Compact Type 32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 0 20 40 100 60 80 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 50 mm stroke 13 CXSJM CXSJL Graph V = up to 400 mm/s; up to 50 mm stroke 12 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 15 15 10 10 0.01 0 20 40 100 60 80 0.01 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 5 Compact
19 11.5 T 9 20 2-M5 x 0.8 thread depth 8 2-M8 x 1.25 thread depth 12 (30) (Z) 8 75 0.2 16 (mm) S SS ZZ Z Part no.
In this case, an intermediate stop can be performed only by using an external stopper, etc. Note 2) Depending on the operating environment, etc., order made products should also be reviewed. Note 3) An external guide system should be installed when over specifications. (Refer to page 6 for intermediate stops.) (Refer to pages 20 through 24.)
Dimensions Rear flange type/MQMLG (except 6) 10, 16, 20, 25 FY FT FX H S + Stroke 2-FC FZ Z + Stroke ZZ + Stroke (mm) Bore size (mm) FC FT FX FY FZ H S Z ZZ 5.5 2.3 33 20 42 28 65 95.3 101 10 5.5 2.3 42 24 54 30 74 106.3 114 16 7 4 60 34 75 40.5 97.5 142 151 20 7 4 60 40 75 44.5 102.5 151 160 25 Single clevis type/MQMLC (20 and 25 only) 20, 25 (non-integrated type) +0.058 0 9 hole H10 CI
Note 2) The time required for 90% valve movement when an actuation pressure of 0.5MPa (72psi) is applied. There is a difference of about 20% in this value at the upper and lower pressure limits.
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
20 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3 !
20 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3 !
KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5
(IEC 60417-5032-1) How to see the serial number Z R 001 APR 2021 Z R 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2021 Z Repeated from A to Z in alphabetical order 1 o Repeated from O to Z in alphabetical order, with O for January and Z for December 2022 A 2 P 2023 B 3 Q Fig. 1-1 Position of the product label HRL Series 1.4 Product Label 1-3 HRX-OM-X037 Chapter 1 Safety Instructions
M2 z y z CY1S m4 x g x Y m3 x g x X Y M3 m4 x g CY1L g: Gravitational acceleration CY1H Dynamic Moment CY1F CY1F z CYP Mounting orientation Horizontal Ceiling Wall Vertical M1 x a x mn x g 1.4 100 Dynamic load FE 1 3 Dynamic moment a x FE x Z M1E a Dynamic moment M2E is not generated.
Gain switching input Pin no. 12 13 14 19 20 21 22 23 24 25 26 Symbol IM COM GND OZ+ Pin no. 1 2 3 4 5 6 7 8 9 10 11 Signal description Torque monitor signal Control signal power supply Symbol COM+ SRV-ON A-CLR CL GAIN DIV CWL CCWL ALM COIN SP A 35 Driver model MSD013P1E MSD011P1E MSD023P1E MSD021P1E 45 Z phase output Z phase output Z phase output CW pulse input CW pulse input CCW pulse input
D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.
thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane 8H8 depth 8 Z section detail 130 200 52 52.5 Stroke + 150 (table movement range) 22 190 Z section 92 3.3 55 90 82 A section 1.7 4.8 5.8 Stroke + 362 135 A section detail (Switch groove) Stroke + 32 92 3-8H10 depth 5 11.5 20 90 (T-slot pitch) 67 45 62 8-6.6 92 9.4 4.5 10 58 30 Stroke + 216 18 T-slot dimensions The
FT ZZ1 +t+ Stroke Z Z t Stroke (mm) .. ,.,.,." .".
15 12 170 80 80 50 50 12 5.5 10 185 190 90 20 20 87 28 97.5 129.5 50 100 9 80 120 25 12 170 70 40 40 16 20 16 190 90 100 63 63 14 6.5 12 210 215 110 20 20 110 34 110 150 63 126 12 100 153 30 16 190 90 50 50 16 20 16 210 110 120 75 71 16 6.5 14.5 220 230 132 25 25 136 40 120 160 75 150 14 120 178 35 16 205 110 60 60 20 25 20 230 140 Max. 8 Max. 157 Max. 25 Max. 160 Max. 157 Max. 224 Min.
mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.
40 50 Stroke range (mm) 20 to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 mm OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 11 for details on rod end nut and accessories.
Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50
Bore size A B C CD (cd) CX CZ D GA GB H MM NA NB R S U Z ZZ 10 15 12 14 3.3 3.2 12 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18.3 20 5 6.5 18.3 5 8 23 28 M5 x 0.8 12.5 27.5 8 47 10 85 93 6 Smooth Cylinder Double Acting, Single Rod Series CJ2Y Dimensions CJ2Y-Z CM2Y-Z CG1Y-Z MBY-Z CA2Y-Z CS2Y CQSY CQ2Y-Z CJ2X-Z CM2X-Z CQSX CQ2X CUX Double-side bossed (E) CJ2YE Bore size Stroke Z NDh8