Heavy Duty Stopper Cylinder

1,000 900 800 700 600 500 400 300 200 100 0 1,000 900 800 700 600 500 400 300 200 100 0 Mass of transferred object m [kg] Mass of transferred object m [kg] Upper limit 80 Operating range 80 Operating range Upper limit Lower limit Lower limit 10 20 30 40 0 10 20 30 40 0 Transfer speed [m/min] Transfer speed [m/min] 592 Model Selection RS2H Series Lateral Load and Operating Pressure The greater

RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

Air Slide Table

Deflection Stroke adjuster Allowable kinetic energy improved Allowable kinetic energy improved by reducing the weight of movable parts Speed Load weight 2.5 2 Allowable kinetic energy improved Load weight [kg] 1.5 Current model 1 0.5 0 0 200 300 400 500 600 700 800 100 Speed [mm/s] Table configuration for better function and easier maintenance Dowel pin holes positioned in the center Dowel

Thermo-chiller

Description (The gure shows the HRS-150-A-20.) q Hose (I.D.: 0.6 in [15 mm], Length: 27.5 in [700 mm]) Relief valve set pressure: 46 psi [0.32 MPa] (The relief valve starts to open when the circulating fluid discharge pressure reaches 46 psi [0.32 MPa] .)

3 Port Air Operated Valve Series SYJA300

Prefix it to the part nos. of the solenoid valve, etc. 5-4-6 3 Port Air Operated Valve Series SYJA500/700 Specifications Fluid Operating pressure range (MPa) Pilot pressure range (MPa) Note 1) Air 0.15 to 0.7 (0.4 x P + 0.1) to 0.7 P: Operating pressure range Ambient and fluid temperature (C) Lubrication Mounting orientation Impact/Vibration resistance (m/s2) Note 2) 10 to 50 (No freezing

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

, 800 1300 12-CY3R40 40 Rc1/4 NPT1/4 G1/4 12-CY3R50 12-CY3R63 50 63 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Note 1) Stroke exceeding the standard stroke but below the maximum manufacturable stroke is available as special order.

Table of Contents

Fan motor Outlet thermometer Model Selection (Flow Capacity l/min (ANR)) HAA7 HAA15 HAA22 HAA37 Model Outlet side air (COOL AIR) 50C 70C 100C 1000 1500 700 2200 4000 1500 3300 6000 2200 5700 13000 Inlet air temperature 4300 Cooling side air Cooler Conditions: Outlet temperature 40C, Ambient temperature 32C, Air pressure 0.7 MPa Drain 14-15-1 2 Series HAA How to Order Precautions 15 10 D 1

RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data Magnetically coupled rodless cylinder for transfer in clean environments. 8-17-1 2 A magnetically coupled rodless cylinder that can be used for transfer in clean environments Low particle generation: 1/20 Long stroke (Max. 700 mm) (compared

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Slide table Cylinder tube Special cylinder tube Long stroke (Max. 700 mm) A special cylinder tube using extruded aluminum material is employed.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Average speed Va mm/s 50 100 200 300 500 700 Average speed Va mm/s Collision speed V mm/s Note) Use average speed to calculate static moment.

Thermo-con/Rack Mount Type

It may be out of this range in some other operating conditions. 7 Thermo-con/Rack Mount Type Air-cooled HECR Series Cooling Capacity HECR002-A HECR-A Air-cooled Water-cooled HECR-W Model Selection Specific Product Precautions Options Optional Accessories Circulating fluid: Ethylene glycol 20% Circulating fluid: Tap water 800 800 700 700 Cooling capacity [W] Cooling capacity [W] Ambient temperature

Thermo-chiller/Rack Mount Type

For installation indoors, ventilation ports and a ventilation fan should be equipped as needed. 700 mm or more 300 mm or more Electrical Wiring Warning 1. Grounding should never be connected to a water line, gas line or lightning rod. Caution 1. Communication cable should be prepared by the customer.

HRS100/150

HED q Hose (I.D.: 15 mm, Length: 700 mm) w Outlet piping assembly (With globe valve) Relief valve set pressure: 0.32 MPa (The relief valve starts to open when the circulating fluid discharge pressure reaches 0.32 MPa.)

180

MHF Symbol Specifications/Description Heat resistance (100C) Fluororubber seal Without magnet EPDM for seals, Fluorine grease Fluorine grease MHL -X4 -X5 -X50 -X53 -X63 -X79 -X79A -X81A Refer to How to Select the Applicable Model on page 700. Refer to pages 700 and 701 for the details on effective holding force and allowable overhanging distance.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

ML1C

Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) 25 32 40 2000 2000 2000 Stroke adjustment unit symbol Refer to page 1109 for stroke adjustment unit. 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 When stroke is required, which is longer than the standard stroke, refer

CYV

temperatures, excluding gas permeation) Leakage Maximum baking temperature 150C -10 to 60C Ambient and fluid temperature Piston speed 50 to 300mm/s -2 to 0mm on each side (-4 to 0mm total) Stroke adjustment Cushion Sine cushion (Air cushion) Port size 5/16-24UNF 7/16-20UNF Vacuum grease for linear guide unit and inside the cylinder tube Lubrication Weights (kg) Standard stroke (mm) Model 700

ML1

, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to Order q (p.5.4-79) longer stroke styles.

CYP

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the