Vacuum

Determine the mean suction flow: Q r = v x 6 o T1 9 9 0 . s : s : : P o o . g u o.z T 2 = 3 1 o 1 mean suction flow required from ejector (N/min), 0.1 0.2 0.3 0.5 0.7 1 2 3 | 5 7 10 20 30 50 70 100 O T1 i(sec) o1 adsorption response time to 63% to P, (sec), T1 adsorption response time to 95% of P" (sec), T2 1 l lncnnic System Specif ication (continued) 2.

Vacuum

Determine the mean suction flow: Q r = v x 6 o T1 9 9 0 . s : s : : P o o . g u o.z T 2 = 3 1 o 1 mean suction flow required from ejector (N/min), 0.1 0.2 0.3 0.5 0.7 1 2 3 | 5 7 10 20 30 50 70 100 O T1 i(sec) o1 adsorption response time to 63% to P, (sec), T1 adsorption response time to 95% of P" (sec), T2 1 l lncnnica System Specif ication (continued) 2.

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

High Vacuum Angle Valve

For 100/120C 1 XL Series High Vacuum Angle Valve Aluminum High Vacuum Angle Valve XL-2 Series New Variations Type Series Valve type Shaft seal type Application Flange size 16 25 40 50 63 80 100 160 XLA-2 Single acting (N.C.) Bellows seal Dust free, P.3 cleaned Single acting (N.C.)

•

Center trunnion: CS2WT z+ 1 '2 stroke Width across ilats KA 2, P G -! P IRe ,NPT , G) ...,.,l\ With rod boot Width across flats KA , I J I ~ G M ~1<;lL, 1~ '-~ {~ ~~j I" OJ > -~ I ~ ~ rI< I AL ~ ~ " I 0 c ~ c .s.!! ~ H S + Stroke Ji.'.

Bag Filter

Applicable for strong alkali-based cleaning fluid Suitable for filtering cutting fluids P.57 P.57 P.58 (For coarse filtration) (For coarse filtration) Leg Material: Stainless Steel X47 P.58 54 FGF Series Made to Order Please consult with SMC for details.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

center (A) 4 (B) 2 SX q t r w 5 (R) 3 (R) 1 (P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R) 3 (R) 1 (P) 3 position pressure center u (A) 4 (B) 2 3 (R) 1 (P) 5 (R) (This figure shows a closed center type.) 5 (R) 3 (R) 1 (P) Component Parts Replacement Parts Note Zinc die-casted Part no.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) -X Selection Graph (6) to (8) (Horizontal mounting) 20Data Graph (6) l: 100 mm or less Graph (7) l: 101 to 200 mm Graph (8) l: 201 to 300 mm 300 100 200 100 100 Load weight m (kg) Load weight m (kg) Load weight m (kg) 80 80 80 10 10 10 63 63 63 50 50 50 40 1 1 1 25 20 25 20 40 32 40 32 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

Uniaxial Electric Actuator Series LJ1

P.22~27 LJ1H202SCLC1-1B2M LJ1S20 Series. P.28~33 LJ1H202PFK LJ1S30 Series. P.34~39 LJ1H202NFK Option Specifications. P.40, 41 LC1-1B2V LJ1H202PAK Motor Reference Data, Nonstandard Motors . P.42~46 Order Made Specifications. P.47 LJ1H202NAK LJ1H303PDLC1-1B3H Dedicated Controller LC1 Series .P.49 LJ1H303NDTypical Equipment Configurations . P.50, 51 LJ1H303SELC1-1B3M LC1 Series.

Electric Actuators

to 100 LXSHABC LXSHABD LXSHABC-B LXSHABD-B to 50 to 100 292 304 to 50 to 100 Features 4 Line-up of Products Line-up of Products Single Axis Electric Actuator Series LJ1 Series LJ1 LJ1H/High Rigidity Guide LJ1S/Slider Guide P. 1 P. 87 Horizontal mount specification Horizontal mount specification Vertical mount specification Dust Seal Specification TSUBAKI CABLEVEYOR Specification Clean Room

Best Pneumatics Vol. 14

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Attachment Specifications P. 14-2-24 IR Accessory P. 14-2-29 VEX Made to Order Specifications P. 14-2-31 AMR ITV IC VBA VE VY1 G PPA AL Soft Start-up Valve: AV2000/3000/4000/5000 P. 14-3-1 Lube Unit: AU P. 14-3-11 Large Flow Air Filter: AF800/900 P. 14-3-13 14-2-1 2 F.R.L.

Basic Type/Direct Mount Type

size determination F3 D 1.6 x P WB Inclined operation W + WB WV P PV W + WB WV P PV Determination of allowable load mass & pressure (Refer to page 1466 for vertical operation.)

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) 50 Main

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

16 16 0.2 0.05 0.1 0.2 0.1 0.05 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

5 Port Solenoid Valve Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the P/A

Power Valve: Economy Valve Series VEX5

Port size port 3(R) port 1(P), 2(A) Body size Rated voltage (Only with solenoid) 04 06 10 10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz 1 2 3 (Ex.)

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

V

Recommendable Air Flow ln/min Model Port Size NZFA100-T01 18 50 NZFA200-T02 14 200 Cup D I M E N S I O N S A P P L I C AT I O N T O VA C U U M P U M P S Y S T E M H O W T O O R D E R (N)ZFA A I R S U C T I O N F I LT E R (N)ZFA A C C E S S O R I E S TYPE N None L With Bracket -Left R With Bracket -Right 100 500Nl/Min 200 200Nl/Min P O R T S I Z E P O R T T H R E A D 01 1/8 02 1/4 Nil PT*

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

JIS symbol 5 Port 4 Port Fluid Specifications Air 22~100 (0.15~0.7) 15~100 (0.1~0.7) 22~100 (0.15~0.7) 2 Position single 2 Position single 2 Position single 2 Position double 3 Position 2 Position single 2 Position double 3 Position A B A B Operating pressure range PSI (MPa) P R R P R Operating pressure to 100 (Operating pressure to 0.7) 15~100 (0.1 to 0.7) 22~100 (0.15 to 0.7) Max.140 Not