Rotary Table/

Positioning pinhole Counter-clockwise 5 Adjustment bolt A 5 (For counter-clockwise rotation end adjustment) 9 22 e B port g .5 n Adjustment bolt B ra (For clockwise rotation end adjustment) nt e e m is st w u k dj c lo a 0 -c e d C 19 s n i er a w lo A port B port e k dj c c nt o l Clockwise C k n e u u w o st ng o is ti C m e ta ra ro e ro ta nt ti o on n ra e d n n ti g e ta 5 9 ro m u

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

A External pilot type R (2) B C A Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-40.

Non-contact Gripper

C P.C.D. C H 4 x M depth ML 4 x M depth ML P depth PL Air supply port 16.5 16.5 H D D XT661-8C-X321 XT661-10C-X321 P depth PL Air supply port P depth PL Air supply port 45 45 45 45 P.C.D. C P.C.D. C H H 4 x M depth ML 4 x M depth ML 16.5 16.5 D D XT661-120E-X322 XT661-150E-X322 45 P depth PL Air supply port 45 P depth PL Air supply port 45 45 P.C.D. C P.C.D.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

SMC Pneumatic Clean Series

Line A IDG5 Fitting: Oil-free one-touch fitting Piping: Urethane tuing Oil-free: Wetted parts oil-free AME AMF Oil-free regulator Oil-free solenoid valve SUP Oil-free needle valve Line A Line B Example of clean air equipment Line B Line C Fittings: Clean one-touch fittings Piping : Polyolefine tubing Clean: Oil-free, Assembled in clean room Line C Clean precision regulator Stainless steel

SYJ300/500/700

Flow Characteristics Series Flow characteristics C [dm3/(sbar)] b Cv 0.089 0.32 0.72 0.31 0.41 0.38 0.36 1.2 2.7 SYJ300 SYJ500 SYJ700 Cover (stainless steel) 4-4-1 2 3 Port Solenoid Valve Rubber Seal Series SYJ300/500/700 Series Variations Option Series Port size Sonic conductance C [dm3/(sbar)] Manual override Type of actuation Voltage Electrical entry With light/surge voltage suppressor

Lubrication Equipment

Mounting orientation is Upper direction Model Port size Rc(PT) 63 63 80 85 90 100 B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 1/4 141 164.5 170 180 230 251 15 15 15 20 22 22 3/8 1/4, 1/2 3/8, 3/4 3/4, Bracket dimensions Model Port size B C D E A 1 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 1 1 2 4, 1 2, 1 175 250 175 250 87.5 125 460 613 135 209 4, 3 ALD600

Sine Rodless Cylinder Series REA

, 300, 350, 400, 450, 500, 600, 700, 800 25 4000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 32 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 40 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 6000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 Note1) Contact P/A in case of a stroke length beyond the maximum.

240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

3 Port Air Operated Valve Series SYJA300

N.O. 0.4 0.3 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure (MPa) Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Effective area (mm2) Pilot port size Type of actuation Port size SYJA312-M3 SYJA322-M3 SYJA314-M5 0.41 0.18 0.086 0.35 0.33 0.086 Body ported N.C. N.O. N.C.

Compact and Lightweight

ZA A B t 2 x D ZX C ZM ZL ZH ZH ZH ZH -X267 ZH13 to 20DA 2 x D B ZHP A F E C ZU VQD-V Long clamping screw set for 1 station required for assembly needs to be ordered separately.

Sine Rodless Cylinder Series REBR Direct Mount Type

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

Electric Actuators

Two mounting styles Table traveling accuracy C D Bottom mount Top mount Model Traveling accuracy C side against A side D side against B side LG1H 0.1 or less 0.1 or less A B Variations Mounting orientation Lead screw type Motor type Guide type Motor/Screw connection Series Standard motor [Tamagawa Seiki Co., Ltd.]

CXWM/CXWL

A B C D E F A B C D E F G H Pressure port Pressure port Right Left Left Right Left Right Right Left Left Right Right Left Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Turn the manual override counterclockwise by 180 to set the E mark to "0", then it will be reset. 200V AC 220V AC Red Red 200V AC 220V AC Indicator light With light and surge voltage suppressor Circuit for DC Circuit for AC Light A () A (+) SOL SOL C (+) C ZNR Light () Due to the use of non-polar light, the VQZ series has no polarity.

PFMB.eng

Connect the fluid flow in the correct direction. [ 250] 250 L/min (PFMB7501) [ P_1] Set value of OUT1 Panel mounting (Only PFMB7201) Refer to the diagram and table below for mounting details. Refer to the dimension from SMC website (URL http://www.smcworld.com) for panel thickness and panel mount cut-out dimensions.

Series AP3100

(P.1088) 1) Maximum operating pressure 2400 psig (16.5 MPa) for connection size 3/4 inch. 2) -10 to 90 C for Polyimide seat. 3) Figure of 1/2 inch connection. 4) Tested with Helium gas inlet pressure 500 psig (3.5 MPa). 5) Weight, including individual boxed weight, may vary depending on connections or options.

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.