Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Unit Unit part number Unit ID Configuration data size [byte] SI unit EX600-SEN3-X80 (32 outputs) 9Bh 27 EX600-DX#B (8 inputs) 01h 4 EX600-DX#C (8 inputs) 03h 4 EX600-DX#D (16 inputs) 05h 5 Digital input unit EX600-DX#E (16 inputs) 14h 5 EX600-DX#F (16 inputs) 16h 5 EX600-DX#C1 (8 inputs) 0Dh 5 EX600-DY#B (8 outputs) 08h 9 Digital output unit EX600-DY#E (16 outputs) 18h 15 EX600-DY#F (16 outputs

Slider Type Ball Screw Drive/11-LEFS Series

6 900 11-LEFS40ll-850l 1264.5 1294.5 856 1028 14 6 900 11-LEFS40ll-900l 1314.5 1344.5 906 1078 14 6 900 11-LEFS40ll-950l 1364.5 1394.5 956 1128 16 7 1050 11-LEFS40ll-1000l 1414.5 1444.5 1006 1178 16 7 1050 526

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

12 10 16 13 13 10 8 M14 x 1.5 M32 x 2 134 3.2 23 The bracket is shipped together.

CL

RR1 RR1 E1 L1 MM A A1 U1 NDH10 NX +0.058 0 +0.058 0 +0.058 0 0.2 0.4 0.2 0.4 0.3 0.5 0.4 0.2 0.4 0.2 0.5 0.3 +0.058 0 +0.058 0 +0.058 0 16 20 22 I-G02 I-G03 I-G04 16 34 41 42 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 20 25, 32 40 8 10 10 8 10 18 Y-G02 20 8.5 25 30 30 M8 x 1.25 10.3 12.8 12 16 20 36 21 IY-G02 IY-G03 IY-G04 34 41 42 11.5 14 14 8 8 20 M10 x 1.25 Y-G03 25, 32 40

RLQ

A A1 E1 L1 MM RR1 U1 NZ L CNS 42 56 16 20 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 I-G04 I-G05 Y-G04 Y-G05 +0.5 +0.3 42 56 14 18 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 36 41.6 +0.058 0 -0.3 -0.5 +0.058 0 +0.5 +0.3 44 50.6 +0.070 0 Knuckle pin and snap ring are included. -0.3 -0.5 +0.070 0 CLS CLQ MLGP Knuckle Pin (Common with double clevis pin) Rod End Nut RLQ MLU d d Dd9 ML1C C m

MQQ

-0.1 -0.2 10 14 H 30 S + Stroke Z + Stroke 9 ZZ + Stroke (mm) Bore size (mm) S Z ZZ CI H 168 177 24 40.5 97.5 20 177 186 30 44.5 102.5 25 16 Series MQM Refer to the standard type on page 14 for other dimensions.

HRX-OM-W060

Press Menu (1) (2) (4) (3) (11) (12) (6) (13) (14) (7) (8) (9) (10) (5) Status screen 5.4 Description of Screen HRL Series 5-14 HRX-OM-W060 Chapter 5 Display and Setting of Various Functions Table 5.4-2 Screen display of status screen No.

Guide Cylinder Series MGG

21 14 Rc 1/8 M6 x 1 depth 13 90 150mm or more 201 82 37 52 65 114 16 38 12 350 to 600 21 14 Rc 1/8 M8 x 1.25 depth 16 101 200mm or more 238 92 44 62 84 138 20 47 12 350 to 800 15 25 Rc 1/4 M10 x 1.5 depth 21 116 250mm or more 285 104 55 75 94 164 25 58 14 26 350 to 1000 16 17 Guide Cylinder Series MGG Basic type/MGGB 63 to 100 4-F through, counter bore G Bottom 4-H Bracket (See table below

E-P HYREG ® Series VY1 1

(With spring washer) ( ) 4-4.5 mounting hole Bracket mounting thread 14-10-8 9 E-P HYREG Series VY1 VY1B00 1-M5 01 M5 external pilot port (VY1B01 only) F.R.L. Rc 1/16 gauge port 2-4.5 Mounting hole Connection mark All types are the same in terms of connection.

CRBB-OM00004

Assembly / Disassembly procedure 12 4.1 With vertical auto switch unit 12 Size 10, 15 12 Size 20, 30 13 Size 40 14 4.2 With angle adjustment unit 15 4.3 With vertical auto switch unit and angle adjustment unit 16 Size 10, 15 16 Size 20, 30 17 Size 40 18 5.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

MK

14 17 17 20 24 30 35 7 7 8 9 0.15 0.15 37 29.5 34 35 7.5 8 10.5 10.5 14 14 19 19 4.5 5 7 7 76 70 81.5 85 16 16 20 20 3 3 3.5 3.5 6.5 6.5 7.5 7.5 17 17 22 28.5 M10 X 1.5 M6 X 1.0 101.5 Rc(PT)1/8 M10 X 1.5 M6 X 1.0 102.5 122 125 0.15 0.15 11 Depth 8 Rc(PT)1/4 0.15 0.15 M12 X 1.75 M8 X 1.25 47.5 Rc(PT)1/4 M12 X 1.75 M10 X 1.5 0.15 0.15 14 Depth 10.5 Note 1) This cylinder rod is retracted.

