Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

R R R P A A A A A 63.6 60 P 42 B B B B B 6-Rc(PT)1/4 (P, R port) Manual override L2 10 Depress and turn to operate and lock override.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

(mm) 4 6 8 10 12 (1) AS221FE-01 AS231FE-01 20, 25, 32 R 1/8 AS221FE-02 AS231FE-02 20, 25, 32, 40 R 1/4 AS321FE-03 AS331FE-03 40, 50, 63 R 3/8 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Series AV is a soft start up valve for low-speed air supply to gradually raise initial pressure in an air system and for quick exhaust by cutting off air supply.

4-channel Flow Monitor ( compatible)

) 0x1F88 (8072) 1 R Rated range lower limit N S16 2 R Rated range upper limit N S16 3 R Measurable range lower limit N S16 0x1F9A (8090) 0x1F9B (8091) 0x1F9C (8092) 0x1F9D (8093) 4 R Measurable range upper limit N S16 5 R Settable range lower limit N S16 6 R Settable range upper limit N S16 1: "R" means Read and "W" means Write.

VCA

Note 2) O-ring e is included with manifold valve r. 17-2-18 13 Series VCA Direct Operated 2 Port Solenoid Valve For Air Manifold Option Parts Blanking plate assembly (VCA20) VVCA20 4A This is used when a blanking plate is mounted on a manifold as preparation for a planned valve installation.

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

-fl Seies

j , , r l / r r r r ) l . *'ll-r:lt-Br, . l , *'ll I tl!s!",,+r i lr .2 +' I P'6u63! .h ,-,\-15r r | ,3'41. ,."'"*1t ':li-", r I l,*,-Jl i LL_-!!!" j6 r-, l!-:r" l ,..F!3a r-, ,..F!3a r-l 3.do.s {l-^:!l.3i? Lr 3'',"*1fl:!!J1?r-, tL-!.Q!Ls r+r i coM 5 l+l (rld,\ ) , gr1f-.!9!"Bsr I l l c o M . I r + ) i (L.-,{+) i ,.-jq35' ) ,**'il-ffi:l;t I F * 5 | | --:a I ,r.t!!-asl |r,Ftn-i '**tb#";1.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

j , , r l / r r r r ) l . *'ll-r:lt-Br, . l , *'ll I tl!s!",,+r i lr .2 +' I P'6u63! .h ,-,\-15r r | ,3'41. ,."'"*1t ':li-", r I l,*,-Jl i LL_-!!!" j6 r-, l!-:r" l ,..F!3a r-, ,..F!3a r-l 3.do.s {l-^:!l.3i? Lr 3'',"*1fl:!!J1?r-, tL-!.Q!Ls r+r i coM 5 l+l (rld,\ ) , gr1f-.!9!"Bsr I l l c o M . I r + ) i (L.-,{+) i ,.-jq35' ) ,**'il-ffi:l;t I F * 5 | | --:a I ,r.t!!-asl |r,Ftn-i '**tb#";1.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Control type 04 06 4 6 Port size 0 1 Meter-out Meter-in M3 M5 01 02 M3 x 0.5 M5 x 0.8 R 1/8 R 1/4 With One-touch fitting Fixed orifice Applicable model AS121F-M3-04 AS121F-M5-04 AS121F-M5-06 AS221F-01-04 AS221F-01-06 AS221F-02-06 Symbol Fixed orifice 1 2 3 4 5 6 7 8 9 10 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 The graph below shows the relationship between orifices for each cylinder bore

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

4.5 60 (73) P = 56 60 (73) R 4.5 Manual override 18 13 13 B A B 14 12 P = 56 A PA B 18 A B 14 12 A PA B L1 L2 A B L1 L2 14 12 A PA B A B 14 SMC A PA B A B A PA 40 (53) L-side R-side L-side R-side (2n-1/8) D-side D-side 14 34 103 2 103 174.5 (Single) 4n-3/8, 1/2 2, 4 port 94 62 59 17 174.5 (Single) 216.5 (Double) 216.5 (Double) 221.5 216.5 (3 position) 221.5 216.5 (3 position) Bottom ported

Air Cylinder

: CBM2C Bore size Stroke A -H -R -W N L Double clevis: CBM2D Bore size Stroke A -H -R -W N L ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 CBM2U Bore size Stroke A Rod trunnion: * -H -R -W N L CBM2T Bore size Stroke A Head trunnion: * -H -R -W N L ZZ + Stroke Z + Stroke * The bracket is shipped together.

VCA

D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R

Tie-rod Type Hydraulic Cylinder

MA a CHM A MA a Cushion adjustment screw Air release R (max.)

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

A Rear flange: CBM2G Bore size Stroke -H -R -W N L A -H -R -W N L Front flange: CBM2F Bore size Stroke A Double clevis: CBM2D CBM2D Bore size Stroke -H -R -W N L -H -R -W N L Single clevis: CBM2C Bore size Stroke A A Front trunnion: CBM2U Bore size Stroke A Rear trunnion: CBM2T Bore size Stroke -H -R -W N L -H -R -W N L A (mm) Axial foot Rear flange Bore size (mm) Z LS ZZ Double lock 152

Hand Valve Series VH 1

(134) M8 x 1.25 M8 x 1.25 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc 1/4, 3/8, 1/2 4-Rc 3/4 VH42-06 (Bottom ported) VH42-02 to 04 (Bottom ported) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-11 6 Series VH Dimensions: Body Mounted VH600-06/10 2 (A) 4 (B) 32 1 (P) 132 152 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

CLA

1 ,l1I~1 f AI U, , L~ f-~, ~' 45' 'C'C' '111 i'-"-l :2< ~ "'" _Ie P. eE, MM R, U, eND"IO NX l P . ~z l . A A, L, no. (min) bontala A, eE, L, MM R, U, eNOHlO NX No. (mm) 1-04 40 69 22 24 55 M14X1.5 15.5 2Q 12-g D70 .. -8!.

Hand Valve Series VH

4 (B) 25 25 25 4 (B) 1 (P) 3 (R) 1 (P) 62 74 49 62 2 (A) 4-5.5 4-6.6 49 62 125 134 94 97 92 73 106 1 (P) 88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-Rc1/4 13.5 4-Rc1/4, 3/8 VH32l-02 to 03 (Bottom piping) 2 (A) 44 3 (R) 1 (P) 4-Rc1/4, 3/8 4 (B) 3.6-9 Hand Valve Series VH Body Mounted/Dimensions VH40l-02 to 04 VH40l-06 4 (B) 2 (A) 4 (B) 2 (A) 25 25 1 (P) 3 (R) SlA 1 (P) 3 (R) l102 102 88 89

Modular Type Air Filter Series AF

Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Note 2) Intermediate strokes are available as a special order. Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.