Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 80 95 (n 4) 2 15 + 40 (n 2) 2 80 + 40 (n 4) 2 85 + 40 (n 4) 2 (n 4) 2 (n 4) 2 D-M9/M9W 80 + 40 95 + 40 90 + 40 "n" pcs. (same surface) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 1 or 2 pcs.

Modular F.R.L. Unit

40 AW30, 40 AW20 AW30, 40 AW10 to 40 AW10 to 40 AW30, 40 AW10 to 40 Symbol 1 2 6 8 C J N R W Z Note 5) Body size 10 20 30 40 Thread type Note 6) Metric thread (M5) Rc NPT G Nil N Note 1) Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) F Note 2) Note 7) When more than one specification is required, indicate in alphanumeric order.

MHZ

End boss type One-touch fitting for coaxial tubing End boss type One-touch fitting for coaxial tubing W W Only the basic type is applicable for 32 and 40.

MHZ

End boss type One-touch fitting for coaxial tubing End boss type One-touch fitting for coaxial tubing W W Only the basic type is applicable for 32 and 40.

Table of Contents

0 IS1000 No. q w e r t y u i o !

Table of Contents

No. q w e r t y u i o !

CNA

1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 Data 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up to 750 With Rod Boot Bore size (mm) Bore size (mm) Stroke range (mm) e l ZZ M MM N P Q H S T V W ZZ f h 40 50 63 80 100 40 50 63 80 100 11 27 1/4 37

CNA

11 Up to 600 35 32 86 27 101 115 1/4 1/4 64 20 40 10 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 Up to 600 40 37 102 32 119 139 1/4 1/4 78 25 52 14 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 Up to 750 40 37 116 41 133 160 1/4 1/4 92 30 52 14 13.5 18 116 150 92 180 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 K KA M MM N P Q H S T V W ZZ J 6 14 11 M14 x 1.5 27

Slider Type Ball Screw Drive/11-LEFS Series

W [kg] Work load: W [kg] 50 20 40 Lead A 30 Lead A Lead H 10 20 Lead H 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] 40 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) For Step Motor (Servo/24 VDC) LECP6, LECP1, LECPMJ The following graph shows the values when moving

C95

Ht B Auto Switch mounting positions and dimensions [mm] Auto switch operating ranges [mm] D-Z7/Z8, D-Y5/Y7 (W) All models D-Y6, D-Y7 (W) V D-Y7BA Bore Size [mm] Bore Size [mm] D-Z7 D-Z8 D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA A B Hs Ht Hs Ht Hs Ht 14 1.5 25.5 23 26.5 30 7.5 5.5 3.5 23 23 32 32 25 1.5 29.5 26 30 34 8.5 5.5 3.5 26 26 40 40 26.5 2 33.5 31 34.5 31 38 31 7.5 7 3.5 50 50 31.5 2 39 36

Table of Contents

Refer to dimensions on pages 14-20-40 to 14-20-41 for details. w e Sight glass Tempered glass AM850 is aluminum casted. Replacement Parts AME450 Model No.

energy saving effect

Power cable entry (Hole 40) (Grommet with membrane) Note) A breaker handle is equipped as standard for the 400 V type only. 172 Thermo-chiller Inverter Type HRSH Series Dimensions HRSH100/150/200/250-W-20 (Water-cooled 200 V type) HRSH100/150/200/250-W-40 (Water-cooled 400 V type) HRS HRS 090 Eye bolt M12 (4 places) 715 HRS 100/150 687 Operation display panel Facility water outlet Rc1 HRSH

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Glossary of Terms Specific Product Precautions 40 JSXM Series Construction JSXM20, 30, 40, Normally closed (N.C.) Body material: Aluminum q w e r t y u i IN IN o !0 OUT (Blow) !1 !2 Component Parts No.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

CA2

8 40 50 63 80 100 MBB40-PS-W MBB40-PS Seal retainer Rolled steel Zinc chromated !9 Consists of numbers #0, #1, #2, #4, and #6 above.

SY

(g) n: Number of stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For 10 stations or more (5 stations or more in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA and EB ports on both sides.

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-Pad Type ~ Type 2 4 -' 6 8 10 1316 20 25 32 40 50 .

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CBM2-20-PS CBM2-25-PS CBM2-32-PS CBM2-40-PS Carbon steel i Lock piston Hard chrome plated, Heat treated Carbon steel o With Double End Lock MGP Lock bushing Zinc bronze die cast !0 Lock spring CBM2-20-PS-W Order No. CBM2-25-PS-W CBM2-32-PS-W CBM2-40-PS-W Zinc chromated Steel wire !1 MGQ Bumper Urethane Alloy steel The seal kit is a set of @6 and @7.

Cylinder with Lock

[Horizontal] W Unlock port SOL.C SOL.B Locked Manual lock released SOL.A Bore size [mm] Hexagon wrench size of the lock release bolt 32, 40 3 50, 63 4 80, 100 5 Regulator 2.