JA/JAH/JB/JS

MPa JA20-8-100 JA25-10-150 JA32-10-100 JA40-12-125 JA40-12-150 JA40-12-175 JA50-16-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 8 10 10 12 12 12 16 16 20 24 27 27 33 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 30.5 34 34 38 38 38 44.5 44.5 57.5 68

44

71 68 122 d KS KX 21 17 21 44.8 39.4 7.6 18 M M L2 KM 21 17 21 48.1 41.7 8.5 19 L1 27 22 27 52.3 45.9 9.3 25 KF M Union Elbow: KFG2L H/DL L/LL Applicable tubing size (mm) O.D.

Series KV2 Fittings

25.40 30.00 30.00 30.00 21.7 21.7 19.2 22.2 22.7 21.7 26.0 30.7 33.2 28.7 26.2 34.2 32.7 29.7 38.6 37.9 47.5 50.5 52.5 17.6 17.6 13.4 18.1 16.9 15.6 17.8 26.6 27.4 22.6 18.1 28.4 26.6 21.6 32.5 29.8 41.4 42.4 43.9 16 16 16 17 17 17 17 21 21 21 21 22 22 22 25 25 33 33 33 1.6 1.6 1.6 3.5 3.5 3.5 3.5 5.4 5.4 5.4 5.4 8.5 8.5 8.5 9.8 9.8 12.8 12.8 12.8 8 9 14 8 14 24 54 23 27 25 42 40 40 41 68

Lightweight and Compact

Compact tank 18 L [mm] Temperature followability control reduced the tank capacity required as a buffer. 970 68 Circulating Fluid Temperature Controller Thermo-chiller Standard Type HRS090 Series With heating function Temperature increase with heating capacity (Ambient temperature 32C/50 Hz) 40 Circulating fluid temperature [C] Heating method using discharged heat makes a heater unnecessary

energy saving effect

No need to replace the seal Maintenance hours reduced Compact, Space-saving Outdoor installation, Splashproof type (IPX4) Low-noise design 68 dB Operating noise Max.

Slider Type Ball Screw Drive/11-LEFS Series

) 8 20 31 Motor cable (2 x 5) LER 68 53.8 12.9 8 Vacuum port Rc1/8 M4 x 0.7 thread depth 8 (F.G. terminal) LEH Motor option: With lock LEY -X5 Cable length 250 (214) 65 15 11LEFS 11LEFS 20 20 11LEJS Lock cable (3.3) 20 Motor cable (2 x 5) 25A( ) 6H9 depth 6 +0.030 0 n x 6.6 7 LEC 76 LEC S 150 15 LEC SS-T D x 150 (= E) 60 B LEC Y Note 1) When mounting the actuator using the body mounting

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Weight (g) LEC S LEC SS-T D-M9P(V) D-M9B(V) D-M9N(V) Auto switch model 0.5 m (Nil) 8 7 LEC Y 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 Motorless 5 m (Z) 68 63 LAT Dimensions LZ (mm) D-M9 D-M9V LC3F2 M2.5 x 4 L M2.5 x 4 L Indicator light Slotted set screw Slotted set screw 8 Indicator light 2 3.2 4.6 2.6 4 2.8 2.7 2.7 20 2.8 4 22 3.2 2.6 9.5 Most sensitive position 6 4 6 Most sensitive

Compact manifold regulator ARM5 Series

IN/OUT Piping Position SRF Metric size Inch size Symbol Pressure gauge Note) Configuration ITV 4 6 4 4 6 6 4 6 Straight Elbow Straight Elbow OUT side Straight Elbow Straight Elbow OUT side IN side IN side Mounting position Mounting position Fitting type Fitting type IC 5/32 1/4 5/32 5/32 1/4 1/4 5/32 1/4 Nil Symbol Symbol None 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69 70 75 76 77

I/O Configurator (NFC version)

Initialize 68 -1No.EX-OMV0017-C 5. Pairing of wireless unit 70 5.1. Pairing procedure of wireless unit 70 5.2. Registration of dummy Remote 75 6. Wireless system configuration example 76 6.1. Flow chart for using the wireless system (Refer to Step 2) 76 6.2. System Construction Example 77 6.3.

EXxx-OMU0020CN

(M12 ) . 66 11. . 67 11.1. . 67 12. . 68 12.1. EX245-SPN1 . 68 12.2. EX245-DX1 . 70 12.3.

