Multistage Ejector Series ZL

Multistage Ejector Series ZL112/212 Energy saving, large flow rate, 3 stage diffuser construction Series ZL112/212 Suction flow rate increased 250% and air consumption reduced 20% with 3 stage diffuser construction (Versus 1.3, one stage model) 1 stage performance Maximum suction flow rate l/min (ANR) Air consumption l/min (ANR) Vacuum pressure Q1 Q2 Q3 ZL112 100 200 ZL212 63 126 Q1 Q2 Q3

7.4

187.5 187.5 200 212.5 225 237.5 250 250 L3 173 185.5 198 198 210.5 223 235.5 248 260.5 260.5 How to Order Single unit, double check block 2-position 1(P) 5(R1) 5(R1) VQ1000 FPG C4 M5 F 1(P) 3(R2) 3(R2) OUT side port size Option IN side port size Nil None D DIN rail mounting (For manifold) F With bracket N With name plate C4 4 One-touch fitting M5 M5 thread C3 3.2 One-touch fitting

Compact

71 94 118 141 165 Minimum Stroke for Auto Switch Mounting Auto Switch Proper Mounting Position Auto Switch Mounting Height Operating Range Auto Switch Mounting Groove Position Auto Switch Mounting 25 12 OUT 491 98 147 196 245 295 344 IN 378 76 113 151 189 227 264 Weight [g] Bore size [mm] Standard stroke [mm] 5 10 15 20 25 30 35 40 45 50 12 105 114 124 132 142 152 16 126 136 146 156 166 175

PA3000/5000/PAX1000

and based on the proportional relationship to these lines, the pilot air pressure for this point is approximately 0.25MPa. 40 20 1 0 2 3 4 5 6 7 Cycle (Hz) PA513 Air consumption 400 350 Air consumption l/min (ANR) SUP=0.5MPa Note 1) Even when switching cycles are changed for PA3000 with SUP=0.2MPa or PA5000 with SUP=0.2MPa or 0.3MPa, there is almost no change in the lifting height. 300 250

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

2/3 Port Valve

135 140 155 134 146 162.5 20 24 24 VNC5-32F VNC6-40F VNC7-50F 100 105 120 36 42 54 12 12 14 310.5 326 350 278 293.5 317.5 VX Port size: 65F, 80F Flange connection VN VQ Applicable flange 65 80 Model H F E D C B A 1 4 1 4 405.5 441.5 65 80 140 150 204 235 175 185 305.5 341.5 210 240 VNC81 -65F VNC91 -80F 4.2-25 VNC Construction N.C.

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Pertormance Prechion and slrengh in conliguralions to meel nost appljcations Plcision vs, Moment loading Unmatched Versatility from The leader in Pneumatics SLIDE TABLE Technology Work Table ' I cytinder , , I Conventional Syslem Linear Bearing univcEal lilourl Slide table MuHiple moLrnting opions Standard Stroke (mm) 25 30 40 50 60 75 100 sffi 125 150 '175 200 225 250 275 300 350 400 L I

ISO Standard Hydraulic Cylinder

25 to 800 77 93 M8 x 1 M27 x 2 46 33 20 19 36 36 30 58 50 31 115 30 18 32 1/2 66 29 32 13 74 80 25 to 800 96 93 M33 x 2 57 32 M10 x 1.25 20 13 45 45 41 75 60 42 133 30 17 32 1/2 74 29 41 17 80 113 +0.052 0 100 25 to 1000 115 M42 x 2 58 42 M14 x 1.5 28 16 56 56 50 90 72 38 146 40 22 39 3/4 86 34 52 19 97 Bore size (mm) V Y ZZ W SS 40 6.5 11.5 58 190 151 50 8 11.5 65 203 158 63 12 17.5 69 250

Coolant Valve

(For DZ) Manual override (Non-locking push type) E Pilot port 12(P1), 10(P2) Port size: refer to table below C K (External pilot solenoid) P1 P2 J J B (Air operated) D 4 x 2 x 18 mouting hole 32 H F A Applicable flange Port 1, 2 Pilot port 12(P1), 10(P2) A Model B C D E F H J K Note) VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40 50 292.5 (294.5) 308 (310) 332 (334) 130 150 180 210.5 226 250

MY1

Operating temperature range 5 to 60C (41 to 140F) Lock specifications Standard strokes Maximum manufacturable stroke (mm) 25 Bore size (mm) 16 20 32 40 Standard stroke (mm) Bore size (mm) One side (selectable), Both sides Lock position 50, 100, 150, 200 250, 300, 350, 400 450, 500, 550, 600 10, 16, 20 270 (60.7) 110 (24.7) 450 (101.2) 700 (157.4) Holding force (max.)

