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,oox'o''"n' ar3oro 60 Nole 2) Drain guide is G1i 4 (app cable 10 AF30lo 60) Nore 1) Wlhoul a valve name plate and caulion A F 1 0 1 0 6 0 Port size Symbol Port 1 0 20 30 40 50 60 Symbol Descrlption Applicable M5 a 1 B O AF20 to 60 1t4 a a a 3a a a 1t2 a g4 a a 1 a a auto dlain (N C.)

C95

40 36 43 36 9.5 7.5 4 63 63 31.5 6 47.5 45 48.5 45 52 45 9.5 6.5 4.5 80 80 31.5 6 55.5 53.5 56.5 53.5 60 53.5 10.5 5.5 5 100 100 Note) This is a standard including hysteresis, and is not guaranteed.

CHKD/CHKG

B A B Cylinder tube Note) When tightening the auto switch mounting screw, use a watchmaker's screw driver with a grip diameter of 5 to 6 mm.

0.4

B A B A B A B A B A A 93.5 0 (35) 66 75 1 2 (40) 3 2 4 6 x M4 mounting hole Input block SI unit D side 8 Stations 7 6 5 4 3 2 1 U side n C8: 8 One-touch fitting C8 [3(R) EXH port] 2 x M12 4 x M8 3-pin socket DIN rail clamp screw R R 0 BUS 62.5 1 3 3 60 X X 40.5 2 B B B B B B B B 12 12 PWR 3 P P 25 1 1 A A A A A A A A 18.5 9.5 7.5 (12) (7.5) M3 C8: 8 One-touch fitting C8 [1(P) SUP port]

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the bolt a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a o a a a a a a a a a a a a a a a a a a a a r a o a a AF Air filterTBody Descrplon Applicable l\,4eia bow AF10 to 60 Nylon bow AF10 to 60 I\4elai bowlwth eve gauge AF30 lo 60 Thread type With bowl guard AF2O Nole 1) Drarn guide s NPT114 (appicable 10 AF30 to 60), and the exhaust poir ior aUo drarn comes wlh

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Secondary Batteries

Standard Type 1(P): One-touch fitting 2(A): One-touch fitting Applicable tubing O.D. (mm) Bracket assembly no. 1(P) 2(A) 4 90-VHK-B1A 4 4 6 90-VHK-B1A 6 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): One-touch fitting 6 8 90-VHK-B1A 8 2(A) Applicable tubing O.D. (mm) 2(A) Applicable tubing O.D.

Modular Type Air Filter Series AF

to left AF30 to 60 F Note 2) R Z Note 6) AF20 to 60 Note 1) Drain guide is NPT1/4 (applicable to AC30 to 60) Note 2) Drain guide is G1/4 (applicable to AF30 to 60).

Air Fittings & Tubing

Port A size Port B size Number of Port A Porting Port A Port B Model 4 8 10 12 Rc(PT) Rc(PT) 6 8 10 6, R(PT) 6, R(PT) 6, R(PT) 8 ,R(PT) 8, R(PT) 8, R(PT) 10, R(PT) 10, R(PT) 10, R(PT) 6 8 10 4 6 6 8 One-touch fitting One-touch fitting 6, 10 KM11 1 4 3 8 Rc(PT)female thread 6, 10 One-touch fitting KM12 One-touch fitting One-touch fitting 3 KM13 1 8 1 4 3 8 1 8 1 4 3 8 KM11 One-touch fitting

CJ5-S

LS + Stroke LX LZ ZZ + Stroke Bore size (mm) Stroke range A AL B1 B C D GA GB H H1 I J K KA LD LH LS LT LX LZ M MM NA P S X Y ZZ 20 Up to 350 18 15.5 13 37.5 16.5 8 18 12 35 5 31 M4 x 0.7 5 6 6 22 59 3 40 50 3 M8 x 1.25 29 1/8 83 15 7 124 25 Up to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 Up to 450 22 19.5 17 44 20 12

