IIIIIII

F . 2 20 lbs. (1 ks.)

One-touch Fittings Series KQ2

O e b u t ) h c n i ( t h g i e W ) g ( . o N t r a P D L Q M . n i M . a i d e l o h 8 / 1 0 0 1 0 T 2 Q K 6 . 9 5 . 7 1 3 . 4 5 . 5 1 5 . 2 5 2 3 / 5 0 0 3 0 T 2 Q K 4 . 0 1 8 1 5 . 4 6 1 3 5 6 1 / 3 0 0 5 0 T 2 Q K 4 . 1 1 5 . 9 1 8 . 4 5 . 6 1 5 . 3 7 4 / 1 0 0 7 0 T 2 Q K 2 . 3 1 5 . 0 2 3 . 5 7 1 6 . 4 9 6 1 / 5 0 0 9 0 T 2 Q K 2 . 5 1 3 2 6 5 . 8 1 6 2 1 8 / 3 0 0 1 1 T 2 Q K 9 .

LEC-OM07605CN

(L) W E L d 11 25 11. 11.9 (1) ACPWM 30cm 10 {Ig1 + Ign + Iga + K (Ig2 + Igm)} [mA] (11.1) K NV M NV-SP NV-SW NV-CP NV-CW NV-HW 1 Ig1 Iga Ig2 Igm Ign BV-C1 NFB 3 NV-L Ig1: (11.5) Ig2: (11.5) Ign: (FR-BIF14.4mA) Iga: (11.3) Igm: (11.2) 120 10 0 [mA] 80 60 40 20 0 2 5.5 14 38 100 3.5 8 22 60 15 0 80 30 [mm] 11.7 CV1km(lg1lg2) 11 26 11. 11.2 (Igm) [W] [mA] 50750 0.1 11.3 (Iga

MB1

Width across flats MM W Cushion valve Dimensions D Effective thread H A K ZZ + Stroke H F Width across flats 14 18 22 22 26 31 Bore size (mm) Effective thread length ZZ + Stroke ZZ W MM K H D A 32 40 50 63 80 100 139 146 166 166 192 208 7.2 9.7 10.5 12 14 15 M14 x 1.5 M18 x 1.5 M22 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 6 7 10 10 10 16 51 58 68 68 74 90 16 20 25 25 30 36 30 35 40 40 40 50 27

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

CNG

20 to 300 301 to 400 Data 22 19.5 17 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 38 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Bore size (mm) 20 25 32 40 W J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65

Fluoropolymer Piping Equipment

LQ1P41-R3 12 6 29 20 26 17 7 20.5 43.5 82.1 39 23 3.6 8 39 24 LQ1P51-R2 19 10 29 20 26 17 7 20.5 43.5 82.1 39 23 7.4 8 39 24 Inch Size Model A side B side E1 E2 H1 H2 J K L1 L2 M1 M2 Min. port size t W1 W2 Applicable tubing O.D.

Sine Cylinder Series REC

B1 I Eh8 Eh8 D NA MM 1.5 Width across flats KA -0.1 -0.2 CX Effective thread length FL AL NA K A U F N N ZZ + Stroke Z + Stroke S + Stroke L H RR (mm) A AL F FL G H H1 I K D B1 CX L KA CD E MM N Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 20 18 15.5 13 8 13 10 9 10.5 10 20 41 5 33.5 5 30 6 25 M10 x 1.25 26 22 19.5 13 10 17 10 9 10.5 10 20 45 6 37.5 5.5 30 8 32 M10 x 1.25 26

Sine Cylinder Series REC

B1 I Eh8 Eh8 D NA MM 1.5 Width across flats KA -0.1 -0.2 CX Effective thread length FL AL NA K A U F N N ZZ + Stroke Z + Stroke S + Stroke L H RR (mm) A AL F FL G H H1 I K D B1 CX L KA CD E MM N Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 20 18 15.5 13 8 13 10 9 10.5 10 20 41 5 33.5 5 30 6 25 M10 x 1.25 26 22 19.5 13 10 17 10 9 10.5 10 20 45 6 37.5 5.5 30 8 32 M10 x 1.25 26

Title not found

AW20 (K) to 40 (KJ !

CG5-S

(mm) Bore size (mm) WA WB WH W ZZ 20 22 16 23 30 118 25 22 16 25 30 123 32 22 16 28.5 25 125 40 22 16 33 20 143 50 25 18 40.5 20 167 63 25 18 47.5 20 167 80 30 22 60.5 20 201 100 31 22 71 20 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT M X Y X Y 8-J 4-LD C 0.1 LS + Stroke LX

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

MGP

m (kg) Load weight m (kg) 20 20 20 20 20 20 16 16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100

NCA1

Not available with W and K option 6-15-6 6 Series NCA1 Auto Switch Specifications Applicable Auto Switch/Refer to page 6-16-1 for further information on auto switches.

NCA1

Not available with W and K option 6-15-6 6 Series NCA1 Auto Switch Specifications Applicable Auto Switch/Refer to page 6-16-1 for further information on auto switches.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

1, respectively. 5 w Lever assembly Packed state K type fitting assembly procedure K type For procedure to set and press fit the insert pin assembly, refer to L, M type fitting assembly procedures. For procedure to set the tubing, refer to J type procedure.

Cylinder with Lock

40 14 64 15.5 47 23 5 58 11 M8 x 1.25 63 35 32 78 75 39 52.5 59.5 90 1/4 56.5 20 45 14 73 16.5 53 20.5 9 58 11 M8 x 1.25 80 40 37 98 95 49 64.5 71.5 113 1/4 72 25 45 20 92 19 65 26 11.5 72 13 M10 x 1.5 100 40 37 116 114 58 73.5 80.5 131 1/4 89 30 55 20 109 19 74 26 17 72 16 M10 x 1.5 With Rubber Bumper [mm] [mm] Bore size K KA KB KC MA MB MC MM N N1 P S V W ZZ 32 6 10 17 3 16 4 16 M10

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

11LEFS Operating humidity range [%RH] 90 or less (No condensation) Motor output/Size 100 W/l40 200 W/l60 400 W/l60 Electric specifications 11LEJS Motor type AC servo motor (200 VAC) Encoder Absolute 20-bit encoder (Resolution: 1048576 p/rev) 25APower consumption [W] Note 6) Horizontal 45 65 210 Vertical 145 175 230 LEC Standby power consumption when operating [W] Note 7) Horizontal 2 2 2

Pin Clamp Cylinders

the port CKQ Arm 7 A B 5.5 2 x Rc1/8 68 28 Port Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number 7.5 075 7.6 076 7.7 077 7.8 078 7.9 079 8.0 080 11.5 15.5 115 11.6 116 11.7 117 11.8 118 11.9 119 12.0 120 155 15.6 156 15.7 157 15.8 158 15.9 159 16.0 160 8 6 20 12 8.5 20 16 11.5 25