MQQ

Supply pressure 0.1 MPa 150 cm3/min or less 250 cm3/min or less 300 cm3/min or less Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Total allowable leakage Supply pressure 0.3 MPa 800 cm3/min or less 1000 cm3/min or less 1200 cm3/min or less Supply pressure 0.5 MPa

MY1

head taper plug) (Hexagon socket head taper plug) A N 20Z + Stroke Rc 1/2 (Hexagon socket head taper plug) Rc 1/2 (Port) Data (WW) (WW) XX XX Rc 1/2 (Hexagon socket head taper plug) Rc 1/2 (Port) VV VV 2-Rc 1/2 (Hexagon socket head taper plug) 2-Rc 1/2 (Hexagon socket head taper plug) MY1BG MY1BG (mm) PA PB Model A G GB H L LD LL LW MM N NN NW M NC NH PE 80 65 MY1B80 345 60 71.5 150 340 14 175

PFxx-OMJ0005CN

+) DC(-)(OUT1) (OUT2) IN -51No.PF-OMJ0005CN-I LoC (46 ) DC(+) DC(-)(OUT1) (OUT2) ( ) 30ms GND 30 ms GND -52No.PF-OMJ0005CN-I -5 (OUT1)80 mA , (OUT2)80 mA ( 1 )"Er4"1 ( 1 ) (45 ) () -53No.PF-OMJ0005CN-I PFM710 PFM725 PFM750 PFM711 N2ArCO2 (JIS B8392-1 1.1.21.6.2ISO8573-1 1.1.21.6.2) N2Ar 0.210 L/min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250

MQQ

Supply pressure 0.1 MPa 150 cm3/min or less 250 cm3/min or less 300 cm3/min or less Total allowable leakage Supply pressure 0.3 MPa 800 cm3/min or less 1000 cm3/min or less 1200 cm3/min or less Supply pressure 0.5 MPa 1500 cm3/min or less 2500 cm3/min or less 3000 cm3/min or less Note 1) Use clean, dry air with no freezing. Note 2) For lubrication, refer to precautions on page 10-5-5.

3 Port Solenoid Valve Series VQ100 1

185.5 132 143 163 187.5 198 142 153 173 200 210.5 152 163 183 212.5 223 162 173 193 212.5 223 172 183 203 225 235.5 182 193 213 237.5 248 192 203 223 250 260.5 202 213 233 262.5 273 212 223 243 262.5 273 4-12-13 14 Series VQ100 How to Order Manifold How to Order Manifold Assembly Specify the part numbers for valves and options together beneath the manifold base part number.

Magnet: None, Mounting: N (Through screw clearance hole), Bore Size: 250 (2 1/2"), Stroke: 175 (1 3/4")

Magnet: None, Mounting: N (Through screw clearance hole), Bore Size: 250 (2 1/2"), Stroke: 175 (1 3/4"), Body Option: C (Rubber Bumper)

Magnet: None, Mounting: N (Through screw clearance hole), Bore Size: 250 (2 1/2"), Stroke: 175 (1 3/4"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: None, Mounting: N (Through screw clearance hole), Bore Size: 250 (2 1/2"), Stroke: 175 (1 3/4"), Body Option: M (Male Rod End)

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Piston Note 3) speed H (High speed/ High frequency type) 5 to 3000 mm/s (Refer to page 20.) 250 cm3/min or less 300 cm3/min or less 150 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage 1000 cm3/min or less 1200 cm3/min or less 800 cm3/min or less Supply pressure 0.3 MPa 2500 cm3/min or less 3000 cm3/min or less 1500 cm3/min or less Supply pressure 0.5 MPa Note 1) Value when