Type: -, Maximum Indicated Pressure(Mpa): -, Outer Diameter(φ): -, Shape: Back side thread, Maximum Indicated Pressure: 0.4 MPa, Connection screw: R 1/8, Option: None, Size: 57, Grade: Parts: general degreasing, Assembly: general production line, Transparent cover material: Polycarbonate (Hard coated), Attachment: Clear cover has protrusion. (Clear cover is removable). The wrench flats protrude

Display Pressure: 0.4MPa, Connection Thread: R 1/4, M5 Female, Grade: General Degreasing, Production Line, Attachment: Clear Cover Removable, Wrench Tighten

Size: 42.5 O.D., Display Pressure: 0.4MPa, Connection Thread: NPT 1/8, Clear Cover Material: Polycarbonate, Attachment: Clear Cover Removable, Wrench Tighten, Option: -

Size: 46 (42.5 O.D.), Display Pressure: 4 (0.4MPa), Connection Thread: N01 (NPT 1/8), Clear Cover Material: Polycarbonate, Attachment: C2 (Clear Cover Removable, Wrench Tighten)

A_HEC-OM-K001

3.2.8 Communication Function. 3-4 3.2.9 Remote ON/OFF function. 3-5 3.2.10 Output cutoff Alarm Function . 3-6 Chapter 4 Installation . 4-1 4.1 Installation, Transport and Transfer . 4-1 4.1.1 Transport and Transfer . 4-1 4.1.2 Environment . 4-1 4.1.3 Set-up in Clean Room . 4-2 4.1.4 Installation . 4-2 4.2 Piping . 4-3 4.2.1 Preparation of Facility Water . 4-4 4.2.2 Preparation of Recirculating

Table of Contents

Applicable shaft types: J, K, T C1 = C (mm) D1 L1 max X (mm) D1 = Shaft type Y L2 max D2 Size J K T J K T J K T Size C1 Y = C2 50 50 3 to 11.9 X 3 4 to 39.5 4 to 39.5 Y 3 3 to 11.9 L2 = 63 63 3 to 14.9 X 3 4 to 45 4 to 45 Y 3 3 to 14.9 L1 = D2 = C2 = C X = 80 80 3 to 16.9 X 3 4 to 53.5 4 to 53.5 Y 3 3 to 16.9 100 100 3 to 24.9 X 4 5 to 65 5 to 65 Y 4 3 to 24.9 11-4-16 82 Simple

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T C1 = C (mm) D1 L1 max X (mm) D1 = Shaft type Y L2 max D2 Size J K T J K T J K T Size C1 Y = C2 50 50 3 to 11.9 X 3 4 to 39.5 4 to 39.5 Y 3 3 to 11.9 L2 = 63 63 3 to 14.9 X 3 4 to 45 4 to 45 Y 3 3 to 14.9 L1 = D2 = C2 = C X = 80 80 3 to 16.9 X 3 4 to 53.5 4 to 53.5 Y 3 3 to 16.9 100 100 3 to 24.9 X 4 5 to 65 5 to 65 Y 4 3 to 24.9 11-4-16 82 Simple

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T C1 = C (mm) D1 L1 max X (mm) D1 = Shaft type Y L2 max D2 Size J K T J K T J K T Size C1 Y = C2 50 50 3 to 11.9 X 3 4 to 39.5 4 to 39.5 Y 3 3 to 11.9 L2 = 63 63 3 to 14.9 X 3 4 to 45 4 to 45 Y 3 3 to 14.9 L1 = D2 = C2 = C X = 80 80 3 to 16.9 X 3 4 to 53.5 4 to 53.5 Y 3 3 to 16.9 100 100 3 to 24.9 X 4 5 to 65 5 to 65 Y 4 3 to 24.9 11-4-16 82 Simple

CRB2/CRBU2/CRB1

D2 J K T J K T J K T Size C2 Y = 50 4 to 39.5 Y3 3 to 11.9 C1 L2 = 50 3 to 11.9 X3 4 to 39.5 63 Y3 3 to 14.9 4 to 45 63 3 to 14.9 X3 4 to 45 D2 = L1 = C2 = C 80 Y3 3 to 16.9 4 to 53.5 80 3 to 16.9 X3 4 to 53.5 X = 100 Y4 3 to 24.9 5 to 65 100 3 to 24.9 X4 5 to 65 80 Simple Specials Series CRB1 Axial: Top (Long-shaft side) Axial: Bottom (Short-shaft side) Symbol: A45 Symbol: A46 The short

(full span), GAUGE, SRH PRESSURE, AIRLINE EQUIPMENT, AR REGULATOR, 22, AR NO SIZE RATKIT/ACCESSORY, .30963 lb, ModelPressure range (1)Indication unitConnection threadNote MPaG46-4-01/020 to 0.4MPaR 1 8, 1 4?

