5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L: L plug connector with lead wire LO: L plug terminal without lead wire M: M plug connector with lead wire MO: M plug terminal without lead wire 5 5 (R1) 1 (P) 3 (R2) Except VQZ1000 and metal seal style.

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

VQ4000

Electrical entry of manifold (except L and C kit) is individual wiring. For details, refer to internal wiring figure of each kit. Cable length is 0.6 m for L kit.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

M3 Port size With One-touch fitting AS M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 Thread type U10/32 01 02 03 04 ASP R Unified thread (10-32 UNF) Metric thread (M3, M5) Nil ASN N NPT AQ ASV Needle Valve/Flow Characteristics AK AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 ASS Inlet pressure: 0.5

REC

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

ARJ310

Construction ARJ310-01 ARJF310F-01 y e !

Miniature Regulator Series ARJ310

Construction ARJ310-01 ARJF310F-01 y e !

Information

(mm) ASG32F-01 4 ASG42F-02 6, 8 ASG52F-03 6 ASG62F-04 Sealant: Special FKM Seat ring: Stainless steel 303 8 12 4, 6 8, 10 10, 12 460 790 920 1580 100 180 230 390 Flow rate (l/min (ANR)) Controlled (free) flow 7 12 14 24 1.5 2.7 3.5 6 Effective area (mm2) Applicable tubing materials Note) Flow rate is measured at 0.5 MPa and 20C.

HRX-OM-T004

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRS090 Series 5-20 HRX-OM-T004 Chapter 5 Simple communication

HRX-OM-R028

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRSH Series 5-20 HRX-OM-R028 Chapter 5 Simple communication

With Factory Installed

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.1 i'--... 01 5 O~ o 0.2 0.3 0.4 0.5 0.6 0.7 08 0.9 1 00 1000 2000 Flow ra te / mi n IANR) Inlet pressure MPa AR3001-03 AR3001-03 0.6 ~ 0.5 ---'" " Jp J 0.25 '" I r~r " ::;; l' 0.2 ~ --P l' a. r< & "" & l' ::> 0.4 ~ ~ ~ 0.3 ~ -... a. ID '$'2 1-?/"(9 . "OS .

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

rotations Number of needle rotations OUT-Exhaust Flow IN-OUT Flow OUT-Exhaust Flow Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm 2) Number of needle rotations Number of needle rotations Inlet pressure (MPa) IN-OUT Flow OUT-Exhaust Flow Inlet pressure: 0.5 MPa Effective area (mm 2) Flow rate (l/min

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS2052FS AS1002FS AS2002FS Inlet pressure: 0.5 MPa 500 Inlet pressure: 0.5 MPa 100 08, 09 Inlet pressure: 0.5 MPa 06, 07 01, 23, 03, 04, 06, 07 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] 200 400 06, 07 03, 04 300 50 100 200 100 0 0 5 10 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002FS AS4002FS Inlet pressure

Table of Contents

m Dd9 L (Drill through) 3 x 18 l 4 x 25 l 4 x 35 l 4 x 36 l 0.040 0.076 CD-M03 CD-M05 CD-M08 CDP-7A 10 14 22 25 20, 25 32, 40 50, 63 80 3 4 4 4 4 4.5 5 5 36 51 72 78 44 60 82 88 0.050 0.093 0.065 0.117 0.065 0.117 l m L Note) When using cotter pins, flat washers are used together.

AS-FPQ/AS-FPG

AS121FP-M5 AS221FP-01 AS221FP-02 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08,10 06,08 06 04 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FP-03 AS421FP-04 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa 12 10 Flow rate (L/min (ANR

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

AS1201F-M5, AS1211F-M5 AS2201F-01, AS2211F-01 AS2201F-02, AS2211F-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 80 60 40 20 0 0 2 4 6 8 Number of needle rotations Number of needle rotations Number of needle rotations AS3201F, AS3211F AS4201F, AS4211F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (

AS-FPQ/AS-FPG

AS121FP-M5 AS221FP-01 AS221FP-02 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08,10 06,08 06 04 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FP-03 AS421FP-04 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa 12 10 Flow rate (L/min (ANR

Vacuum Unit

Length symbol Tension bolt assembly (2 pcs. per set) [L = 12.5 x M + 10.5] M: Length symbol 1 to 40 to 1 L = 23 40 L = 510.5 Exploded View e ZK2 TB1 A 05 to Applicable stations L 01 For 1 station manifold 1.25 P = 12.5 5.25 7.5 10 For 10 stations manifold 35 25 Port plug assembly Port plug assembly Exploded View t Exploded View r 5.5 (Purchasing order is available in units of 1 piece

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L A L D Applicable fitting size d Model 10-KQP-04 16 32 6 4 10-KQP-06 18 35 8 6 10-KQP-08 20.5 39 10 8 10-KQP-10 22 43 12 10 10-KQP-12 24 44.5 14 12 10-KQP-01 16 31.5 5 1/8" 10-KQP-03 16 32 6 5/32" 10-KQP-07 18 35 8.5 1/4" 10-KQP-09 20.5 39 10 5/16" 10-KQP-11 22 43 11.5 3/8" Type 16, Cassette base Type 10, Tie-rod base Series Manifold type SUP block disk EXH block disk 10 SV1000-59-1A SV1000

3 Way,3 Port Solenoid Valve NVZ Series

Bhmk Pbtc Ass'U Manifold Base Diference Behoeen NVZ77O andNWT3O Screw with o ,3 Botly Ported Type inch (mm) crommet//NVZIOO.OG NVZTOO-OH G11.81(300) L type plug connector.,'NVZOO.OL : M type plug connector//Nvzl OGOM f : With indicator light and surge voltage suppressol o 01.20 Manifold.,/ Top Ported crommeVNW3Z-01-(OG) Nvv3ZI-01-(OH) L VPe plug connector /NvvSz1-01-(OL) M type plug connecior