Vacuum System Peripherals: (When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)
92 89 56 70 FF 38 24.5 F 6H9( ) depth 6 +0.030 0 31 6 x M6 x 1 thread depth 10 N 1 x F 2 +0.030 0 6H9 ( ) depth 6 55.5 2 x M8 x 1.25 thread depth 15 40.5 M 0.5 58.5 62 Z ZZ G H (NN 1) x H 16 34 16 34 A B 11 12 6.6 12 38 2 7 A B NN x M8 x 1.25 thread depth 16 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 GA HA Section AA Section BB (mm) Model ZZ 133.5 133.5 133.5 143.5 156.5 197.5 238.5
(Applicable to single vane type only) Rotation starts from the horizontal line (90 down from the top to the right side). o n i t a r t Body (B) End of rotation a o n R g e (mm) Size Rotation range (mm) 50 Size Q M N Body (A) 63 50 Rc 1/8 21 18 (90) 45 , 90 , 135 +8 0 +8 0 +6 0 Q N 80 63 Rc 1/8 27 25 A port B port 100 80 Rc 1/4 29 30 Key position (Start of rotation) 100 Rc 1/4 38 38 M Start
(Applicable to single vane type only) Rotation starts from the horizontal line (90 down from the top to the right side). o n ti a r t a o n R g e End of rotation Body (B) (mm) Rotation range Size (mm) 50 Size N M Q Body (A) (90) 63 50 18 21 Rc 1/8 45 , 90 , 135 +8 0 +8 0 +6 0 A port B port Q N 80 63 25 27 Rc 1/8 Key position 100 80 30 29 Rc 1/4 (Start of rotation) 100 38 38 Rc 1/4 M Start
(Applicable to single vane type only) Rotation starts from the horizontal line (90 down from the top to the right side). o n ti a r t a o n R g e End of rotation Body (B) (mm) Rotation range Size (mm) 50 Size N M Q Body (A) (90) 63 50 18 21 Rc 1/8 45 , 90 , 135 +8 0 +8 0 +6 0 A port B port Q N 80 63 25 27 Rc 1/8 Key position 100 80 30 29 Rc 1/4 (Start of rotation) 100 38 38 Rc 1/4 M Start
(Applicable to single vane type only) Rotation starts from the horizontal line (90 down from the top to the right side). o n ti a r t a o n R g e End of rotation Body (B) (mm) Rotation range Size (mm) 50 Size N M Q Body (A) (90) 63 50 18 21 Rc 1/8 45 , 90 , 135 +8 0 +8 0 +6 0 A port B port Q N 80 63 25 27 Rc 1/8 Key position 100 80 30 29 Rc 1/4 (Start of rotation) 100 38 38 Rc 1/4 M Start
' view RE A B Breathing hole REC A-A' view CX CY MQQ M RHC Manual button MK(2) RS Q G RS H A RZQ MI W S Non-lube type Long stroke type CEP1 CE1 Component Parts CE2 Note Material Material No.
If a cover is rotated when installing a cylinder or screwing a fitting into the port, it is likely to damage the junction part with cover.
Note 3) When a load is applied directly to the body, the loaded weight should be no greater than the allowable load weights on page 8-15-38.
Note 2) Weight without sub-plate 2-7-37 Base Mounted 38 38 Series VQZ1000/2000/3000 Construction: VQZ1000/2000/3000 Metal seal type Rubber seal type r e w q r e w q 2 position single 2 position single (A) 4 (B) 2 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 5 (R1) 1 (P) 3 (R2) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local
(1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.
Cushion ring Brass Replacement parts: Water resistant scraper (Part No.8) Note) Note) The scraper is held into the Rod cover with a light press fit. The scraper can be carefully pried out, and replaced with a press fit using a manual arbor press.
port) (External pilot style) 2.5 1 57.1(GZ, GS: 57.8) [58.8] 55.5 [62] 43.1 36.5 25.5 10.5 P R 17 6.5 21.5 36.2 A A A A X X 20.5 38 2-5.5 (Mounting holes) (Lead wire length) 4-Rc (PT)1/8 (P/R port) G: 300 H: 600 (Pitch) 15.5 Manual override L3 P=16 7.5 4.5 Depress and turn to operate and lock override.
3 Hexagon socket head taper plug Slide Bearing Felt Holder Ball bushing 16 20 25 32 40 50 63 80 100 MGP50-A-PS MGP63-A-PS MGP80-A-PS MGP100-A-PS MGP16-A-PS MGP20-A-PS MGP25-A-PS MGP32-A-PS MGP40-A-PS Set of nos. above @3, @4, @5 @6, @7, @8 Set of nos. above @3, @4, @5 @6, @7, @8 !4 !5 !6 !7 Except 16 Except 16 Seal kit includes @3 to @8.
For installation and removal, use an appropriate pair of pliers (tool for installing a type C snap ring). 2. Even if a proper plier (tool for installing type C snap ring) is used, it is likely to inflict damage to a human body or peripheral equipment, as a snap ring may be flown out of the tip of a plier (tool for installing a type C snap ring).
Note 2) Contact P/A if a stroke greater than the maximum stroke is desired.
a 2 port solenoid valve is connected to the right: When 2 air catch sensors are connected or when a 2 port solenoid valve is connected to the left: Joint bracket ISA-3-A Lead wire with connector (Individual wiring type) ISA-8-A ISA-8-B Bracket ISA-4-A DIN rail mounting bracket ISA-9-A Straight, 5 m A pair consists 1 set.
wiring/Supply port right) IN Spacer Seal for additional station End plate L End plate R Y200-A ISA-7-B ISA-6-B ISA-7-A When a 2 port solenoid valve is connected to the right: ISA-6-A When 2 air catch sensors are connected or when a 2 port solenoid valve is connected to the left: Bracket ISA-4-A Straight, 5 m A pair consists 1 set.
A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5