Size: 42.5 O.D., Display Pressure: 1.0MPa, 150psi, Connection Thread: R 1/4, Clear Cover Material: Polycarbonate, Attachment: Clear Cover Removable, Wrench Tighten, Option: Both MPa and psi

Size: 42.5 O.D., Display Pressure: 0.2MPa, 30psi, Connection Thread: R 1/4, Clear Cover Material: Polycarbonate, Attachment: Clear Cover Removable, Wrench Tighten, Option: Both MPa and psi

Size: 42.5 O.D., Display Pressure: 0.4MPa, 60psi, Connection Thread: R 1/4, Clear Cover Material: Polycarbonate, Attachment: Clear Cover Removable, Wrench Tighten, Option: Both MPa and psi

SMC Pneumatic Clean Series

S + Stroke FX FZ Relief port 20, 25 F T H ZZ + Stroke Z + Stroke Standard port 20 to 32 FY 45 4-FD Relief port (32, 40) 40 (mm) FX 66 52 40 40 34 B 10.7 7.5 7.5 7.5 DL FT 22 17 17 13 B1 FD F AL FZ G H1 H2 E C2 K I HC H FY D B2 A MM Bore size 0 41 32 32 26 20-0.033 40 32 25 20 60 60 60 4 4 4 16 13 13 13 7 7 7 5 24 46.5 37.5 33.5 28 21 19.5 19.5 15.5 24 22 22 18 14 12 10 8 47.3 37 37 30 10

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Mounting hole 1.5 ZZ + Stroke S + Stroke F FY 40 (mm) B WB 13 13 13 16 ZZ H H2 H1 B2 B1 80 80 82 108 F S 1/8 1/8 1/8 1/4 P A 20 25 32 40 AL 18 22 22 24 D 15.5 19.5 19.5 21 C2 34 40 40 52 FD 30 37 37 47.3 E 8 10 12 14 GC 13 13 13 16 FT 7 7 7 7 KA FL 10.5 10.5 10.5 13.5 FX 4 4 4 5 FY 60 60 60 66 FZ 36 Z 75 75 75 82 GA 8 8 8 11 GB 6 8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 NN 24

Rotary Actuator

(mm) Q1 = M C1 = C Q2 Y L2 max Size (mm) L2-(3 x P) 10 X L1 max Q1 Size 3 5.5 to 8 Y-1 Y= 10 15 7.5 to 14 X-3 3, 4 7.5 to 9 Y-1.5 3 L2= 15 C2 = C 20 10 to 18 X-4 3, 4, 5 9 to 10 Y-1.5 L1-(3 x P) 3, 4 X = 20 30 12 to 20 X-4.5 3, 4, 5, 6 11 to 13 Y-2 3, 4, 5 L1 = Q2 = M 30 40 14 to 22 X-5 3, 4, 5, 6, 8 14 to 15 Y-4.5 3, 4, 5, 6 21 Series CRB2 Axial: Top (Long shaft side) Axial: Bottom (Short

Rotary Actuator/Vane Style Series CRB2

(mm) Q1=M Q2 Y L2 max Size (mm) L2-(3 x P) C1=C 10 Q1 X L1 max Size 3 5.5 to 8 Y-1 DY= 10 15 7.5 to 14 X-3 3 3, 4 7.5 to 9 Y-1.5 L2= C2=C 15 20 10 to 18 X-4 3, 4 3, 4, 5 9 to 10 Y-1.5 L1-(3 x P) X= 20 30 12 to 20 X-4.5 3, 4, 5 3, 4, 5, 6 11 to 13 Y-2 L1= Q2=M 30 40 14 to 22 X-5 3, 4, 5, 6 3, 4, 5, 6, 8 14 to 15 Y-4.5 71 Series CRB2 Axial: Top (Long shaft side) Axial: Bottom (Short shaft side

CRBU

The standard chamfer (mm) may not be altered deC1 = C E1 = E3 = D2 L2 max L4 Size X (mm) pending on the type of machining required. 10 3 Y 2.5 L2+1.5 X 4 to 8 L1 max D1 L3 Size D1 = C2 C2 = C L4 = L2 = Y = 15 L2+1.5 Y 3 3 to 4 10 4.5 to 9 4 to 14 3 X 2.5 L1+1.5 C1 The standard chamfer 20 3 to 5 Y 3.5 L2+2 15 5 to 10 4.5 to 18 L1+1.5 X 3 3 to 4 D2 = E2 = E4 = may not be altered depending

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) Q1 = M Y L2 max Q2 L2(3 x P) Size C1 = C (mm) D5.5 to 8 10 3 Y 1 Q1 L1 max X Size 10 5.5 to 14 X 1 3 7.5 to 9 15 3, 4 Y 1.5 Y = L2 = C2 = C L1(3 x P) 15 7.5 to 18 X 1.5 3, 4 9.5 to 10 20 3, 4, 5 Y 1.5 X = L1 = 20 9 to 20 X 1.5 3, 4, 5 11 to 13 30 3, 4, 5, 6 Y 2 Q2 = M 30 11 to 22 X 2 3, 4, 5, 6 14 to 15 40 3, 4, 5, 6, 8 Y 4.5 105 Series CRBU2 Axial: Top (Long shaft side) Axial: Bottom

Compact Rotary Actuator Series CRQ2

Description Qty. 4 4 4 4 1 1 1 1 Seal Seal Seal Seal 11 11 11 11 1 1 1 1 Gasket Gasket Gasket Gasket Parts included in seal kit 12 12 12 12 1 1 1 1 Gasket Gasket Gasket Gasket 16 16 16 16 Wear ring Wear ring Wear ring Wear ring 4 4 4 4 17 17 17 17 Piston seal Piston seal Piston seal Piston seal 4 4 4 4 26 26 26 26 Seal washer Seal washer Seal washer Seal washer 2 2 2 2 A set includes all