Construction: 91 (L-type Flange), Port Size: 20 (2 1/2), Pressure Indicator: 4 (Differential Pressure Indicator), Relief Valve: 0 (Relief Valve), Fluid: 0 (Petroleum), Filtration: 105μm

Construction: 91 (L-type Flange), Port Size: 24 (3), Pressure Indicator: 4 (Differential Pressure Indicator), Relief Valve: 0 (Relief Valve), Fluid: 0 (Petroleum), Filtration: 105μm

Construction: 91 (L-type Flange), Port Size: 20 (2 1/2), Pressure Indicator: 4 (Differential Pressure Indicator), Relief Valve: 0 (Relief Valve), Fluid: 0 (Petroleum), Filtration: 74μm

Construction: 91 (L-type Flange), Port Size: 20 (2 1/2), Pressure Indicator: 4 (Differential Pressure Indicator), Relief Valve: 0 (Relief Valve), Fluid: 0 (Petroleum), Filtration: 149μm, Flange: F (Companion Flange)

Construction: 91 (L-type Flange), Port Size: 20 (2 1/2), Pressure Indicator: 4 (Differential Pressure Indicator), Relief Valve: 1 (None), Fluid: 0 (Petroleum), Filtration: 105μm

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

32 14 2-M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 20 74 65 90 50 20 8-8-27

100

pressure Vacuum pressure 700 700 Suction flow rate (Branch/Port exhaust) Suction flow rate (Branch/Port exhaust) Vacuum pressure [kPa] Vacuum pressure [kPa] 600 600 Suction flow rate (Silencer exhaust) Suction flow rate (Silencer exhaust) 500 500 400 400 Air consumption 300 300 Air consumption 200 200 100 100 0 0 Supply pressure [MPa] Supply pressure [MPa] Flow Rate Characteristics (Representative

Table of Contents

500 Maximum speed (mm/s) 2.

REC

1.25 5 8 33.5 5 Up to 700 18 15.5 13 8 13 10 41 26 20 2025 M10 x 1.25 6 8 37.5 5.5 Up to 700 22 19.5 17 10 13 10 45 32 26 32 M10 x 1.25 6 8 46.5 5.5 Up to 1000 22 19.5 17 12 13 11 45 32 26 Data 40 M14 x 1.5 8 10 56.2 7 Up to 1000 24 21 22 14 16 12.5 50 41 32 20, 25 NA NN P S TD TT TX TY TZ Z ZZ N Bore (mm) Stroke range 20 30 M20 x 1.5 Up to 700 1/8 146 8 10 32 32 52 192 202 20 25 34.5 M26

PF2A/PF2W

Maximum measured Maximum measured Minimum measured Minimum measured Part no. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2 PF2A511--2 PF2A521--2 PF2A551--2 10 50 100 200 500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214

PA300/500/700

1/4, 3/8 30.7 26.1 3.5 7 1(P) 3(R) (Bottom existing hole) M5 x 0.8 through hole 77.2 5-5-17 6 Series VPA300/500/700 Dimensions A B Base mounted: VPA544(A port) Rc 1/4, 3/8 13.5 91.4 84.4 (PA port) Rc 1/8 57 47 13.5 (PA port) Rc 1/8 NO 2(A) 32 42 52 PA PA Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (

MTS

32 (47) 22 22 (37) 0 (15) 16 D-M9, D-M9V 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-A9, D-A9V 0 (15) 0 0 38 38 (53) 26 26 (41) 0 (15) 20 D-M9, D-M9V 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17) D-F9W, D-F9WV 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17) D-A9, D-A9V 0 (15) 0 0 40 40 (55) 32 32 (47) 0 (15) 25 D-M9, D-M9V 15 (17) 0 0 40 50 (57)

OMR0031

[mm] [s] 0 1 Pushing Absolute 9.00 0.50 2 500 2 Positioning Absolute 5.00 0.10 500 Controller Parallel input / output signals Flow chart (Reference) (1) Turn the SVON signal ON. (The motor is energized.) (2) Select/input Step No.1: Turn the IN0 input ON, and the "IN1"input OFF.

ZSE30A(F)/ISE30A

kPa 500 kPa 1.5 MPa Withstand pressure 0.1 kPa 0.001 MPa 0.1 kPa Minimum unit setting NPN or PNP open collector 1 output NPN or PNP open collector 2 outputs NPN or PNP open collector 1 output + Analog output (voltage or current) Output R1/8, NPT1/8 (M5 female threaded) 4, 6, 5/32, 1/4 One-touch fittings Piping 32 2-Color Display High-Precision Digital Pressure Switch ZSE30A(F)/ISE30A Series

HRX-OM-S004

Table 5.20-32 Operation setting when "Power stoppage" alarm is generated Set value Explanation Initial value (Default setting) This alarm is not detected.

ML1C

Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) 25 32 40 2000 2000 2000 Stroke adjustment unit symbol Refer to page 1109 for stroke adjustment unit. 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 When stroke is required, which is longer than the standard stroke, refer

Brake mechanism added

10 10 150.5 15 26 54 10 8 M8 x 1.25 6 11 25 to 800 25 to 650 35 50 32 80.5 27 70 46 21 52 24 20 28.5 10.5 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 25 to 800 25 to 650 35 60 32 98.5 27 85 23 64 24 20 28.5 13.5 40 10 15 17 26 67 18 11 M10 x 1.25 9 48.5 174 14 25 to 750 25 to 600 40 70 37 32 23 78 25 15.5 52 14 17 21 30 72 23 13 M12 x 1.75 11 117.5 102 55 26.5 36 189 17 25 to 750 25 to

VZ100/300/500

(Locking type is for VZ300/500 only.) Coil DC V100 Non-locking push type must be pressed in the direction of the arrow.

Speed Controller with One-touch Fitting

Weight 32 g 101 g Thread Part no. Weight Tubing O.D.

Low Profile Guide Type

/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY3B CY3R CY1F25 CY1F25 CY1F25 CY1F25 CY1S 10 10 10 10 CY1L CY1H CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 CY1F CY1F 3 3 3 3 CYP CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 D0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 -X Piston speed