High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

100

Specific Product Precautions 22 A ZL3/ZL6 Series Exhaust Characteristics (Representative value) ZL3H ZL3M 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 0.3 0.4 0.5 400 500 450 400 350 300 250 200 150 100 50 0 0.2 0.6 Vacuum pressure Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure 350

IDUS/IDFS

condition r C = 0.90 based on condition r 2 2 Based on condition t, A and C Corrected air flow = 350 (0.75 x 1.00) = 467 l/min (ANR) 3 3 Based on condition t, B and C Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) Based on condition y; IDUS4E is selected as the model to process an air flow larger than 467 l/min (ANR) with a 50Hz power supply, according to data D-1.

Special Specifications:

C With N.O. auto-drain D With drain guide (2) 150 250 350 450 550 650 850 With N.C. auto-drain J Note 1) 850 size comes with a ball valve. Note 2) Drain piping, or piping for a stop valve, like a ball valve, is required. 850 size comes with a ball valve. substitute with (Symbol: A).

MK

MK-F020 MK-F025 MK-F032 MK-F040 MK-F050 MK-F063 Bore size (mm) 20 25 32 40 50 63 Accessory With boss in head side 2 3 5 7 13 25 With arm 100 100 200 200 350 350 13 32 Centering location ring Set pin Bolt for cylinder body Rear flange type (including mounting bolt) 133 153 166 198 345 531 Calculation: (Example) MKG20-10RFN Standard calculation: MKB20-10R 250 g 6 g 133 g 2 g 100 g 491

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping directions Maximum stroke Cushion Bore size (mm) Model Height Overall length mm mm 150 200 250 300 350 400 450 500 550 600 50 100 CX 10 15 25 15 10 25 240 350 310 For 100mm stroke cylinder Series Series 10 500 CY1F CY1H CY1F CY1H MY2H Concentrated

LMU100/200 Series Mist Spray Unit

LMV20/Without air blow circuit T0806 (8 x 6) Applicable tubing Symbol Length T0425 (4 x 2.5) Applicable tubing Air adjusting needle for mist T0604 (6 x 4) Applicable tubing Oil adjusting needle Mixing valve (LMV20-) LMV201 L 46 (24) Double pipe nozzle AIR OIL D C B 12 E A 24 9.5 2 3 57(Max.) 12.5 AIR SMC 27.5 4 10 40 23.5 OIL L Dimension (mm) 20 200 25 250 30 300 35 350 7.5 2 x 4.5 20 4

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Stations n L1 L2 3 85 65 4 104 84 5 123 103 6 142 122 7 161 141 12 256 236 8 180 160 13 275 255 9 199 179 14 294 274 10 218 198 15 313 293 11 237 217 16 332 312 17 351 331 18 370 350 19 389 369 2 stations 66 46 20 stations 408 388 552 10-SYJ7000 Manifold specifications Type 40: Bottom ported / 10-SS5YJ7-40Stations -01 [ ]: AC Approx. 300 (Lead wire length) Grommet (G) L1 L2 Air cylinder

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Station 2 78 50 Station 20 438 410 3 98 70 4 118 90 5 138 110 6 158 130 7 178 150 8 198 170 9 218 190 10 238 210 11 258 230 12 278 250 13 298 270 14 318 290 15 338 310 16 358 330 17 378 350 18 398 370 19 418 390 Station L1 L2 364 5 Port Solenoid Valve 10-SYJ7000 C6, N7 C8, N9 Type 42: Side Ported/10-SS5YJ7-42Stations [ ]: AC Grommet (G) 122 [126.4] Approx. 300 (Lead wire length) L1 Manual

Series AP3500

Replace XXX with flow rate using 3 digits, example 50 slpm = "050" Adjustable Range: AP3571= 10 to 200 slpm, AP4571= 10 to 350 slpm Model Mode Two step mode Status Code Normally closed (N.C.)

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Stainless Steel Heat

condition r C = 0.90 based on condition r 2 2 Based on condition t, A and C Corrected air flow = 350 (0.75 x 1.00) = 467 l/min (ANR) 3 Based on condition t, B and C Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) 3 Based on condition y; IDUS4E is selected as the model to process an air flow larger than 467 l/min (ANR) with a 50Hz power supply, according to data D-1.

