JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

19 42 22 44 44 3/4 75 192 20 50 40 40 316 84 50 25 100 19 15 25 to 1800 Rod series Tolerances (mm) CD B series rod C series rod Bore size (mm) Bore size (mm) H9 f8 E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 55 250 0.016 0.043 +0.043 0 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 60 255 M16 x 1.5 25 22 18 7 14 55 250 0.025 0.064 0.020 0.053 +0.052 0 50

CL

27 15 5.5 34.5 15 37.5 6 7 45 32 M32 x 2 M14 x 1.5 244 232 14.5 167 12 41 24 24 29 15 7 42.5 21.5 46.5 8 7 50 40 9-2-26 25 Fine Lock Cylinder Double Acting, Single Rod Series CLG1 20, 25, 32, 40 How to Order CL Without auto switch CLG1 100 L E N 25 CL1 MLGC CDLG1 With auto switch H7BW 100 L E N 25 CNG Built-in magnet Number of auto switches MNB 2 pcs. 1 pc. n pcs.

Modular F.R.L. Unit

t t q e OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Color No.

Table of Contents

C D E F Dimensions Part no.

Air Slide Table

25 Size 16, 20, and 25 have two auto switch mounting grooves on both sides.

Modular F.R.L. Unit

F E E F B C Cross interface E: 4-Rc E A F: Without thread D Model Port size A B C D Applicable model Y14-M5 M5 23 16 14 25 AC10 Y24-01 1/8 40 40 22 40 AC20 Y24-02 1/4 Y34-01 1/8 49 43 28 48 AC25, AC30 Y34-02 1/4 Y44-02 1/4 60 48 36 54 AC40 Y44-03 3/8 Cautions in Mounting When mounting a cross interface directly on the IN side of the lubricator, be sure to use a series AKM check valve between

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69

Table of Contents

35 (15) (6) 8 1 0.2 31 Photo micro sensor wire (300mm) 5H9 +0.030 0 depth 5 10 13 1.5 [5.5] 6 Motor wire (300mm) 25 (4) 30.5 10 (39.5) E Stroke + 135 The dimension inside [ ] shows the location at which the home position switch operates.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod End Male Thread Rod end male thread Bore size (mm) 12 16 20 25 H1 L1 X C1 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 9 10 12 15 10.5 12 14 17.5 14 15.5 18.5 22.5 Rod end nut Basic Style Bore size (mm) 12 16 20 25 Stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 A B C D E F H I K L M N O Q Z 20.5 22 24 27.5 17 18.5 19.5 22.5 6 8 7 12 6 8 10 12 25 29 36 40 5 5.5 5.5 5.5 M3 x 0.5 M4 x 0.7

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order w y e r t u o !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Type of actuation E Push-turn locking lever type 1 Normally closed (N.C.) 2 Normally open (N.C.)

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 1) e ot e g 1 n N 8 a 0 4 e g r + 2 n 7 a 4 n + 0 r + o n 0 5 0 4 N 0 ti o 0 9 ot a N ti 0 e t a e ot 0 1) o g t 1 e n e o R ) a 1 0 ot R r ) N 1 n o e 4 ti 0 + a g 0 t o n 9 R ra e n g n io ra (90) (90) at n io Chamfer ot Plate Plate Plate at R ot R Plate (45) Chamfer Chamfer Note 2) Chamfer (45) B port A port B port A port B port A port

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Proposals for Energy Saving

(P .E.)

15

How to Order NZ MF 25 S LEF q e w Ball screw drive q Size w Motor mounting position e Motor type Nil In-line P (Right side/Left side) parallel 25 For LEFl25 32 For LEFl32 40 For LEFl40 Symbol Type NZ Mounting type Z NY Mounting type Y NX Mounting type X NW Mounting type W Symbol Type NV Mounting type V NU Mounting type U NT Mounting type T NM2 Mounting type M2 * Select only NZ, NY, NX or

CL

Use care that auto switch for rail mounting style is not available. 9-2-16 15 Fine Lock Cylinder Double Acting, Single Rod Series CLM2 20, 25, 32, 40 How to Order CL J L E 25 100 H CL1 CLM2 Without auto switch MLGC E J H7BW L 25 H 100 CDLM2 With auto switch CNG Number of auto switches MNB Built-in magnet Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370

CM2

CS1 C76 9 l 9 f Built-in One-touch fittings C85 h One-touch fitting port size P ZZ + Stroke C95 CP95 NCM NCA DH1 H G F CL AL D ZZ CI A CZ K N P S Z CD I B1 CX E L MM NA NN RR U Bore size (mm) 0 0.033 20 41 8 13 8 24 18 19 62 9 10 30 M8 x 1.25 M20 x 1.5 9 14 15.5 13 25 5 28 5 15 24 1/8 133 142 20 -X 0 0.033 25 45 8 13 10 30 22 19 62 9 10 30 M10 x 1.25 M26 x 1.5 9 14 19.5 17 25 6 33.5 5.5 15

CV/MVGQ

0 0.039 154 88 M32 x 2 42.5 21.5 M14 x 1.5 50 14.2 16 46.5 29.8 24 84.5 21 16 Up to 300 22 41 8 10 32 With Rod Boot h Bore (mm) B3 e f 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 20 25 32 40 68 12.5 17 81 93 106 131 25 37.5 50 75 30 36 72 12.5 85 97 110 135 25 37.5 50 75 17 32 36 72 12.5 17 85 97 110 135 25 37.5 50 75 32 36 77 12.5