EXxx-OMY0006CN

DIP . 65 2 No.EX##-OMY0006CN 10.12. . 68 11. EX245-DX1 . 70 11.1. . 70 11.2. . 71 11.3. . 72 11.4. . 72 11.5. LED . 73 11.6. . 74 12. EX245-DY1 . 75 12.1. . 75 12.2. . 76 12.3. . 77 12.4. . 77 12.5. LED . 78 12.6. . 79 13. . 80 13.1. . 80 13.2. Y . 81 13.3. . 82 14. . 83 14.1. EX245-FPS1/2/3 . 83 14.2. . 85 15. . 86 15.1. EX245-FPS1/2/3 . 86 15.2. EX245-DX1 . 88 15.3.

PFxx-OMO0007CN

(100 ) :050 -5No.PF-OMO0007CN * (15 / ) FG 49 N () IN IN OUT OUT () IN () -6No.PF-OMO0007CN *) 6 33 2 () () 10 m DC(-)() () -7No.PF-OMO0007CN * ( ) () CE 050 -8No.PF-OMO0007CN * ON , 10 /23 3 OFF (19 ) * OUT -9No.PF-OMO0007CN (11 ) SI L/min L (11 ) 1/8 1/4 3/8 1/2 -10No.PF-OMO0007CN N (3 m) PF2A7--28--X560 NPN(1 )+ (15 V) PF2A7--29--X560 NPN(1 )+ (420 mA) 22 PF2A7--68

LV50-OMQ0002

Check the flow characteristics data for pressure loss and the straight inlet pipe length effect on accuracy (page 68), to determine inlet piping requirements. Do not suddenly reduce the piping diameter. Piping port and the metal part of the body are grounded to DC(-)/blue line. Do not use the power supply with positive ground.

HRX-OM-Q026

Operation of only the compressor stops when these Operation of both the compressor and pump stops when these alarms are generated. 5.22 Alarm Customizing Function HRSH Series 5-68 HRX-OM-Q026 Chapter 5 Display and Setting of Various Functions Setting/Checking: Operation setting when "Circulating fluid discharge pressure sensor error" alarm is generated 38. Press the [SEL] key once.

AC Servo Motor Driver (Pulse input type/Positioning type)

Click Save. 68 - 5.10.2 To Load saved Point table From the Point table window in the setup software, select Open. Please specify location of the file. Please select the file you wish to import point table [.ptb2]. Click Open.

SFOD-OMT0005CN

47 11.2 . 47 11.3 . 48 (1) . 48 (2) () . 48 (3) . 48 11.4 . 49 11.5 . 49 12() . 50 12.1 . 50 12.2 . 51 13 . 52 13.1 . 52 13.2 No. . 52 (1) . 52 [2] . 53 [3] . 54 [4](HOLD) . 54 [5] . 55 [6] . 55 (7) . 56 13.3 . 57 14. 58 14.1 [5m ] . 58 14.2 [820m] . 58 14.3 ()[5m ] . 59 15.4 ()[820m] . 59 14.5 . 60 14.6 . 60 14.7 . 60 -2- 14.8 . 61 15 . 62 15.1 IO . 62 15.2 . 63 16/ . 68

MHZ

Coaxial tubing Branch tee: KWT04-S23 Branch Y: KWU04-S23 Coaxial tubing Marking/Finger closing side Coaxial tubing Single tubing Single tubing Single tubing Coaxial tubing Single tubing Single tubing Marking zFinger opening side 12-2-68 68 Parallel Style Air Gripper Long Stroke Type Series MHZL2 Axial Ported (with One-touch fitting) [K] (mm) Auto switch mounting groove (4 locations) (Except

240

NS 20 20 30 30 40 40 50 60 60 LT 58 58 68 68 78 78 88 98 108 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 26 Compact Slide MXH Series Dimensions: 20 LT MXH MXH 20 31 MXS MXQ 14 LA LB J x M5 x 0.8 Depth 6.5 MXQ MXF 3 x M6 x 1.0 through 2 x 2 x M5 x 0.8 Cylinder port (With plug for port) MXW Pilot hole dia 5.1 2 x 3 x 9.3 counterbore depth

,

21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68

2–4

If screws other than those specified are used, it may cause the switch to be damaged. 3 41 41 38 5 68 68 63 Auto Switch Dimensions Unit: mm Auto switch internal circuits D-M9 Mounting screw M2.5 x 4 Slotted set screw D-M9N D-M9B, N, P Common DC (+) Brown [Red] Indicator light 2.6 Switch main circuit Switch main circuit Switch main circuit OUT Black [White] 2.7 2.8 4 22 DC (-) Blue [Black]