RSQ

) H + Stroke A + 2 stroke B + Stroke CEP1 CE1 RSQB Bore size: 32, 40, 50 32 40 50 2 Stroke F Q 2-P CE2 Z J ML2B I C J G5-S D T W E CV U 4-N through 8-O counterbore MVGQ 20 (22) 10 (11) V CC H + Stroke A + 2 stroke B + Stroke M 0.2 E RB Built-in One-touch fittings (20 to 50) Tubing O.D.

Rotary Actuator/Vane Type

K,T* J* K* XA51 XA52 Change of short shaft length K* K* K* K* K* K* K* K* XA52 XA53 Change of double shaft length K* K* K* K* K* K* XA53 XA55 Change of short shaft length J* J* J* J* J* J* XA55 XA57 Change of double shaft length J* J* J* J* J* J* XA57 XA58 Reversed shaft, Change of double shaft length J* J* J* J* J* J* J* CRB2 CRB2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MSZ CRQ2X MSQX MRQ

AC Servo Motor Driver

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

•

M "6 Deep Iype/ ZPT40D only Deep type/ ZPT25D only Width across flats J /I '-..1 ' :J:,I "... M6XO.75 , Width across flats 12 '-..11 . M14xl Width across r' i ., flats 19 " , " MRXI.25 " / , ~l 0 "-' Width across fiats 12 ;::; UJ 0 &. I>A 0>6 Flat type Ftat w~h rib (mm) FI t Iype ' Ratw rib (mm) Model "A"8 C D i e F G l:M5xO.B I: ~ Y 'A Y "6 F C D e G Model Flat lat lh.rib . H J H J .

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

K K K J K, T K K XA51 K K J J J K K J J J K K K J J J J XA52 MSZ XA53 J J J J J J J XA55 CRQ2X MSQX J XA57 J Reversed shaft, Change of double shaft length A combination of up to two XAs are available.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

7.5 8 66 188 55 25 92 214 50 43 112 11 10 9 73 207 60 28 99 233 1/4 stroke 63 47 116 11 12 10 80 216 65 30 106 242 80 57 127 11 16 13 90 243 80 32 116 269 100 66 137 12 20 16 100 263 100 35 123 286 1/5 stroke 125 77 137 12 20 16 100 267 100 35 123 290 160 94 155 12 24 20 108 297 120 38 131 320 94 Series CHA Dimensions Rear flange type: CHAG V T 2-Rc P 4-J 4-FD Cushion adjustment screw Width

ISO Standard Hydraulic Cylinder

CD E F GA GB H M J LH LT LX LY P PJ S SS C K B D G MA A MM 40 25 to 800 52 90 M6 x 1 25.5 51.5 7.5 M16 x 1.5 11 16 12 58 107 34 33 70 3/8 58 40 12 19 47 8 22 22 19 50 65 103 M8 x 1 32 64.5 9 M20 x 1.5 25 to 800 11 16 12 58 108 50 42 15 34 59 11 83 3/8 65 24 28 28 25 63 77 115 M8 x 1 38 76.5 9 M27 x 2 25 to 800 11 50 19 31 18 74 12 95 1/2 66 115 68 58 13 36 30 32 36 80 M10 x 1.25 25 to 800

MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

RHC

D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5

MGP

(Plug) PA+stroke S G FA FB C+stroke B+stroke A+stroke E MGPM, MGPL/Common Dimensions Standard stroke (mm) Bore (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q GC 59.5 37.5 12 12 16 16 10 10 12 12 48 54 64 78 12.5 12.5 112 120 148 162 24 27 32 39 M8 X 1.25 20 20 22 22 M8 X 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 16 16 20 20 9 M6 M6 M8 24 27 32 39 11 11 14 14 30 30 40 50 34

SMC

11 5.5 B A 3.2 6.5 7 7 12 1 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6

smcmaintenancepartslist

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

CM2

0.4 J 0.65 J 1.2 J JIS Symbol Double acting, Single rod CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB Standard Stroke Maximum stroke (mm) Standard stroke (mm) Note) Bore size (mm) MB1 20 1000 CA2 25 1500 25, 50, 75, 100, 125, 150 200, 250, 300 32 CS1 2000

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 5 6 6 8 11 11 13 16 M4 x 0.7 depth 7 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 114 119 121 139 162 162 196 196 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 77 77 79 87 102 102 122 122 26 31 38 47 58 72 89 110 11 11 11 12 13 13 12 12 12 13 14 14 20 20 11 11 11 12 13 13

MNB

96.5 104.5 120.5 111.2 119.5 134.5 123.5 150 169 157 170 189 177 J H 47 51 58 58 72 72 S 154 161 183 197 245 265 T 34 39.5 47 55.5 61.5 69.5 V 6.5 8 9 8.5 10.5 10.5 VA 13 16.5 20 23 33 37.5 W 6.5 9 10.5 12 14 15 X 22 24 27 27 30 32 Y 9 11 11 14 14 16 ZZ 248 263 299 313 389 409 P Q 37 41.5 47.5 55 61 68 LD 7 9 9 12 12 14 LH 30 33 40 48 55 65 LS 198 209 237 251 305 329 LT 3.2 3.2 3.2 3.6 4.5

0.4

VVQ1000-J-1-A VVQ1000-J-1-B Ejector valve model Nozzle diameter (mm) 0.7 1.0 Max. suction flow rate N (NL/min) 11 20 Note 1) SUP and EXH ports on the ejector unit manifold base are arranged on D-side alone. The end plate on the U-side is the same as that used in the L kit. Note 2) Individual piping is provided for the supply and exhaust ports of the ejector unit.

Table of Contents

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 When this signal is OFF, an alarm is being generated for the actuator/controller.

Electric Actuator/Slider Type

Note 11) Only when motor option With lock is selected. Note 12) For an actuator with lock, add the power consumption for the lock.

10

4.5 5 5 5.5 6.5 D-P4DW 4 4 4 4.5 4 4.5 4.5 D-A9l/A9lV 7 7.5 8.5 9.5 9.5 10.5 12 D-Z7l/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-A5l/A6l 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-A3l/A44 9 9 10 11 11 11 10 * The switch mounting bolt is supplied with the switch.

TABLE OF CONTENTS

H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.