A

Note) (N)AM AM Japanese NAM North American H O W T O O R D E R M I S T S E P A R AT O R S E R I E S (N)AM (N)AM S U B-S TA N D A R D S P E C I F I C AT I O N S B O D Y S I Z E Y Drain Guide 1/4 Internal Thread M With Drain Lock M5 Screw R IN, OUT Reverse Direction 150 1/8 Basis 250 1/4 Basis 350 3/8 Basis 450 1/2 Basis 550 3/4 Basis 650 1 Basis 850 1 1/2 Basis O P T I O N S None B Bracket

MK

350 Rear flange 133 153 166 198 345 531 Calculation method/Example MKG20-10RFN I Standard calculation: MKB20-10R 250g I Extra weight calculation: Both ends tapped 6g Rear flange 133g Rear boss mounting 2g With arm 100g 491g 4.1-5 Series MK Construction MKl12, 16 MKl20, 25 With arm (N) MKl32 Rod end width across flats (M) Rear boss mounting (F) Rear flange (G) MKl40 to 63 Component Parts

MNB

Upper limit of allowable value Solenoid valve for locking mounted on the unlocking port Maximum value of stopping position dispersion from 100 measurements Spring Lock Holding Power (Maximum Static Load) 32 40 50 63 80 100 Bore size (mm) 552 {56} 882 {90} 1370 {140} 2160 {220} 3430 {350} 5390 {550} Holding power N {kgf} 2 Series MNB Bracket Part Numbers Rod Boot 32 40 50 63 MNB-L 80 100 Bore

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

lightweight Compact design with higher allowable moment compared to MXY8/MXW8 Long stroke Long stroke MX MXY12Max. stroke 400 mm MTS Width mm Height Model Allowable moment Nm g Weight mm Width Magnetically coupled rodless cylinder Series variations MY Pitch, Yaw Roll Stroke Adjuster options Function options 30 25 MXY8-50 50 100 400 Bore size (mm) 0.7 times 610 420 13 5.7 49 47 CY 300 200 350

SYJ300/500/700

9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Station 1) (Station n) (Station 1) (Station n) (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) + + + + + + + + 54.1 [61.1] 54.1 [61.1] 38.7 38.7 25.5 25.5 A A A A (Pitch) P=17 14.5 (Pitch) P=16 14.5 M5 x 0.8 (A port) 8.5 1/8 (A port) 8.5 Station n L1 L2 L1 L2 Station 2 52 43 53 44 Station 20 340 331 359 350

VZ100/300/500

(A port) (A port) VQZ VZ VS Stations n Port size 2 52 43 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 20 340 331 L1 L2 53 44 70 61 87 78 104 95 121 112 138 129 155 146 172 163 189 180 206 197 223 214 240 231 257 248 274 265 291 282 308 299 325 316 342 333 359 350

VQZ1000/2000/3000

1 R2 3 < >: AC Formula L1 = 19n + 11, L2 = 19n + 23 n: Stations (Maximum 20 stations) Dimensions L n 2 49 61 87.5 98 3 68 80 100 110.5 4 87 99 125 135.5 5 106 118 137.5 148 6 125 137 162.5 173 7 144 156 187.5 198 8 163 175 200 210.5 9 182 194 225 235.5 10 201 213 237.5 248 11 220 232 262.5 273 12 239 251 275 285.5 13 258 270 300 310.5 14 277 289 312.5 323 15 296 308 337.5 348 16 315 327 350

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 L3 Station 2 62 53 47 Station 20 350 341 335 3 78 69 63 4 94 85 79 5 110 101 95 6 126 117 111 7 142 133 127 8 158 149 143 9 174 165 159 10 190 181 175 11 206 197 191 12 222 213 207 13 238 229 223 14 254 245 239 15 270 261 255 16 286 277 271 17 302 293 287 18 318 309 303 19 334 325 319 28 Series SYJ500 Type 40R Manifold: Bottom Ported (External Pilot Type)/SS3YJ5-40RStations