AZ1000

gauge (Connections: 1/4 inch face seal male) 0 Code Material PCTFE (Standard) Vespel 3) PTFE 4) 5) No code Q No code VS TF V3 L 1 H 2 4 10 40 -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28

SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

0 0 0.1 0.2 0.4 0.5 0.3 0.1 0.2 0.3 0.2 0.4 0.6 0.8 1.0 1.2 MHW Operating time (s/90) Operating time (s/90) Operating time (s/90) MHY2-16D MHW2-25D MRHQ 3.0 20 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 2.5 Misc. 15 2.0 D10 1.5 201.0 5 0.5 0 0 0.1 0.2 0.4 0.5 0.3 0.2 0.4 0.5 0.3 Operating time (s/90) Operating time (s/90) MHY2-20D MHW2-32D 6 50 Moment of inertia (x 10

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

0 0 0.1 0.2 0.4 0.5 0.3 0.1 0.2 0.3 0.2 0.4 0.6 0.8 1.0 1.2 MHW Operating time (s/90) Operating time (s/90) Operating time (s/90) MHY2-16D MHW2-25D MRHQ 3.0 20 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 2.5 Misc. 15 2.0 D10 1.5 201.0 5 0.5 0 0 0.1 0.2 0.4 0.5 0.3 0.2 0.4 0.5 0.3 Operating time (s/90) Operating time (s/90) MHY2-20D MHW2-32D 6 50 Moment of inertia (x 10

AC Servo Motor Driver (SSCNET Type)

Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection *3 PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06 7 7 Machine resonance suppression filter 1 PB13 4500 4500 Notch shape selection 1 PB14 0 0 LEFB25 LEFB25U LEFB32 LEFB32U LEFB40 LEFB40U Lead symbol S Series Lead 54 Parameter *1,*2 Para.

Compact Manifold Regulator

S H H L L 11.5 8 3 5 L2 dimension DIN rail part no.

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

46.5 ZPR16F-0-B5 ZPR25F-0-B5 16 18 M5 x 0.8 25 28 ZPR25F-0-B8 M8 x 1.25 Dimensions by tube diameter (mm) ZPR32F-0-B5 M5 x 0.8 Q: 4 Q: 6 13 16 29.8 47 32 35 Pad diameter (mm) ZPR32F-0-B8 M8 x 1.25 R 20.6 R S 12.8 S Dimensions by tube diameter 10 to 16 (mm) 10.4 21.6 Q: 6 Q: 8 Pad diameter (mm) R 24.3 R S 15.2 S 20 to 32 12.8 26.2 ZPR 40/50 F-0-B8 (Without Buffer/Female Thread) S Width across

energy saving effect

L Required facility water system 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s Model Heat radiation [kW] Facility water specifications HRSH100-Wl-l Approx. 20 Refer to "Facility water system" in the specifications on pages 167 and 169. 0.05 s HRSH150-Wl-l Approx. 27 HRSH200-Wl-l Approx. 34 HRSH250-Wl-l Approx. 40 0.02 s 0.01 s 100 135 200 300

Gun Type Ionizer

0.5 s 1 s 1.5 s 2 s 2.5 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 3) Supply pressure: 0.2 MPa Flow rate consumption: 188 L/min (ANR) 4) Supply pressure: 0.3 MPa Flow rate consumption: 253 L/min (ANR) 200 200 150 150 2.5 s 2 s 100 100 50 50 0.5 s 1 s 1.5 s 2 s 0.5 s 1 s 1.5 s 50 50

Slider Type/Ball Bushing Bearing

) = 4/100 With shock absorber = 1/100 W : Load mass [kg] V : Collision speed [mm/s] Va : Average speed [mm/s] Me3 Guide central axis Me1 We We DA L 0 L -X Since there are 2 guides, the guides central axis and the cylinders central axis are the same.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

VX21 0 1 2 3 VX021N-12A Table (2) Solenoid Valve Option VX22 0 2 3 4 VX23 0 2 3 4 Option symbol S Q Coil insulation type VX022N-12A Seal material Body material Brass Stainless steel VX22 0 5 6 VX23 0 5 6 VX023N-12A-L H PTFE Solenoid coil: AC, Class H only Dimensions page 22 (Single unit) 12 13 Series VX21/22/23 For Steam /Manifold Solenoid Valve for Manifold/Valve Specifications N.C.

2/3 Port Valve

Screw-in (6A to 50A) Flange (32F to 50F) 4.2-35 VND How to Order Body option Standard (BC6) Stainless steel body S Only screw-in style VND 15A Air Oparated 2 D S 0 Option With indicator With bracket None B L BL With bracket, indicator Only valve size 1, 2, 3, 4 Port size Valve style Valve size Symbol Symbol Portsize Rc(PT) Symbol Orifice size (mm) 0 2 4 N.C. N.O.

Microspeed Cylinder

0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Rear supply pressure MPa Rear supply pressure MPa Achieves stable low speed operation even at 0.5mm/s (1mm/s for 16 or smaller) Operates smoothly with minimal stick-slip CJ2XB10-60 CQSXB20-20D Average speed 0.85mm/s Average speed 0.88mm/s 2.0 Average speed 0.43mm/s Average speed 0.43mm/s 2.0 Speed waveform Speed mm/s Displacement

Compact manifold regulator ARM5 Series

X 5.5 L3=50+R+V L4=50+T+X 50 SMC H H L L S S O O U U C C P P K K R 8 S U 57 (at knob locked) DIN rail part no.

I/O Configurator (NFC version)

Number of registered slave Setting range EX600-WEN# : 0/15/31/63/127 pcs. EX600-WPN# : 0/15/31 pcs. Set the data update time of the analogue output unit connected to the wireless slave. Setting range: 0.1/0.2/0.5/1/2/5/10/30/60 s (Initial value 1 s) : The analogue input update time can also be set for every wireless slave unit. Refer to "(A) Slave unit setting" (page 38).

I/O Configurator (NFC version)

Number of registered slave Setting range EX600-WEN# : 0/15/31/63/127 pcs. EX600-WPN# : 0/15/31 pcs. Set the data update time of the analogue output unit connected to the wireless slave. Setting range: 0.1/0.2/0.5/1/2/5/10/30/60 s (Initial value 1 s) : The analogue input update time can also be set for every wireless slave unit. Refer to "(A) Slave unit setting" (page 38).

CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 + 0.036 0 8 8 + 0.4 + 0.1 41 + 0.4 + 0.1 48 + 0.5 + 0.1 48 + 0.5 + 0.1 56 (29.3) (33.1) (40.4) (49.2) 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 10 10 10 10 10 10 10 10 20 25 32 40 + 0.036 0 + 0.036 0 + 0.043 0 + 0.043 0 25 30 35 40 5.5 5.5 6.6 6.6 36 43 50 58 20 25 32 40 10 10 + 0.043 0 12 12 + 0.043

I/O Configurator (NFC version)

Remote units Setting range EX600-WEN# : 0/15/31/63/127 pcs. EX600-WPN# : 0/15/31 pcs. Set the data update time of the analogue output unit connected to the Wireless Remote. Setting range: 0.1/0.2/0.5/1/2/5/10/30/60 s (Initial value 1 s) : The analogue input update time can also be set for every Wireless Remote unit. Refer to "Remote setting" (page 38).

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.