TABLE OF CONTENTS

A Three Way Valve or a Two Way Normally Open Valve is operating at a high cycle rate (greater than 200 C.P.M.) 4. A Three Way Valve or a Two Way Normally Open Valve is operating at a long duty cycle (such as On Time=1 hour, Off Time = 10 minutes) 5.

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

15 20 A A L1 L2 4 Manual override + + + + 10 10 3.2 63.3 [65.5] 15.3 32 111.5 [115.9] 17 7.5 (4.4) 12.5 1 98.6[103] 16 A A A A A A R P R P 31.2 31.5 64.1 [66.3] 36.5 B B B B B B 65.3 17 50.5 70.3 2-4.5 (For mounting) + + + + + + Triangle mark 1/8 (P, R port) (Pitch) P = 12.5 18.5 1/8 (P, R port) (Station n) (Station 1) (Light/surge voltage suppressor) Applicable connector: 26 pins MIL type

MY1

MY1HT50/63 R L L R L R L R L R Slide table operating direction 8-11-9 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8-11-10 11 Basic Type Series MY1B MX MTS MY 10, 16, 20, 25, 32, 40, 50, 63, 80, 100 CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

VFR

1, Metal joint q, w, Gasket A e, Guard !3 !1 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 Non plug-in type (For 10) (3) Plug-in type With terminal block (3) For 01T 01T1 AXT625-3A-20 End plate (D side) assembly End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

B 15 20 A A L1 L2 4 Manual override + + + + 10 10 3.2 63.3 [65.5] 15.3 32 111.5 [115.9] 17 7.5 (4.4) 12.5 1 98.6[103] 16 A A A A A A R P R P 31.2 31.5 64.1 [66.3] 36.5 B B B B B B 65.3 17 50.5 70.3 2-4.5 (For mounting) + + + + + + Triangle mark 1/8 (P, R port) (Pitch) P = 12.5 18.5 1/8 (P, R port) (Station n) (Station 1) (Light/Surge voltage suppressor) Applicable connector: 26 pins MIL type

VM

(mm) M5 M5 4 4 Port size R Port size R 1 8 1 8 6 6 1 4 1 4 8 8 3 8 3 8 10 10 1 2 1 2 12 12 Flame Resistant Type (UL-94 Standard V-0 equivalent) 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): Male thread 2(A) 2(A) Port size R Applicable tubing O.D. (mm) 1 8 1 4 3 8 1 2 1(P) 4 6 8 10 12 1(P) Applicable tubing O.D.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

auto switch A 62.2 72.2 75 85 88 98 Bore size (mm) Without auto switch With auto switch A 53 63 64.5 74.5 76 86 Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Dimensions except A, L and L1 are the same as rod side flange style.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

H : About 600 (Lead wire length) 4 5 91.7(GZ:93.1) [95.1] 19.5 1.5 78.8(GZ:80.2) [82.2] 17 33 5 R P 53.9(GZ:54.6) [55.6] 52.9(GZ:53.6) [54.6] 7 10 A P R A A A A 14 11 10 29 32 R B B B B B R 6-M5 0.8 (P, R port) 23.5 (Mounting holes) 2n-M3 0.5 (A, B port) (Pitch) P=10.5 9 Manual override L2 3.5 L1 (Non-locking) Manual override 42 [48.5] 29.6 23 13.5 [ ] for AC L type plug connector (L) M type

VFS

Symbol 02 03 A, B P D Nil D side mounting None 01T, 10 1 4 Rc Rc Rc M Mixed 3 8 1 2 U 01C, 01F U side mounting Stations Symbol Porting specifications (A, B) 02 Passage 2 stations Symbol R1, R2 P 10 10 stations 1 Side 2 Bottom Common Common Base type 01T, 10: 2-10 stations Base type 01C, 01F: 2-8 stations Option Please indicate manifold base type, corresponding valve, and option parts.

CJ2

Material: Iron CD(cd) 3.3 5 MM M4 x 0.7 M5 x 0.8 NA 5.5 5.5 NB 22.5 27.5 R 5 8 U 8 10 GB 18 23 H 20 20 KA 4.2 5.2 CX 3.2 6.5 A 15 15 BA 12 18.3 BB 12 18.3 CA 14 20 CB 14 20 Bore size (mm) 10 16 Dimensions by Stroke Applicable bore (mm) Part no.

ZP3

to 16 w q ZP3 B N 10 9 Model A B C q Pad dia.

SZ3000

13.3 24 SV 36.7 16.2 17 34 SZ 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

Stability of suction position,

65.6 25 5 5 M5 x 0.8/ Effective thread depth 5 21 38.6 63.6 25 5 5 M10 x 1 M10 x 1 M10 x 1 Seal washer Seal washer A A A A A A Seal washer 31 40 31 34.5 7 38 32.5 10 5 35 32 23.3 6 Width across flats 6 44 40 29.4 6 54 50 37 6 Width across flats 6 Width across flats 6 A-A A-A A-A 22 22 22 19 19 19 34.6 61.1 86.1 25 9.5 9.5 9.5 Weights [g] Weights [g] Weights [g] Pad material Model N/U/CL S

LEC-OM07605CN

(2) (10.2) 50 [ms] 40 30 T8 T9 20 T7 10 T6 T5 0 0 1000 2000 3000 4000 5000 6000 [r/min] LE-T10.3.2 [] LE-T5LE-T6LE-T730 LE-T8LE-T910 6 10. 10.4 a 1 10 8 5 10 7 1 10 7 5 10 6 a: [ms] 1 10 6 5 10 5 b: SSCNET 1 10 5 5 10 4 1 10 4 b 5 10 3 1 10 3 4 7 10 20 40 70 100 200 [mm] 10.5 2500kVA1mAC240V()LECSS2T5LECSS2-T9AC200V (A0-P) (L1L2L3) (L11L21) LECSS2-T5LECSS2-T7 LECSS2-T8

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Air Cylinder NCA1 Series

R O D T H R E A D S T D. R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult P/A Customer Service for larger sizes.

Tamper Proof and Flat Head Screw

M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32UNF NPT1/8 NPT1/4 NPT3/8 NPT1/2 01 02 03 04 U10/32 N01 N02 N03 N04 SMC Pneumatics, Inc. 5 Series ASIII1F-T Dimensions (mm) 1in=25.4mm L5 D3 Elbow type H (width across flats) Applicable tubing O.D. d A L4 D1 L3 M1 D2 T L1 L2 Metric sizes Inch sizes d T H D1 D2 D3 L1 L2 L3 L4 L5 A M1 Model A D1 Model T H D2 D3 L1 L2 L3

•

_8_ (mm) , A , 8 ' .. ---.t! R at type Flat with rib , I Mqde~ . > Il. 9, Y .C Rat type (mm) y . H :M6)$1 . ..Ii:M8'Xl . i ,8 0 MOOsl M E F I . , 1 .F!a, >C I E F I G. r '.e G lit"'" lb.