• IA8X 1 y ZPR400 40 43 29 42.5 G H G I H 15 79.5 10 ,p mm Applicable tube ZPR25D 25 28 20 35 48~ 636 25 89.5 .6 AppHcabfe'l\Jbe O.D Q R ~S Appllcabfe tube (mm) I 24.3 16.8 6 12.8 A:PPlicab~ )iJ~ 0.0 ;P Q R _ .SI 8 . 2$.,2,; 18.7 . 15.2 . 8 ;' 4 23.3 15.8 1 0.4 .6 6 24.3 '16.8 12.8 I ~8 8 26.2 18.7 15.2 18 Vacuum Entry HorizC?"
Q Note) CE-compliant Note) DIN terminal D only for 100 VDC XLS 25 5 G Without control power supply XLS 25 P 1 G With control power supply High vacuum angle valve (Bellows pressure balance, 2-stage voltage switching type) Valve size Electrical entry G Grommet 16 25 KF16 KF25 Voltage 1 2 5 100 VAC 200 VAC 24 VDC Control power supply P With control power supply Note) There are no CE-compliant
) (23) 28 (26) 30 (25) (16) 28 (26) 30 (25) (23) 30 (29) 32 (27) (25) 30 (28) 32 (26) (20) ZPT40 30 (29) 32 (27) (25) 32 (30) 34 (29) (27) P . 13-11-65 to 13-11-68 ZPT50 ( ): Figures for female thread connections Model Applicable pad form Connection/Thread dia.
VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.
3/8 3/8 1/2 1/2 15 18 25 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 84 90 98 116 126 94 100 108 126 136 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5 31.5 M12 x 1.75 M26 x 1.5 35.5 Double Clevis Style: CA2DQ 2-P (Rc, NPT, G) 4-J Shaft diameter: CDd9 Hole diameter: CDH10 MM Width across flats KA G G D E Width across flats B1
= 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner D side mounting
28.5 32.5 25 27.5 31 35 60 62.5 66 70 69.5 72 75.5 79.5 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C
Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3
CLS CLQ Bore (mm) Z Y ZZ M8 x 1.25 PH P PG PL S PW X 21 N NA LZ MM NN K LH LC LD LS LX LT 55 1/8 1/8 1/8 1/4 M20 x 1.5 196 8 20 38 127 20 22 19.5 3.2 40 167 6.8 24 15 4 25 5 20 MLGP M26 x 1.5 M10 x 1.25 210 8 25 20 41 137 24 27 24 55 3.2 40 177 6.8 30 15 4 28 5.5 25 M26 x 1.5 M10 x 1.25 212 8 25 20 41 139 24 27 24 55 3.2 40 179 6.8 34.5 15 4 28 5.5 32 RLQ M32 x 2 M14 x 1.5 250 10 27 23 41
R P A Energized closed (N.O.) R P A Common (C.O.)
For a 15 orifice (VXD242/Port size 1/2), P 0.16 MPa, for a 20 orifice (VXD252), P 0.055 MPa, for a 25 orifice (VXD262), P 0.032 MPa 1,000 Port size 2 50 Cv = 49 VX2 Port size 1 1/2 40 Cv = 31 500 400 Port size 1 1/4 35 Cv = 23 Port size 1 25 Cv = 12.5 VXK 300 Port size 3/4 20 Cv = 9.5 VXD VXD 200 VXZ Flow rate Q [L/min] Port size 1/2 15 Cv = 5.5 100 VXS Port size 3/8 15 Cv = 4.5 VXB 50
2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.
5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72
P. 14-2-24 Piping adapter M5 x 0.8 1/8, 1/4, 3/8, 1/2 P. 14-2-24 T-interface Redirects the air flow. Pressure switch with piping adapter Compact switch and piping adapter integrated into one piece. P. 14-2-25 1/8, 1/4, 3/8, 1/2, 3/4 Check valve P. 14-2-26 1/8, 1/4, 3/8 Prevents back flow from lubricator.
R F (h9) E (g6) Model A Q B C D G K L M N P Y 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S M3 X 0.5 with depth 5 M5 X 0.8 M5 X 0.8 M3 X 0.5 M3 X 0.5 9 12 14 16 4 5 6 8 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 24 29 36 43 18.5 18.5 25 25 M3 X 0.5 with depth 5 M4 X 0.7 with depth 7 M5 X 0.8 M5 X 0.8 M5 X 0.8 with
CLS CLQ Bore (mm) Z Y ZZ M8 x 1.25 PH P PG PL S PW X 21 N NA LZ MM NN K LH LC LD LS LX LT 55 1/8 1/8 1/8 1/4 M20 x 1.5 196 8 20 38 127 20 22 19.5 3.2 40 167 6.8 24 15 4 25 5 20 MLGP M26 x 1.5 M10 x 1.25 210 8 25 20 41 137 24 27 24 55 3.2 40 177 6.8 30 15 4 28 5.5 25 M26 x 1.5 M10 x 1.25 212 8 25 20 41 139 24 27 24 55 3.2 40 179 6.8 34.5 15 4 28 5.5 32 RLQ M32 x 2 M14 x 1.5 250 10 27 23 41
C10 3(R) port 2-C12 3(R) port DIN rail clamp screw 0 76.5 1 10 (12) 60 49.5 30 25 C10 1(P) port 13.5 25 (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting Formulas: L1 = 16n + 57, L2 = 16n + 102 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 73 118 137.5 148 2 89 134 150 160.5 3 105 150 175 185.5 4 121 166 187.5 198
Lead wire length* (m) Load voltage Auto switch model Electrical entry Indicator Wiring (Output) 3 (L) 5 (Z) Applicable load Special function Style 0.5 () (N) AC DC P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P C76 IC circuit P P P P P p p p P p p p p p p p P P P P P P P P 3 wire (Equiv. to NPN) 5V Yes C73 100V 12V Relay PLC C80 IC circuit No 100V