Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Support bracket: None, Auto Switches: Without auto switch

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Support bracket: None, Auto Switches: Without auto switch

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Support bracket: None, Auto Switches: Without auto switch

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.08 to 1.0, Specification: Built-in magnet, Support bracket: None, Auto Switches: Without auto switch

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Support bracket: None, Auto Switches: Without auto switch

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Support bracket: None, Auto Switches: Without auto switch

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Support bracket: None, Auto Switches: Without auto switch

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

A 4 B 2 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc1/8 (external pilot port) With connector on D side (FD) 12 Base Mounted

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

wire length L0: 600 mm L1: 1500 mm U side 3.5 163 L2: 3000 mm 44 62 73 Station number 9 9 2-Rc 1/8 (External pilot port) Electrical entry on U side (LU) 15 12 X n Manual override 2 B 4 A 8 2 B 4 A B A B A B A B A B A A A 7 SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A Indicator light 2 B 4 A 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 50.5 P = 25 P = 25 2 B 4 A 1 44 12 X Stations

AC

2401 P3 JIS B 2401 P22 JIS B 2401 P5 131545 JIS B 2401 P5 131647 JIS B 2401 P5 131647 JIS B 2401 P5 JIS B 2401 G50 JIS B 2401 P6 JIS B 2401 G55 131336 JIS B 2401 P14 1.5-34 AR1000 to 6060 Dimensions AR1000 to 5060 Panel mounting hole AR1000 to 3060: Max. 3.5t AR4060/5060: Max. 5t AR6060 Model Port size A B C D M N P E F G H J K L Bracket mounting dimensions 25 40 53 53 70 75 90 95 11 15 25

VQC

SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).

Air Cylinder Series CM2

A B B B A B A B A B A B A 20 25 32 40 6.5 5.5 10.5 9.5 1 0 6 4 3 0.5 0 6 5 2.5 1.5 7 6.5 5.5 10.5 9.5 1 0 6 4 3 0.5 0 6 5 2.5 1.5 7 7.5 6.5 11.5 10.5 2 1 7 5 4 1.5 0.5 7 6 3.5 2.5 8 13.5 11.5 17.5 15.5 7 6 12 10 9 6.5 5.5 12 11 8.5 7.5 13 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Intrinsically Safe Valve

4/25/3 (A/BEA/EB) Valve model (P, EA, EB) 4, 2 (A, B) 1, 5, 3 4position dual 3 port Cv b C [dm3/ (sbar)] Cv b C [dm3/ (sbar)] N.C.

2/3 Port Valve

Class B H B Class H DIN connector or DC not available.

Magnetically Coupled Rodless Cylinder

B 4 x Counterbore depth.

A

D I M E N S I O N S S E R I E S (N)VHS S H U TO F F VA LV E S Y M B O L S Model Port Size Exh. Port A B C D E F Lockable Unit. Color may not be available as shown.

VZ3000

2(B) port M5 x 0.8, C4, C6 Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2 (B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1/8 1/8 1/8 M5 x 0.8 C4 C6 0.46 0.62 0.79 0.39 0.33 0.36 0.12 0.16 0.21 0.75 0.83 0.91 0.32 0.27 0.36 0.19 0.20 0.24 Body ported For internal pilot Type VV5Z3-20 VZ32 Note) Value at manifold

VZ5000

B) port 1 8 , C6, C8 1 8 Port size Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0 2.1 2.3 2.1 2.1 0.57 0.37