Nil F N T Rc G NPT NPTF 2. Install the orifice facing in the opposite direction (external pilot). Install it carefully to prevent damage to the O-ring.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

Process Pump Series PA3000/5000/PAX1000 Series PB1000

3 PA3000 Body size Connection port size 03 04 06 3 5 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 3/8 standard 1/2 standard Liquid contact body material Thread type 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Nil T F N Rc NPTF G NPT Diaphragm material 1 PTFE T, F, N are order made specifications.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

3 PA3000 Body size Connection port size 03 04 06 3 5 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 3/8 standard 1/2 standard Liquid contact body material Thread type 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Nil T F N Rc NPTF G NPT Diaphragm material 1 PTFE T, F, N are order made specifications.

5 Port Solenoid Valve Series SV

Total stroke time t Example Go to the chart for the bore size cylinder you are using (). To find the stroke time (t), follow arrow from your stroke length ("L") to the solid line representing the load ratio (d%) for the application then up to the stroke time (t).

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Compact Cylinder with Air Cushion

YA-03 Joint. YU-03 Joint part no. RS M W V T2 Applicable mounting bracket Bore size (mm) Weight (g) Joint 2D through 2O counter bore T1 B E J A type mounting bracket B type mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Carbon steel (nickel plated) mm 80 YU-08 YA-08 YB-08 90 100 YU-10 YA-10 YB-10 160 Bore size (mm) Part no.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Nil Rc N NPT T NPTF F G Dusttight/Low Jetproof Type (IP65) DIN terminal is available with dusttight/low jetproof (IP65) type. How to order valves (Applicable to VQZ200/300 rubber seal with the exception of the external pilot type) VQZ335 5YZB 03 W IP65 compliant No (Standard) Nil Note) Compliant W Note) The pilot exhaust of the IP65 valves is common with main valve exhaust.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Thread (Cylinder ports and P/R ports) Rc(PT) N NPT T NPTF F G(PF) Dust Tight/Jet Proof (IP65) Optional IP65 model is available on valves with DIN connector electrical entry. How to Order Valve (Applicable to VQZ200/300 rubber style) VQZ335 5YZB 03 W IP65 rated No (Standard) (1) IP65 rated W Note 1) The pilot exhaust of the IP65 valves is common with main valve exhaust.

7ND9071en

ND 7 1 03 H X T / I02 1. PRODUCT GROUP 6. APPROVALS FOR HAZARDOUS AREAS INMETRO certifications (pending): Ex d IIC T4/T5/T6 Gb Ex tb IIIC T100 C Db IP66 Temperature range: T4: -40 to +85 C; T5: < +75 C; T6: < +60 C. Not applicable to 3. sign "1" M20 x 1.5 conduit entry. ND Digital Valve Controller 2.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

RQ

YA-03 Joint. YU-03 Joint Part No.

Compact Cylinder with Air Cushion Series RQ

Applicable mounting bracket Bore size (mm) Joint 55 6 18 56 YA-03 32, 40 A type mounting bracket B type mounting bracket 100 8 22 67 YA-05 50 YA-03 YB-03 32, 40 YU-03 YA-05 YB-05 50 YU-05 B type mounting bracket Allowable eccentricity mm Bore size 32 40 50 1 Eccentricity tolerance 0.5 Backlash Joints are not included with A type and B type mounting brackets.

Shock Absorbers and Rate Controls

A B D T tr T ) t( l(l WT wt (lrlodell Donpir! (anilonl Pflt20tt -1, -2, -3 5.525.t2 N/A (lf)l/a.12 Ut{F 1T l . t 3 l.?0 3.11 .21 /A N/A t.12. .63 Prnt 25tI -2, -3 5.525.72N/A (lFllYB-12 UllF .38 t.l3 l.?0 3.41 N/A N/A 1.25 ,oJ Pfl22otf -1, -2, .3 8.14 8.34 rya(rr)r r4-l? utllF .38 l,13 l.?0 i.03 L I /A r{/ALl2 .tti, Pm225tI t, -2, -3 8 . 1 4 8.34N/A llF) lYo-12 UNt .38 l.t 3 t.?

Electric Actuators

ENT 198 Series LC1 Options T-nuts and T-brackets for Mounting Be sure to use when mounting the controller. Note) The controller unit includes either T-nuts or T-brackets.

Vacuum

t-qt l_-!el!

Vacuum

t-qt l_-!el!

Speed Controller with

Dimensions, flow rate characteristics and options are the same as standard product (brass needle guide). 8 AS-FG Series Construction w e r t w e r t q o !0 !1 i y u q o !0 !1 i y Component Parts No.

VXA21/22

Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

r p g n i t a r e p o . x a M ) 7 . 0 ( 0 0 1 g i s p * e g n a r g n i t a r e p o l a i t n e r e f f i d e r u s s e r P ) a P M ( ) 6 . 0 ~ 1 . 0 ( 0 9 ~ 5 1 e g n a r . p m e t g n i t a r e p O F 0 4 1 ~ 0 4 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T l w o B e t a n o b r a c y l o P T L A N k n a T d e e F o t u A 5 T L A N 1 * S 1 5 T L A