XL

1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

CJ2

B B A B A A B B A 1 (0) 1 (7.5) 2 (0.5) 2 (8.5) 6 CJ1 10 16 1.5 2 1.5 2 2.5 3 2.5 3 3 3.5 3 3.5 3.5 4 3.5 4 0.5 1 0.5 1 CJP Figures in parentheses for bore 6 are in the case of double rod type, (Series CJ2W).

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

High Vacuum Angle Valve, XL Series

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

Series PF2W Digital Flow Switch For Water

Although the circuit at the output side of the switch is surgeprotected, damage may still occur if a voltage surge is applied repeatedly. When a load which generates a surge, such as from a relay or solenoid valve, is directly driven, use a switch with a built-in surge absorbing element. 4. Since the type of fluid varies depending on the product, be sure to verify the specifications.

17

MY-SA 2 x G F 2 x H E C D A B Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY-S25 MY-S32 MY-S40 Applicable cylinder A 105 130 145 B 119 148 167 C 35 45 55 D 50 64 80 E 8 11.7 14.8 F 5 6 8.5 G 9.5 11 14 H 5.5 6.6 9 J M6 x 1 M8 x 1.25 M10 x 1.5 A B A B A B MY1H25 MY1H32 MY1H40 MY1 HT Side supports consist of a set of right and left supports.

o

Can be used when a double solenoid,3 way valve is requiled Prrq e*'tg4 9 PPorf A Port ' N o i (X) plus B A I dfNll= r / r / r \ r l R P R (x) ptus B A ff-7TrTl utrt / | \ ltrl l l / r l r \ t l R P R Leakage Voltage _q cll 6 Note that when using resistor in parallel with a contact, the leakage voltage may increase due to the leakage current flo\{ing through the resistor (!

o

Can be used when a double solenoid,3 way valve is requiled Prrq e*'tg4 9 PPorf A Port ' N o i (X) plus B A I dfNll= r / r / r \ r l R P R (x) ptus B A ff-7TrTl utrt / | \ ltrl l l / r l r \ t l R P R Leakage Voltage _q cll 6 Note that when using resistor in parallel with a contact, the leakage voltage may increase due to the leakage current flo\{ing through the resistor (!

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

Can be used when a double solenoid,3 way valve is requiled Prrq e*'tg4 9 PPorf A Port ' N o i (X) plus B A I dfNll= r / r / r \ r l R P R (x) ptus B A ff-7TrTl utrt / | \ ltrl l l / r l r \ t l R P R Leakage Voltage _q cll 6 Note that when using resistor in parallel with a contact, the leakage voltage may increase due to the leakage current flo\{ing through the resistor (!

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

D-C7m/C80 D-C73C/C80C D-H7m/H7mW D-H7BA/H7NF Band mounting BJ2-010 (A set of band and screw) BJ2-016 (A set of band and screw) BQ2-012(S) (A set of a and b) BQ2-012(S) (A set of a and b) Set screw (Accessory) D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA Note 5) D-M9mAV Note 5) D-A9m D-A9mV Note 4) Rail mounting BQ2-012 BQ2-012S a Auto switch mounting screw b Auto switch mounting bracket Nut (Cylinder

CJ5-S

CE2 + 0.048 0 Y-J010SUS 3.3 3.2 8 10 + 0.048 0 Y-J016SUS 5 6.5 12 10 ML2B Rod End Cap T-bracket C J G5-S Flat type/CJ-CF CV MM Double clevis style cylinder A 7 TH 4-TC MVGQ C0.5 + 0.2 0 TU D D 0.1 0.3 TN 12 C0.5 N CC W L TX TV TK RB Round type/CJ-CR MM TDH10 A J TY TT C0.5 DTW RR L N -X Material: Stainless steel 304 W Part no.

CJ5-S

CE2 + 0.048 0 Y-J010SUS 3.3 3.2 8 10 + 0.048 0 Y-J016SUS 5 6.5 12 10 ML2B Rod End Cap T-bracket C J G5-S Flat type/CJ-CF CV MM Double clevis style cylinder A 7 TH 4-TC MVGQ C0.5 + 0.2 0 TU D D 0.1 0.3 TN 12 C0.5 N CC W L TX TV TK RB Round type/CJ-CR MM TDH10 A J TY TT C0.5 DTW RR L N -X Material: Stainless steel 304 W Part no.

MXS Series Air Slide Table

watch maker's screwdriver with a grip diameter of 5 to 6mm.

Air Fittings Fitting Series For Special Environment

Male elbow: KRL Inch e l b a c i l p p A . D .

VHK

/2(A): Male thread 1(P): Male thread/2(A): Male thread 1(P): Male thread/2(A): One-touch Applicable tube O.D.

CJP

Use a dedicated hose nipple. On the panel mounting style, use the CJ5H-4 or CJ-5H-6, a dedicated hose nipple (with a fixed orifice) that is provided. If a different fitting must be used due to unavoidable circumstances, make sure to install a speed controller and use it by adjusting it to 500 mm/s or less.

CJP

Use a dedicated hose nipple. On the panel mounting style, use the CJ5H-4 or CJ-5H-6, a dedicated hose nipple (with a fixed orifice) that is provided. If a different fitting must be used due to unavoidable circumstances, make sure to install a speed controller and use it by adjusting it to 500 mm/s or less.

MU

Dimensions L, Z, and ZZ are reference dimensions for installing a double knuckle joint, which may be used as a guide.

MU

Dimensions L, Z, and ZZ are reference dimensions for installing a double knuckle joint, which may be used as a guide.