XL

P.4 to P.7 XLAV (With solenoid valve) Particulate free completely cleaned Bellows Seal 105 to 10-6 10-10 10-11 2 XLC Double acting P.8 to P.11 XLCV (With solenoid valve) Manual Electromagnetic Air operated XLF Single acting (N.C.)

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

) 258-9200-www.stevenengineering.com E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA

Rotary Cylinder Series MRQ Size: 32, 40 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F1 = x A1 x P (1) F2 = x A2 x P (2) A1 = D2 (3) 4 A2 = (D2 d2) (4) 4 F1 = Cylinder force generated on the extending side (N) F2 = Cylinder force generated on the retracting side (N) = Load rate A1 = Piston area

5 Port Air Operated Valve Series VFA3000 1

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Mounting hole) (P , A, B port) 2-3 (Breathing port) (R1, R2 port) 3 4 5 3 position closed center/exhaust center/pressure center: VFA3 30-01 02-X1 (P , A, B port) (Mounting hole for manifold) (Mounting hole) (Pilot port) (Breathing port) (R1, R2 port) 5-3-12 5 4/5 Port Air Operated Valve Series VFA3000 Dimensions

Modular F.R.L. Unit

mist separator regulator Optional specifications Accessory Symbol Combination AWM20 B C D E G P 2 1 6 8 C J R Z W N AWM30 to 40 Accessory/Optional specifications B C D E G P 1 2 6 8 C J N R W Z With bracket (with set nut) Float type auto drain (N.C.)

PF2D

H H ON PS NO OFF P-1 P-2 Flow rate measuring unit confirmation Real-time flow rate Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com OUT1 Output mode This function allows to confirm the accumulated flow rate Hysteresis mode when real-time flow rate is selected

VCA

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 VX3 L VXA K 2-M Thread depth 6 2-M Thread depth 6 K VN LVC LVA LVH DIN terminal: D Conduit terminal: T LVD F F (Q) Q S 34 LVQ D LQ LVN U 25 R C 44 TI/ TIL C R G1/2 PA E E G1/2 PAX B B 2-P Port size A A D 2-P Port

Modular F.R.L. Unit

Printed in Japan. 1st printing March, 2003 D-DN P-120 (DN) This catalog is printed on recycled paper with concern for the global environment.

Series AK1000

Refer to gauge guide (P.94,95).

Power Valve: Economy Valve Series VEX5

Basic type Select type Model VEX5504 06 10 VEX57-10 12 VEX59-14 20 P1 P1 VEX VEX Description Bracket (With bolt and washer) G46-10-01 VEX7-32A VEX5-32A VEX9-32A Air operated External pilot solenoid valve 3(R) 3(R) Pressure gauge 1(P) 3(R) 3(R) 1(P) P2 P2 P3 P1 P1 3(R) 3(R) 3(R) 3(R) 1(P) 1(P) P2 P2 Note) With this valve, the port 3(R) is a supply port and port 1(P) is an exhaust port. 2441

MNB

, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Intermediate strokes are available, too.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Consult P/A.

VT307

with VT301 for mounting) VV307-01-3--F P = 26 (Applicable cable O.D.)

VCS

P: PTFE F: FKM For VCS30 OR-2380-130P P: PTFE F: FKM For VCS40 OR-2600-180P P: PTFE F: FKM Manifold For VCS20 e OR-1400-178P P: PTFE F: FKM OR-2670-178P r P: PTFE F: FKM Wave washer For VCS30, 40 When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

MLGC

Note) $1, %4 will not be required for the one without rear plate. 9-4-6 7 Fine Lock Cylinder with Guide Series MLGC Dimensions Basic style: With rear plate MLGCB--R4-F through Counterbore G Back side 4-H 2-O through Rear plate P Head side cylinder port BP Unlocking port Unlocked when pressurized CL CL1 P Rod side cylinder port MLGC W U A' CNG MNB Courtesy of Steven Engineering, Inc.-230

C76

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Replaceable Rod Seal Strong, Corrosion-proof Barrel Rod seal can be quickly replaced, greatly extending the cylinder life.

MGC

MGCL 350, 400, 450, 500, 600, 50 700, 800, 900, 1000 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact P/A if the maximum stroke will be exceeded.

VT317

(Blanking plate) 02 2 stations Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Symbol 20 20 stations Passage Porting specifications A Side R P Common Common 3 Side Individual Common Max. 20 Symbol 1 Common exhaust Manifold Specifications VV317-02-051-02 Manifold

VVXA21/22

LVN Port P TI/ TIL Port P Port P PA Port A PAX Port A Port A PB Normally open (N. O.) Port P Port P Port P Model Manifold base model Individual port Rc VVXA211-stations Common port Rc Port A 1 8 1 4 3 8 1 8 1 4 VVXA212-stations VVXA221-stations VVXA222-stations Manifold Manifold Stations B mount 2 to 10 stations 17-3-97 2 The VX series will be revised shortly.