One-touch Fittings

Symbol Size 01 R1/8 02 R1/4 03 R3/8 04 R1/2 Applicable tubing O.D.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

U side (FU) 83.5 55.5 M5 ground screw U side 19 34.5 n 12 X 2n-Rc3/8, 1/2 (ports A, B) A 4 B 2 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22

High Purity Chemical Valve

Manifold material PFA Tubing size 1 2 ... Stations Orifice diameter 1/4 3/8 1/2 Valve type Symbol Type 4 8 10 P P Manifold N.C. A A Stations are counted from station 1 on the left side, with the A (OUT) ports in front. A Non-locking Locking A A (OUT) port LLH2A-03-SH 1 set 1 set Manifold base part no. LVH20A-S07 2 sets 2 sets Valve part no.

Pilot Operated

2 i e t !0 A !3 !2 !1 o i t !0 !3 !2 !1 o i e t !0 A A e u w y q B C P2 P1 OUT IN P1 w y u B q w y u B q P2 OUT C C IN VXD2272/2382/2392 (32A to 50A) VXD2270/2380/2390 (32A to 50A) !4 !5 !3 !1 i t e !2 !0 A r u B y q !3 !2 !1 i t e o !0 A r u B y q w o w C C Operation When the coil !

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-03-07(S)A 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 42.3 40.7 37.1 35.5 13.3 29 (30) AS32l1FG-03-09(S)A 5/16" 13.2 22.7 33 14.2 AS32l1FG-03-11(S)A 3/8" 15.5 26.7 37 28.2 15.6 30 (31) AS42l1FG-04-11(S)A 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 50.8 49.2 43.7 42.1 15.6 52 (51) AS42l1FG-04-13(S)A 1/2" 19.3 30.9 43.8 (43.7) 34.7 17 54 (53) 20.9 30.2 (30.3) 1/4 17 (17.5) 13 Note 1) Reference