SMC Corporation of America
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VVQ2000-3A-1 y U-side end plate assembly no.

SOL.A 3A () (+) Station 3 SOL.B 3B () (+) SOL.A 4A () (+) Station 4 SOL.B 4B () (+) SOL.A 5A () (+) 2.

0 @6 q i r 2a 3a @0 @3 !5 @7 !7 o u y @5 t @8 !2 !3 !8 @2 !9 With switch rail Component Parts No. Description Note Material No.

How to Order VV3Z3 40R 05 2 01 X port R port Stations P/R port Thread type P port A port side 2 stations 02 P port Nil Rc G NPT NPTF M5 01 M5 x 0.8 1/8 A port F N T 20 stations 20 R port Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port. 40R-1 Applicable solenoid valve VZ314RVZ324RApplicable blanking plate assembly DXT200-8-3A

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SOL.B 1B () (+) 1 station 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL.A 2A () (+) VQZ SOL.B 2B () (+) 2 stations 1.

ZS-10-5A-50 1 pc. 3A 36 VJ10 6 Misc. Lead wire length Nil 6 10 15 20 25 30 0.3 m (Standard) 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Vacuum Pump System/Recommended Model (The models below will have faster delivery.) Combination Supply valve (Pilot valve) N.C. (VJ114) N.C. (VJ114) N.O.

VQ4 Type D side End Plate Ass'y U side End Plate Ass'y Kit Common exhaust type VVQ0-3A-4-P VVQ0-2A-4-R F, P, S Kit VQZ Built in silencer, direct exhaust VVQ0-3A-4-P VVQ0-2A-4-S Common exhaust type VVQ0-3A-4-P VVQ0-2A-4-R VQD C Kit Built in silencer, direct exhaust VVQ0-3A-4-S VVQ0-2A-4-S VZS U Side End Plate Assembly VFS u VVQ0-2A-4VS Option S: Built-in silencer

(With gasket, screw) VEX4-5-3A (With gasket, screw) Note) When the VVEX2 series is used with 5 stations or more, or the VVEX4 series is used with 4 stations or more, apply pressure to the port P on both ends and exhaust from the port R on both ends.

(Valve) DXT192-13-3A. 1 pc. (Blanking plate assembly) DXT192-52-1-4A. 3 pcs. (Connector assembly) DXT192-52-2-4A. 3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

Polarity SOL.A 1A () (+) VQ5 SOL.B 1B () (+) 1 station 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL.A 2A () (+) VQZ SOL.B 2B () (+) 2 stations 1.

SY3000-44-3A P.974 P.974 912 5 Port Solenoid Valve Series VQZ1000/2000/3000 Single Unit [Option] Body Ported Plug Lead Unit Made to Order (For details, refer to page 975.)

SOL.A 3A SOL.B 3B Station 3 SOL.A 4A SOL.B 4B Station 4 SOL.A 5A 10A COM 10B SOL.B 5B Station 5 SOL.A 6A SOL.B 6B Station 6 SOL.A 7A 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.B 7B Station 7 Double wiring (connected to SOL. A and SOL.

(Valve) DXT192-13-3A. 1 pc. (Blanking plate assembly) DXT192-52-1-4A. 3 pcs. (Connector assembly) DXT192-52-2-4A. 3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

4 15 (CN7) Blue 7 Blue 5 16 Black Blue 8 Black DCPS Brown 3 4 9 Brown Yellow/Green Yellow/Green Blue 10 Blue Blue Blue 7 12 Blue 9 (CN1) SPD Blue NF 11 [G8] [G6] 10 11 12 1 3 5 Blue Blue Blue Option T1 Brown 15 Black Black Blue 8 Blue 16 G1Yellow/Green G2Yellow/Green 17 Brown Blue 18 (CN1) 1/2 CB Red Brown 19 1A Circuit breaker PT1 White Blue 20 2A Circulating fluid outlet White Blue 21 3A

MSUA1-90* P402070-3A MSUA1-180* P402070-3B MSUA3-90* P402090-3A MSUA3-180* P402090-3B MSUA7-90* P402060-3A MSUA7-180* P402060-3B MSUA20-90* P402080-3A MSUA20-180* P402080-3B *None that the rotation angle should not be changed even though the rotary unit has been changed. For maintenance, order units with a part number suitable for the model being used.

It is OFF when there are no alarms.ON in alarm condition. 0F ALARM 10 to 1A CC-Link system area Only at Single numerical data instructions Remote During the normal status, this terminal is OFF, during the abnormal status (The WDT time-out of CPU is generated) this is ON. 1B station READY (No used) (No used) 1C to 1F CC-Link system area 20 to 2F 47 - 30 to 3A CC-Link system area Only

0 i @6 q r 2a 3a With switch rail !6@3 !2 @8 t o u y !8 !9 @2 @7 CY1R10H @0 !5 @4 !4 !1 !0 i @6 q @9 r 2a 3a With switch rail !9 !8 @0 @2 @7 t @3 !6 !2 y u o @5 @8 CY1R15H to 63H @0 !6 @4 !4 !1 @9 @6 !0 i q r 2a For CY1R15 For CY1R15, 20 3a !9 !8 @2 @0 @3 !5 @7 !7 o u y @5 t @8 !2 !3 With switch rail Parts list No. Description No.

M3 M3E m x g FE L2 From above, n = 1 + 2 + 3A + 3B = 0.1 + 0.082 + 0.35 + 0.28 = 0.812.