CJ5-S

1.25 29 1/8 83 15 7 124 25 Up to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 Up to 450 22 19.5 17 44 20 12 18 12 40 6 38 M5 x 0.8 5.5 10 7.2 25 59 3 44 60 3.5 M10 x 1.25 35.5 1/8 85 16 6 131.5 40 Up to 800 30 27 19 53.5 26 16 19 13 50 8 47 M6 x 1.0 6 14 7.2 30 66 3 54 75 4 M14 x 1.5 44 1/8 93 16.5 6.5 150 50 Up to 1200 35

Rotary Table/

61 60 28 40 22 6 65 67 65 32 48 19.5 30 6 76 13.5 67 65 32 48 22 6 68 77 75 35 54 21.5 34 7 87 15.5 77 75 35 54 24 7 77 Dimensions other than above are identical to the high precision type.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(6.3) Rubber hose 12 10 9 8 7 6 6 Cylinder bore size 20 5 5 4 (Steel pipe I.D.) 4 3 2 7 6 5 4 3 2 20 30 40 50 60 80 100 200 300 400 500 2.8 Flow velocity inside pipe (m/s) Piston speed (mm/s) Viewing the chart: Example) The flow rate necessary to operate a 50 cylinder at a speed of 100mm/s is 12l/min.

SZ3000

16.2 17.8 Approx. 300 16.2 17 36.7 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 P 1 P 1 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 (L4) L3 (3.2) 113.7 U Side D Side 3.1 8 36.3 43.7 5.5 (DIN rail dimension) 35 18 28.8 DIN rail holding screw Manual override In case

LEC-OM07605CN

(b)(SW1) 164( (3)(c)) (SW1) 8 7 6 9 A 5 B 4 C 3 D 2 1 0 F E (c) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D

e-Rodless Actuator

(A clearance of 40 or more is required.) 60 132.2 (49.6) 110.8 (96.7) 96.7 35.5 (60) 100 94 35.5 60 Motor 2-5H7 depth 5 43.5 71.5 60 42 102 128 5 60 71.7 7.5 50 Controller 60 5.5 7.5 2-9.5 counterbore depth 5.4 5 5H7 8.2 15.5 17.5 (51.8) 37 Long hole depth 5 4-M5 x 0.8 depth 9 87.3 9.5 T-slot section for mounting FG terminal M3 198 + Stroke 6 2 x 2-5.5 through hole 8.5 5.3 3 Motor position

Rubber seal 5 Port Solenoid Valve Series SYJ7000

62.8) 62.3 (DIN 63.6) R P R A B A B A B A B A B 30 R P R 21 21 83.7 [85.9] 84.5 [86.7] 17 21 60 1/4 (P, R port) Manual override 1/8 (A, B port) (Pitch) P = 19 23.5 Built-in one-touch fitting (Station n) (Station 1) (Light/surge voltage suppressor) One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" 8, 5/16" 58.5 [65.5] + + + + + 43.1 26.5 (4.9) 63 L plug connector (L) M plug connector

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

adjuster at retraction end) 7.5 I Operating port 2 x Rc, G, NPT1/8 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 GA HA NN x M8 x 1.25 thread depth 16 A B 7 2 6.6 11 12 12 38 B A 16 34 16 34 H Section AA Section BB (NN 1) x H G (mm) Model F 50 50 50 60 35 60 70 75 80 ZZ 133.5 133.5 133.5 143.5 156.5 197.5 238.5 296.5 336.5 M 92 92 92 102 115 156 197 255 295 Z 90.5 90.5 90.5 100.5 113.5

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

1(0) 1(0) 2(0) 7 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5)

IDU/IDF

A combination of three or more optional items is handled as a special order product. 22C/22C1 R22 37C/37C1 55C 75C Note 2) 200 to 240VAC is "S" specification standard. 6 Single phase 220VAC (50Hz) Note 3) Combinations of A and H, H and M, R and S, S and T are not available. Note 4) Options "T" and "W" are not available for IDF37C, 55C and 75C-4/6.