HRX-OM-Y098

16 18 20 Circulating fluid flow [L/min] It is available in case of Pressure control mode or Set output mode.

Electric Actuator with Integrated Guide

Description RUN 15 +24V Common The positive common of the input terminal. 1, 14 HOLD 3 The terminal that performs setup operations (actuator starting preparation). 2 Starting preparation STOP 16 SET-UP ALARM RESET 4 The terminal that performs program start. RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Operating pressure (MPa) Flow Characteristics/Weight Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Weight (kg) Port size Pilot port size (Nominal size) Function Valve model C [dm3/(sbar)] 14 14 14 14 13 13 14 (13) 14 (13) 13 13 C [dm3/(sbar)] b Cv b 0.28 0.30 0.26 0.30 0.25 0.29 0.32 (0.3) 0.32 (0.3) 0.28 0.28 Cv 3.4 3.8 3.4 3.7 3.0 3.4 3.6 (3.2) 3.6 (3.2) 3.1 3.3 VFRA4111-03

VQ5000

Polarity Lead wire color Dot marking SOL.A 1 () (+) Black None SOL.B 14 () (+) Yellow Black 1 station 1 1 2 3 Stations D side U side 14 SOL.A 2 () (+) Brown None 2 15 VQC SOL.B 15 () (+) Pink Black 2 stations 3 16 4 SOL.A 3 () (+) Red None 17 5 SOL.B 16 () (+) Blue White 3 stations SQ 18 6 19 SOL.A 4 () (+) Orange None 7 SOL.B 17 () (+) Purple None 4 stations 20 VQ0 8 21 SOL.A 5 () (+) Yellow

Vacuum Unit

) () () () () () () 24 23 22 21 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Release valve Supply valve Supply valve 1 1 2 2 stations Release valve 2 stations Release valve 14 Supply valve 2 Supply valve 3 4 3 stations 15 Release valve 3 stations Release valve 3 5 6 Supply valve Supply valve 16 4 stations Release valve 4 stations Release valve 4 7 8 Supply valve 17 Supply valve 5 5

Compact Cylinder with Air Cushion and Lock Series RLQ

A A1 E1 L1 MM RR1 U1 NZ L 42 56 16 20 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 42 56 14 18 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 I-G04 I-G05 Y-G04 Y-G05 36 41.6 +0.5 +0.3 +0.058 0 -0.3 -0.5 +0.058 0 44 50.6 +0.5 +0.3 +0.070 0 Knuckle pin and snap ring are included. -0.3 -0.5 +0.070 0 Knuckle Pin (Also used as double clevis pin) Rod End Nut d d Dd9 C m m l L t t H B Material: Carbon

SFOD-OMT0005CN

No.SFOD-OMT0005CN-C EtherNet/IP (DC24V) / / JXC91 1 . 4 2 . 6 2.1. . 6 2.2. . 7 2.3 . 8 2.4 () . 9 (1) . 9 (2) . 9 (3) . 9 (4)PLC . 9 (5) . 9 (6) . 10 (7) . 10 (8) () . 11 (9) . 11 3 . 12 3.1. . 12 3.2 . 13 3.3. . 14 (1)(JXC917-) . 14 (2)DIN (JXC918-) . 15 3.4. . 16 (1) . 16 (2) . 16 (3) . 17 4 . 18 4.1 (IP ) . 18 4.2 . 19 TMEtherNet/IP TM . 20 4.3 RSLogix5000 4.4 EtherNet/

CLK1

-150Y 522.5 526 518 202 85 167 267 70 108 55 10 140 14 Series CLK1P/CLK1G Auto Switches/Proper Mounting Position and Height for Stroke End Detection D-C7, D-C8 A 8.5 D-H7, D-H7W, D-H7F 8.5 A Hs B Hs B 16 14 14 26 29 (36) D-C73C 8.5 A D-H7C 8.5 A Hs B B Hs 14 36.7 38.2 D-G5NT D-B5, B6 B A Hs Hs B A 24.5 24.5 13 33 13 33 Hs D-A3 D-G3, D-K3 B A 49 B Hs A 49 34 56 18 36 18 36 B D-A4 Hs A 34.5