Rotary Table/ Displacement m 400 90 80 350 10 20 30 40 MSQA10 (High precision type) 70 60 0 6 5 4 3 2 1 0 5 10 15 20 25 30 Load N Load N MSQ20 MSQB2A 300 100 MSQB20 (Basic type) Displacement m Displacement m 250 80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130
Auto switch Bore size 20 25 32 Nil Without auto switch 20 mm Refer to the table below for applicable auto switches. Auto switches are shipped together but not assembled. 25 mm 32 mm Air cushion A With air cushion Thread type Type Symbol Bore size M thread 20, 25 Nil Rc Cylinder stroke (mm) Refer to next page for Standard Stroke.
-20-m02-D IS10E-20-m03-D IS10E-30-m02-D IS10E-30-m03-D IS10E-30-m04-D IS10E-50-m06-D IS10E-50-m10-D Pressure switch with piping adapter*5, *6 p. 57 *1 m in part numbers for a round type pressure gauge indicates a pipe thread type.
(The switch will stay ON all the time.) 1) For an auto switch without a connect protection circuit, use a contact protection box when the wire length is 5 m or longer. 2) Even if an auto switch has a built-in contact protection circuit, when the wiring is more than 30 m long, it is not able to adequately absorb the rush current and its life may be reduced.
(The switch will stay ON all the time.) 1) For an auto switch without a connect protection circuit, use a contact protection box when the wire length is 5 m or longer. 2) Even if an auto switch has a built-in contact protection circuit, when the wiring is more than 30 m long, it is not able to adequately absorb the rush current and its life may be reduced.
(The switch will stay ON all the time.) 1) For an auto switch without a connect protection circuit, use a contact protection box when the wire length is 5 m or longer. 2) Even if an auto switch has a built-in contact protection circuit, when the wiring is more than 30 m long, it is not able to adequately absorb the rush current and its life may be reduced.
Bore Sizes 20 and 25/MLGPM20, 25 (Slide bearing) Operating range as stopper for MLGPM20, 25 100 l = 50mm l = 50mm 25 Weight of transferred object: m (kg) m m 20 5 10 10 20 30 40 50 Transfer speed: (m/min) Bore Sizes 32 to 100/MLGPM32 to 100 (Slide bearing) Operating range as stopper for MLGPM32 to 100 1000 l = 50mm l = 50mm Weight of transferred object: m (kg) m m 100 80 63 50 40 32
Bore Sizes 20 and 25/MLGPM20, 25 (Slide bearing) Operating range as stopper for MLGPM20, 25 100 l = 50mm l = 50mm 25 Weight of transferred object: m (kg) m m 20 5 10 10 20 30 40 50 Transfer speed: (m/min) Bore Sizes 32 to 100/MLGPM32 to 100 (Slide bearing) Operating range as stopper for MLGPM32 to 100 1000 l = 50mm l = 50mm Weight of transferred object: m (kg) m m 100 80 63 50 40 32
Cable length (L) Note) The minimum bending radius of the circular connector cable is 20 mm. 26P AXT100-MC26-015 AXT100-MC26-030 AXT100-MC26-050 1.5 m 3 m 5 m Special Wiring Specifications (Option) Mixed single and double wiring are available as an option. The maximum number of manifold stations is determined by the number of solenoids.
Cable length (L) A1 (17.7) (10.2) 1 2 5 6 (14) (18) 1 3 5 8 A B C 1.5 m 3 m 5 m 8 m A6 B1 B3 A1 A3 B6 (13.5) 1 2 5.7 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 10 m LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 8 A B C 15 m Actuator side Controller side 20 m 5.5 6.3 5.7 (14.2) Connector C (Terminal no.)
Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.
Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 10% for each 5 m. (At 15 m: Reduced by up to 20%) 5 The allowable speed for pushing operation.
D-P5DWL BQP1-050 40 to 100 7-6-7 8 Series CQ2 Clean Series Copper-free (For CRT manufacturing process) 20 CQ2B Bore size Stroke D(C)(M) 10 CQ2B Bore size Stroke D(M) 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 12, 16, 20, 25, 32, 40, 50, 63 Copper-free Clean Series 10-Relief type 11-Vacuum type The type which is applicable for using inside the clean room graded Class 100 by making an actuators
Model number: HRR010-AN/WN-10/20 The transition connector from Rc to NPT is enclosed as an accessory. For NPT piping, be sure to use this connector. Model number: HRR010-AF/WF-10/20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.
Note) Bar length (mm) KJH04-M5-X34 460 to 700 860 to 1580 1660 to 2220 Note) Plug (M-5P-X112) 1 pc. is shipped together. Symbol X13 2 Non-standard power supply cable length Available in 1 m increments from 1 m to 20 m. Note 1) 11 m or longer power cables are not CE Marking-compliant. Note 2) Use standard power cables for 3 m and 10 m lengths.
For HRR050-AF-20/40G thread adapter set 1 set For HRR050-AN-20/40NPT thread adapter set 1 set 1 In the case of option Z, not included.
thread depth N 2 x M thread depth N WN: M12 connector D K F C J E IN B1 B 2 x Port size 1(IN), 2(OUT) port A G 2 x M thread depth N Glossary of Terms [mm] Size Port size A B B1 C D E F G M N 20 1/8, 1/4 19 43 21 64.3 36 9.5 18 12.8 M4 6 30 1/4, 3/8 24 45 22.5 80.7 42 12 21 19 M5 8 Size Port size DIN terminal DIN terminal without connector M12 connector J K L J K J K 20 1/8, 1/4 43.4 55.3
x n)+78 AL 20 22 18 28 28 52.5 5.3 39 14 3 5 5.5 SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 SMC MPa 84 56 8 11.5 28 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.
M B For 2 to 10 stations: Both sides Special combination 20 20 stations 20 For 20 stations Note) 25 type is able to use with individual SUP spacer and individual EXH spacer assembly. Refer to page 3-3-14.