VQ5000

(mm) 1in 25.4mm Bottom port diagram 2-G3/4 Conduit port 2n-1/2 (ports A, B) 144.5 143 112.5 83.5 55.5 M5 ground screw 106 59.2 46.8 9 9 34.5 34 n U side 12 X B 2 A 4 6 B A B 2 A 4 5 B A B 2 A 4 SMC SMC SMC SMC 4 B A L2 L1 58.5 P=41 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 48 68.5 P=41 B A 4 1 B A 2 X 12 Stations D side 42 16 107.8 179 15.5 22 51 69 117 2-1/8 (external pilot port) L n Dimensions

HRX-OM-S004

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Option B [Earth leakage breaker] . 4-2 4.2.3 For HRS100/150-**-20-B1,HRS100/150-**-40/46 . 4-3 4.2.4 Setting of circulating fluid temperature . 4-3 4.3 Preparation of circulating fluid . 4-4 4.4 Operation Start and Stop . 4-7 4.4.1 Starting the product . 4-7 4.4.2 Stopping the

MHZ

hole) 0 -0.1 MHK 4 13.6 MHS MHC (28) 12 20 MHT MHY +0.022 0 4 7H8 depth 1.5 When closed 8 0 -0.4 16.5 When open 12 1 MHW 2-M2 x 0.4 thread depth 4.5 (Mounting thread) 11 19.7 MRHQ 44 Misc.

MHZ

MHT MHY +0.022 0 4 7H8 depth 1.5 When closed 8 0 -0.4 16.5 When open 12 1 MHW 2-M2 x 0.4 thread depth 4.5 (Mounting thread) 11 19.7 MRHQ 44 Misc.

ISO Standard Hydraulic Cylinder

(n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) Related Products 2 (Different surfaces and same surface), 1 25 125 165 155 150 145 140 (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-F5NT 25 + 55 125 + 55 140 + 55 145 + 55 150 + 55 155

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list

Modular Type Filter Regulator Series AW

Modular Type Filter Regulator Series AW Filter regulator Series AW Filtration Accessory Model Port size AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 AW40 1/4, 3/8, 1/2 AW40-06 3/4 Pages 56 through 60 Filter regulator with back flow mechanism Series AWK 5m AW20K 1/8, 1/4 AW30K 1/4, 3/8 AW40K 1/4, 3/8, 1/2 Bracket Square embedded type pressure gauge (except for AR10) AW40K-06 3/4 Pages 63 through

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

Stainless Steel One-touch Fittings Series KG

(mm) Weight (g) A D M5 0.8 KGH04-M5 KGH04-01 14 13 9.5 8 17 22 4 4 2.4 9 16 5.6 1 4 KGH04-02 19.5 13.5 14 4 4 1 8 16 18 10 5.6 M5 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 15 18.5 17 11.5 18.5 22.5 23 4 10 12 14 1 8 1 4 6 13.1 13.1 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 24 20.5 15.5 26 27.5 28 26.5 22 30 33.5 14

HRX-OM-M090

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

HRX-OM-R016

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

HRX-OM-W038

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

Slider Type Ball Screw Drive/11-LEFS Series

1) reference plane 4 x M6 x 1 thread depth 9.9 42 44 5.5 60 ( ) +0.030 0 5H9 depth 5 L Cable length 250 A (Table traveling distance) Note 2) (142) (62) 62 70 (2.4) 10 (66) [64] 64 [(66)] Stroke 65 48 41.8 [Origin] Note 4) Origin Note 3) 4 [2] 2 [4] 20 6.5 79 20 30 60 46.8 Motor cable (2 x 5) 14.9 Vacuum port Rc1/8 7.5 M4 x 0.7 thread depth 8 (F.G. terminal) Motor option: With lock Step

EXxx-OMY0006CN

I/O Table 10-3 Byte0 Bit 0 0 1 4 0: OFF, 1: ON 1 1 2 4 0: OFF, 1: ON 2 2 3 4 0: OFF, 1: ON 3 3 4 4 0: OFF, 1: ON 4 4 1 2 0: OFF, 1: ON 5 5 2 2 0: OFF, 1: ON 6 6 3 2 0: OFF, 1: ON 7 7 4 2 0: OFF, 1: ON 1oo247Byte 0Bit 470 Table 10-4 Byte 1 Status bits (Safety Mode (Module Passivation/xxx)) Bit 0: NOKSI PROFIsafe 1: OK PROFIsafe 0 Bit 1 -7 Byte 2-5: PROFIsafe 53 No.EX##-OMY0006CN

HRX-OM-R005

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

HRX-OM-O021

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

-05SD AS221F-02-08SD 3/16" 12.8 25.2 34.5 16.5 36.4 18.5 27.2 8 15.2 42 17.7 AS221F-N02-07SD AS221F-02-10SD NPT 1/4 17.5 18.5 7.2 1.2 34.7 1/4" 13.2 25.2 34.5 17 21 10 18.5 44.5 35.3 44 42 18.3 40.2 AS221F-N02-09SD AS321F-02-06SD 5/16" 15.2 27.2 36.4 18.5 39.3 27.8 17 6 12.8 73 44 AS221F-N02-11SD AS321F-02-08SD 18.3 35.3 44.5 41 3/8" 29.5 18.5 8 15.2 21 76 18.3 R 1/4 19 23 9.8 1.2 49.3 21.3

IDU/IDF

Note 4) Note 4) Note 4) Note 4) Note 4) Refer to pages 19 and 20 for further information on options.

Series KG Stainless Steel One-touch Fittings

(mm) Weight (g) A D M5 0.8 KGH04-M5 KGH04-01 14 13 9.5 8 17 22 4 4 2.4 9 16 5.6 1 4 KGH04-02 19.5 13.5 14 4 4 1 8 16 18 10 5.6 M5 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 15 18.5 17 11.5 18.5 22.5 23 4 10 12 14 1 8 1 4 6 13.1 13.1 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 24 20.5 15.5 26 27.5 28 26.5 22 30 33.5 14

Pressure Gauge Guide

IR Dimensions VEX AMR 43 25 10 Model (Standard) ITV Model Pressure range Note) Indication unit Connection thread Note IC MPa G49-4-02 G49-7-02 G49-10-02 0 to 0.4 0 to 0.7 0 to 1.0 44 1 4 R MPa VBA R 1/4 Note) Do not apply pressure more than the maximum display pressure. This will cause a malfunction.